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3D Fabrication of Embedded Microcomponents

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Book cover Laser Precision Microfabrication

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 135))

Abstract

Multiphoton absorption in transparent materials irradiated by a femtosecond (fs) laser can be used for three-dimensional (3D) microstructuring inside the materials. This technique has been widely applied to produce optical microcomponents and microfluidics embedded in glass. In this chapter, the principles of internal modification and fabrication by the laser are introduced, and state-of-the-art techniques are reviewed for applications in 3D photonics devices and integrated microchips for biochemical analysis and medical inspection.

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Authors and Affiliations

  1. Laser Technology Laboratory, RIKEN – Advanced Science Institute, Wako, Saitama, 351-0198, Japan

    Koji Sugioka

  2. Institute of Applied Physics, Friedrich-Schiller-University Jena, Max-Wien-Platz 1, 07743, Jena, Germany

    Stefan Nolte

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  1. Koji Sugioka
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  2. Stefan Nolte
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Correspondence to Koji Sugioka .

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Editors and Affiliations

  1. Inst. of Phys.a.Chemical Res., Laser Technology Laboratory, RIKEN, Hirozawa 2-1, Wako-shi, Saitama, 351-0198, Japan

    Koji Sugioka

  2. Department of Engineering Physics, Laser Processing Laboratory, École Polytechnique Montréal, Montreal, Canada

    Michel Meunier

  3. Naval Research Laboratory, Overlook Ave. SW., 4555, Washington, 20375, USA

    Alberto Piqué

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Sugioka, K., Nolte, S. (2010). 3D Fabrication of Embedded Microcomponents. In: Sugioka, K., Meunier, M., Piqué, A. (eds) Laser Precision Microfabrication. Springer Series in Materials Science, vol 135. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10523-4_9

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  • DOI: https://doi.org/10.1007/978-3-642-10523-4_9

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