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Micromachining and Patterning

  • Jürgen Ihlemann
Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 135)

Abstract

Laser micromachining and patterning by laser ablation is used for the fabrication of micro-fluidic and micro-optic components. Irradiation configurations comprise direct spot writing, mask projection, and multiple beam interference. The fabrication of grooves, micro channels, micro lenses, dielectric masks, gratings, and diffractive elements is described. Special attention is paid to layer ablation in order to create planar optical structures.

Keywords

Fuse Silica Excimer Laser Ablation Depth Diffractive Optical Element Lens Array 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2010

Authors and Affiliations

  1. 1.Laser-Laboratory GoettingenGoettingenGermany

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