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3D Fabrication of Embedded Microcomponents

  • Koji Sugioka
  • Stefan Nolte
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 135)

Abstract

Multiphoton absorption in transparent materials irradiated by a femtosecond (fs) laser can be used for three-dimensional (3D) microstructuring inside the materials. This technique has been widely applied to produce optical microcomponents and microfluidics embedded in glass. In this chapter, the principles of internal modification and fabrication by the laser are introduced, and state-of-the-art techniques are reviewed for applications in 3D photonics devices and integrated microchips for biochemical analysis and medical inspection.

Keywords

Femtosecond Laser Fiber Bragg Grating Optical Waveguide Optical Microscopy Image Phase Mask 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2010

Authors and Affiliations

  1. 1.Laser Technology LaboratoryRIKEN – Advanced Science InstituteWakoJapan
  2. 2.Institute of Applied PhysicsFriedrich-Schiller-University JenaJenaGermany

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