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Kinetic and Diagnostic Studies of Molecular Plasmas Using Laser Absorption Techniques

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Introduction to Complex Plasmas

Part of the book series: Springer Series on Atomic, Optical, and Plasma Physics ((SSAOPP,volume 59))

Abstract

Within the last decade, mid-infrared absorption spectroscopy between 3 and 20 μm – known as infrared laser absorption spectroscopy (IRLAS) and based on tunable semiconductor lasers, namely lead salt diode lasers, often called tunable diode lasers (TDLs), and quantum cascade lasers (QCLs) – has progressed considerably as a powerful diagnostic technique for in situ studies of the fundamental physics and chemistry of molecular plasmas. The increasing interest in processing plasmas containing hydrocarbons, fluorocarbons, and organosilicon compounds has led to further applications of IRLAS because most of these compounds and their decomposition products are infrared active. IRLAS provides a means of determining the absolute concentrations of the ground states of stable and transient molecular species, which is of particular importance for the investigation of reaction kinetics. Information about gas temperature and population densities can also be derived from IRLAS measurements. A variety of free radicals and molecular ions have been detected, especially using TDLs. Since plasmas with molecular feed gases are used in many applications such as thin film deposition, semiconductor processing, surface activation and cleaning, and materials and waste treatment, this has stimulated the adaptation of infrared spectroscopic techniques to industrial requirements. The recent development of QCLs offers an attractive new option for the monitoring and control of industrial plasma processes as well as for highly time-resolved studies on the kinetics of plasma processes. The aim of the present contribution is threefold (1) to review recent achievements in our understanding of molecular phenomena in plasmas including interactions with solid surfaces, (2) to report on selected studies of the spectroscopic properties and kinetic behavior of radicals, and (3) to review new applications of QCLs and to describe the current status of advanced instrumentation for QCLAS in the midinfrared.

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Authors and Affiliations

  1. INP-Greifswald, Felix-Hausdorff-Str. 2, 17489, Greifswald, Germany

    Jürgen Röpcke

  2. Eindhoven University of Technology, 513, 5600 MB, Eindhoven, The Netherlands

    Richard Engeln & Daan Schram

  3. LPP, Ecole Polytechnique, CNRS, 91128, Palaiseau Cedex, France

    Antoine Rousseau

  4. University of Cambridge, Cambridge, CB2 1EW, UK

    Paul B. Davies

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  1. Jürgen Röpcke
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  2. Richard Engeln
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  3. Daan Schram
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  4. Antoine Rousseau
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  5. Paul B. Davies
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  1. Inst. Theoretische Physik und, Astrophysik, Universität Kiel, Leibnizstr. 15, Kiel, 24098, Germany

    Michael Bonitz

  2. Dept. Physics, Stevens Institute of Technology, Castle Point on Hudson, Hoboken, 07030, USA

    Norman Horing

  3. Inst. Theoretische Physik und, Astrophysik, Universität Kiel, Leibnizstr. 15, Kiel, 24098, Germany

    Patrick Ludwig

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Röpcke, J., Engeln, R., Schram, D., Rousseau, A., Davies, P.B. (2010). Kinetic and Diagnostic Studies of Molecular Plasmas Using Laser Absorption Techniques. In: Bonitz, M., Horing, N., Ludwig, P. (eds) Introduction to Complex Plasmas. Springer Series on Atomic, Optical, and Plasma Physics, vol 59. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10592-0_13

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