Abstract
Formation, trapping, and modification of powder particles in laboratory received growing interest during the last decade in research and technology with novel and unique properties. Applications of complex (dusty) plasmas are numerous, most of them emerging in modern material science. For the optimizations of these processes, a detailed knowledge of plasma–particle interaction is needed. On the other hand, due to the interaction between small (test) particles and the surrounding plasma information on the electric field in front of surfaces and the energy fluxes in the plasma can be obtained. Dust particles can be used as a diagnostic tool, for example, by observing position and motion of the particles in dependence on the discharge parameters. In a certain sense, one can state that “complex (dusty) plasmas” are a rapidly expanding field of research at the border between plasma physics, material processing, and diagnostics, for example, for synthesis and modification of powder particles.
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References
A. Bouchoule, Dusty Plasmas: Physics, Chemistry and Technological Impacts in Plasma Processing (Wiley, Chichester, 1999)
A. Bouchoule, Phys. World 6, 47 (1993)
A. Bouchoule, L. Boufendi, J. Hermann, A. Plain, T. Hbid, G.M.W. Kroesen, E. Stoffels, W.W. Stoffels, Pure Appl. Chem. 68, 1121 (1996)
G.S. Selwyn, Plasma Sour. Sci. Technol. 3, 340 (1994)
G. Lapenta, J.U. Brackbill, Plasma Sour. Sci. Technol. 6, 61 (1997)
W. Böhme, W. Köhler, M. Römheld, S. Veprek, IEEE Trans. Plasma Sci. 22(2), 110 (1994)
Ch. Hollenstein, W. Schwarzenbach, A.A. Howling, C. Courteille, J. Vac. Sci. Technol. A 14(2), 535 (1996)
E. Stoffels, W.W. Stoffels, G.M.W. Kroesen, F.J. Dehoog, J. Vac. Sci. Technol. A 14, 556 (1996)
C. Hollenstein, J.L. Dorier, J. Dutta, L. Sansonnens, A.A. Howling, Plasma Sour. Sci. Technol. 3, 278 (1994)
L. Boufendi, J. Hermann, A. Bouchoule, B. Dubreuil, E. Stoffels, W.W. Stoffels, M.L. De Giorgi, J. Appl. Phys. 76, 148 (1994)
T. Fukuzawa, K. Obata, H. Kawasaki, M. Shiratani, Y. Watanabe, J. Appl. Phys. 80, 3202 (1996)
W.W. Stoffels, E. Stoffels, G. Swinkels, M. Boufnichel, Phys. Rev. E 59(2), 2302 (1999)
H. Kersten, H. Deutsch, M. Otte, G.H.P.M. Swinkels, G.M.W. Kroesen, Thin Solid Films 377, 530 (2000)
M. Klick, J. Appl. Phys. 79, 3445 (1996)
H.H. Anderson, Plasma Sour. Sci. Technol. 3, 302 (1994)
W.W. Stoffels, E. Stoffels, G.M.W. Kroesen, M. Haverlag, J.H. Den Boer, F.J. De Hoog, Plasma Sour. Sci. Technol. 3, 329 (1994)
A. Garscadden, B.N. Ganguly, P.D. Haaland, J. Williams, Plasma Sour. Sci. Technol. 3, 239 (1994)
G. Praburam, J. Goree, J. Vac. Sci. Technol. A 12(6), 3137 (1994)
M. Keidar, I.I. Beilis, R.L. Boxman, IEEE Trans. Plasma Sci. 23(6), 902 (1995)
I.I. Beilis, M. Keidar, R.L. Boxman, S. Goldsmith, J. Appl. Phys. 85(3), 1358 (1999)
B. Schultrich, Contrib. Plasma Phys. 39, 463 (1999)
A.C. Xenoulis, G. Doukellis, P. Tsouris, A. Karydas, C. Potiriadis, A.A. Katsanos, Th. Tsakalakos, Vacuum 51, 357 (1998)
S.V. Vladimirov, K. Ostrikov, A.A. Samarian, Physics and Applications of Complex Plasmas (Imperial College, London, 2005)
H. Kersten, H. Deutsch, E. Stoffels, W.W. Stoffels, G.M.W. Kroesen, R. Hippler, Contrib. Plasma Phys. 41(6), 598 (2001)
J. Winter, Plasma Phys. Control. Fusion 40, 1201 (1998)
J. Winter, G. Gebauer, J. Nucl. Mater. 266–269, 228 (1999)
K. Narihara, K. Toi, Y. Hamada, Nucl. Fusion 37, 1177 (1996)
M. Dalvie, G.S. Selwyn, M. Surendra, C.R. Guarnieri, J.J. Mcgill, Appl. Phys. Lett. 63, 3279 (1993)
C.K. Yeon, K.W. Whang, J. Vac. Sci. Technol. A 15, 66 (1997)
Y. Watanabe, M. Shiratani, H. Makoni, Appl. Phys. Lett. 57, 1616 (1990)
G. Uchida, S. Iizuka, N. Sato, IEEE Trans. Plasma Sci. 29, 274 (2001)
M. Onozuka, Y. Ueda, K. Takahashi, Y. Seki, U. Ueda, I. Aoki, Vacuum 47(6–8), 541 (1996)
A. Brattli, O. Havnes, J. Vac. Sci. Technol. 14(2), 644 (1996)
J. Perrin, P. Molinas-Mata, P. Belenguer, J. Phys. D 27, 2499 (1994)
M. Klindworth, A. Melzer, A. Piel, Phys. Rev. B 61(12), 8404 (2000)
M. Wolter, A. Melzer, Phys. Rev. E 71, 036414 (2005)
U. Kogelschatz, B. Eliasson, W. Egli, Pure Appl. Chem. 71(10), 1819 (1999)
N. Rao, S. Girshick, J. Heberlein, P. Mcmurry, S. Jones, D. Hansen, B. Micheel, Plasma Chem. Plasma Proc. 15, 581 (1995)
R. Scholl, G. Natour, in Proceedings of ICPIG XXII, Hoboken, NJ, vol. 363, 1995
T. Ishigaki, T. Sato, Y. Moriyoshi, M.I. Boulos, J. Mater. Sci. Lett. 14, 694 (1995)
I. Roca, P. Cabarrocas, M. Kunst, C. Clerc, H. Bernas, J. Vac. Sci. Technol. A 16(2), 436 (1998)
S. Veprek, Pure Appl. Chem. 68, 1023 (1996)
B. Schultrich, H.J. Scheibe, H. Mai, Adv. Eng. Mater. 2, 419 (2000)
E. Stoffels, W.W. Stoffels, G. Ceccone, R. Hasnaoui, J. Appl. Phys. 86(6), 3442 (1999)
I. Herrmann, V. Brüser, S. Fiechter, H. Kersten, P. Bogdanoff, J. Electrochem. Soc. 152, A2179 (2005)
S. Yan, H. Maeda, J.I. Kusakabe, K. Morooka, T. Okubo, J. Mater. Sci. 28, 1892 (1993)
H. Kersten, P. Schmetz, G.M.W. Kroesen, Surf. Coat. Technol. 507, 108 (1998)
K. Tachibana, Y. Hayashi, Pure Appl. Chem. 68, 1107 (1996)
F. Vivet, A. Bouchoule, L. Boufendi, in Proceedings of ICPIG XXIII, Toulouse, France, vol. I/200, 1997
U. Schürmann, W. Hartung, H. Takele, V. Zaporojtchenko, F. Faupel, Nanotechnology 16, 1078 (2005)
K. Kitamura, S. Akutsu, S. Ito, K. Akashi, in Proceedings of the ICRP-3, Nara, Japan, vol. 357, 1997
G. Thieme, M. Quaas, H. Kersten, H. Wulff, R. Hippler, in Proceedings of the BFPT-10, Greifswald, Germany, vol. 68, 2001
C. Arpagaus, A. Sonnenfeld, P.R. von Rohr, Chem. Eng. Technol. 28, 87 (2005)
H. Kersten, G. Thieme, M. Fröhlich, D. Bojic, D.H. Tung, M. Quaas, H. Wulff, R. Hippler, Pure Appl. Chem. 77, 415 (2005)
F. Vollertsen, S. Vogler, Werkstoffeigenschaften und Mikrostruktur (Hanser, Muenchen, 1989)
U. Konopka, D. Samsonov, A.V. Ivlev, J. Goree, Phys. Rev. E 61(2), 1890 (2000)
K. Matyash, M. Fröhlich, H. Kersten, G. Thieme, R. Schneider, M. Hannemann, R. Hippler, J. Phys. D 37, 2703 (2004)
M. Wolter, A. Melzer, O. Arp, M. Klindworth, M. Kroll, A. Piel, IEEE Trans. Plasma Sci. 35, 266 (2007)
P.S. Epstein, Phys. Rev. 23, 710 (1924)
M.S. Barnes, J.K. Keller, J.C. Forster, J.A. O’Neiil, Phys. Rev. Lett. 68(3), 313 (1992)
M.D. Kilgore, J.E. Daugherty, R.K. Porteous, D.B. Graves, J. Appl. Phys. 73, 7195 (1993)
H. Kersten, G.M.W. Kroesen, R. Hippler, Thin Solid Films 332, 282 (1998)
H.S. Shin, D.G. Goodwin, Mater. Lett. 19, 119 (1994)
M. Karches, Ch. Bayer, P.R. von Rohr, Surf. Coat. Technol. 116–119, 879 (1999)
R. Symes, R.M. Sayer, J. Reid, Phys. Chem. Phys. 6, 474 (2004)
G. Thieme, R. Basner, R. Wiese, H. Kersten, Faraday Discuss. 137, 157 (2008)
G. Mie, Ann. Phys. 25, 337 (1908)
R.J. Hopkins, R. Symes, R.M. Sayer, J.P. Reid, Chem. Phys. Lett. 380, 665 (2003)
M. Wolter, T. Ockenga, M. Haass, J. Blazek, H. Kersten, Plasma Process. Polym. 6(Suppl. 1), 620 (2009). DOI 10.1002/ppap.200931603
R. Basner, F. Sigeneger, D. Loffhagen, G. Schubert, H. Fehske, H. Kersten, New J. Phys. 11, 013041 (2008)
R. Basner, H. Fehske, H. Kersten, S. Kosse, G. Schubert, Vak. Forsch. Prax. 17(5), 259 (2005)
B.M. Annaratone, T. Antonova, H.M. Thomas, G.E. Morfill, Phys. Rev. Lett. 93(18), 185001 (2004)
A.A. Samarian, B.W. James, Phys. Lett. A 287(1–2), 125 (2001)
C. Zafiu, A. Melzer, A. Piel, Phys. Plasmas 9, 4794 (2002)
J. Goree, Plasma Sour. Sci. Technol. 3, 400 (1994)
Y.N. Wang, J.R. Hou, Acta Phys. Sin. 52, 434 (2003)
P.K. Shukla, Phys. Plasmas 8(5), 1791 (2001)
H. Kersten, R. Wiese, G. Thieme, M. Fröhlich, A. Kapitov, D. Bojic, F. Scholze, H. Neumann, M. Quaas, H. Wulff, New J. Phys. 5, 93.1 (2003)
T. Cao, J. Matsoukas, J. Appl. Phys. 92(5), 2916 (2002)
H. Kersten, H. Deutsch, G.M.W. Kroesen, Int. J. Mass Spectrom. 233, 51 (2004)
E.B. Tomme, B.M. Annaratone, J.E. Allen, Plasma Sour. Sci. Technol. 9, 87 (2000)
E.B. Tomme, D.A. Law, B.M. Annaratone, J.E. Allen, Phys. Rev. Lett. 85(12), 2518 (2000)
F.X. Bronold, H. Fehske, H. Kersten, H. Deutsch, Phys. Rev. Lett. 101, 175002 (2008)
G. Thieme, R. Wiese, D. Gorbov, H. Kersten, R. Hippler, AIP Conf. Proc. 649, 333 (2002)
B.M. Annaratone, M. Glier, T. Stuffler, M. Raif, H.M. Thomas, G.E. Morfill, New J. Phys. 5, 92 (2003)
H. Kersten, R. Wiese, H. Neumann, R. Hippler, Plasma Phys. Control. Fusion 48, B105 (2006)
M. Tatanova, G. Thieme, R. Basner, M. Hannemann, Y.B. Golubovskii, H. Kersten, Plasma Sour. Sci. Technol. 15(3), 507 (2006)
A.A. Samarian, S.V. Vladimirov, Phys. Rev. E 67(6), 066404 (2003)
A. Barkan, N. D’Angelo, R.L. Merlino, Phys. Rev. Lett. 73(23), 3093 (1994)
C. Zafiu, A. Melzer, A. Piel, Phys. Plasmas 10(5), 1278 (2003)
P.W. Smith, C.M. Ticos, A. Dyson, Plasma Sour. Sci. Technol. 13, 395 (2004)
L. Couedel, M. Mikikian, L. Boufendi, A.A. Samarian, Phys. Rev. E 74(2), 026403 (2006)
S.V. Vladimirov, N.F. Cramer, Phys. Rev. E 62(2), 2754 (2000)
B.M. Annaratone, T. Antonova, D.D. Goldbeck, H.M. Thomas, G.E. Morfill, Plasma Phys. Control. Fusion 46, B495 (2004)
K. Matyash, R. Schneider, J. Plasma Phys. 72(6), 809 (2006)
S.A. Khrapak, A.V. Ivlev, S.K. Zhdanov, G.E. Morfill, Phys. Plasmas 12(4), 042308 (2005)
L. Spitzer, Physical Processes in the Interstellar Medium (Wiley, New York, 1982)
E. Gruen, G.E. Morfill, D.A. Mendis, Planetary Rings (University Of Arizona Press, Tucson, 1984)
C.K. Goertz, Rev. Geophys. 27, 271 (1989)
H. Kersten, R. Wiese, D. Gorbov, A. Kapitov, F. Scholze, H. Neumann, Surf. Coat. Technol. 174, 918 (2003)
H. Kersten, R. Wiese, M. Hannemann, A. Kapitov, F. Scholze, H. Neumann, R. Hippler, Surf. Coat. Technol. 200(1–4), 809 (2005)
M. Zeuner, H. Neumann, F. Scholze, D. Flamm, M. Tartz, F. Bigl, Plasma Sour. Sci. Technol. 7, 252–267 (1998)
H. Kersten, H. Deutsch, H. Steffen, G.M. Kroesen, R. Hippler, Vaccum 63, 385–431 (2001)
H. Neumann, H. Kersten, R. Wiese, A. Kapitov, F. Scholze, in ESA Conference on Space Propulsion, Cagliari, Italy, p. 61, 2004
H. Maurer, R. Basner, H. Kersten, Rev. Sci. Instrum. 79, 093508 (2008)
S.D. Bernstein, T.Y. Wong, R.W. Tustison, J. Vac. Sci. Technol. 17(2), 571 (1999)
C. Cardinaud, M.C. Peignon, P.Y. Tessier, Appl. Surf. Sci. 164(1–4), 72 (2000)
H. Deutsch, H. Kersten, A. Rutscher, Contrib. Plasma Phys. 29, 263 (1989)
H. Kersten, D. Rohde, H. Steffen, H. Deutsch, R. Hippler, G. Swinkels, G.M.W. Kroesen, Appl. Phys. A 72(5), 531 (2001)
J.E. Daugherty, D.B. Graves, J. Vac. Sci. Technol. A 11(4), 1126 (1993)
G. Swinkels, Ph.D. Thesis, Technische Universiteit Eindhoven (1999)
G. Swinkels, H. Kersten, H. Deutsch, G.M.W. Kroesen, J. Appl. Phys. 88, 1747 (2000)
L.P. Goss, A.A. Smith, M.E. Post, Rev. Sci. Instrum. 60(12), 3702 (1989)
K. Cates, D. Smith, in Oak Ridge National Laboratory Technical Report, ORNL/ATD-40, 1990
S.W. Allison, G.T. Gillies, Rev. Sci. Instrum. 68(7), 2615 (1997)
F. Urbach, Technical Report, U.S. Patent 2,551,650 (1951)
S.A. Wade, S.F. Collins, G.W. Baxter, J. Appl. Phys. 94(8), 4743 (2003)
J.P. Feist, A.L. Heyes, in Proceedings of the 10th International Symposium on Application of Laser Techniques to Fluid Mechanics, Lisbon, Portugal, 2000
K. Tobin, G. Capps, J. Muhs, D. Smith, M. Cates, in Oak Ridge National Laboratory Technical Report, ORNL/ATD-43, 1990
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Kersten, H., Wolter, M. (2010). Complex (Dusty) Plasmas: Application in Material Processing and Tools for Plasma Diagnostics. In: Bonitz, M., Horing, N., Ludwig, P. (eds) Introduction to Complex Plasmas. Springer Series on Atomic, Optical, and Plasma Physics, vol 59. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10592-0_16
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