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Silicon Optical Interposers for High-Density Optical Interconnects

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Silicon Photonics III

Part of the book series: Topics in Applied Physics ((TAP,volume 122))

Abstract

One of the most serious challenges in the information industry is bandwidth bottlenecks in inter-chip interconnects. We proposed a photonics–electronics convergence system in response to this issue, demonstrated silicon optical interposers integrated with all optical components on a silicon substrate, and achieved a high bandwidth density of 30 Tbps/cm2, which is sufficient for the needs of the late 2010s.

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References

  1. What is big data? http://www-01.ibm.com/software/data/bigdata/what-is-big-data.html

  2. Intel, Facebook collaborate on future data center rack technologies, http://newsroom.intel.com/community/intel_newsroom/blog/2013/01/16/intel-facebook-collaborate-on-future-data-center-rack-technologies

  3. ISSCC 2014 trends, http://isscc.org/doc/2014/2014_Trends.pdf

  4. JEDEC publishes Wide I/O 2 mobile DRAM standard, http://www.jedec.org/news/pressreleases/jedec-publishes-wide-io-2-mobile-dram-standard

  5. J. Kim, Y. Kim, HBM: memory solution for bandwidth-hungry processors. Hot chips 26 (2014), http://www.hotchips.org/wp-content/uploads/hc_archives/hc26/HC26-11-day1-epub/HC26.11-3-Technology-epub/HC26.11.310-HBM-Bandwidth-Kim-Hynix-Hot%20Chips%20HBM%202014%20v7.pdf

  6. M. Black, Hybrid Memory Cube, in Electronic Design Process Symposium (2013), http://www.eda.org/edps/edp2013/Papers/3-3%20FINAL%20for%20Mike%20Black.pdf

  7. International Technology Roadmap for Semiconductors 2012 Update, Overall Roadmap Technology Characteristics (ORTC) Tables, and Assembly and Packaging Tables, http://www.itrs.net/ITRS%201999-2014%20Mtgs,%20Presentations%20&%20Links/2012ITRS/Home2012.htm

  8. 1.I.A. Young, E.M. Mohammed, J.T.S. Liao, A.M. Palermo, B.A. Block, M.R. Reshotko, P.L.D. Chang, Optical technology for energy efficient I/O in high performance computing. IEEE Commun. Mag. 48, 184–191 (2010)

    Google Scholar 

  9. L. Chen, K. Preston, S. Manipatruni, M. Lipson, Integrated GHz silicon photonic interconnect with micrometer-scale modulators and detectors. Opt. Express 17, 15248–15256 (2009)

    Article  ADS  Google Scholar 

  10. K. Raj, J.E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, A.V. Krishnamoorthy, ’Macrochip’ computer systems enabled by silicon photonic interconnects. Proc. SPIE 7607, 1–16 (2010)

    ADS  Google Scholar 

  11. G. Kim, J.W. Park, I.G. Kim, S. Kim, S. Kim, J.M. Lee, G.S. Park, J. Joo, K.S. Jang, J.H. Oh, S.A. Kim, J.H. Kim, J.Y. Lee, J.M. Park, D.W. Kim, D.K. Jeong, M.S. Hwang, J.K. Kim, K.S. Park, H.K. Chi, H.C. Kim, D.W. Kim, M.H. Cho, Low-voltage high-performance silicon photonic devices and photonic integrated circuits operating up to 30 Gb/s. Opt. Express 19, 26936–26947 (2011)

    Article  ADS  Google Scholar 

  12. Y. Arakawa, T. Nakamura, Y. Urino, T. Fujita, Silicon photonics for next generation system integration platform. IEEE Commun. Mag. 51, 72–77 (2013)

    Article  Google Scholar 

  13. R.E. Camacho-Aguilera, Y. Cai, N. Patel, J.T. Bessette, M. Romagnoli, L.C. Kimerling, J. Michel, An electrically pumped germanium laser. Opt. Express 20, 11316–11320 (2012)

    Article  ADS  Google Scholar 

  14. P.D. Dobbelaere, Light source approach for silicon photonics transceivers, in Sunday workshop in ECOC, WS1 (2014), http://www.ecoc2014.org/uploads/Workshops/WS1/ECOC2014_WS1_Peter%20De%20Dobbelaere.pdf

  15. M.N. Sysak, H. Park, A.W. Fang, J.E. Bowers, R. Jones, O. Cohen, O. Raday, M. Paniccia, “Experimental and theoretical thermal analysis of a hybrid silicon evanescent laser. Opt. Express 15, 15041–15046 (2007)

    Article  ADS  Google Scholar 

  16. T. Shimizu, N. Hatori, M. Okano, M. Ishizaka, Y. Urino, T. Yamamoto, M. Mori, T. Nakamura, Y. Arakawa, High density hybrid integrated light source with a laser diode array on a silicon optical waveguide platform for inter-chip optical interconnection, in Proceedings of Group IV Photonics (2011), pp. 181–183

    Google Scholar 

  17. N. Hatori, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, Y. Urino, M. Mori, T. Nakamura, Y. Arakawa, 2.2 pJ/bit operation of hybrid integrated light source on a silicon optical interposer for optical interconnection, in Proceedings of IEEE Photonic Conference (2013), pp. 254–255

    Google Scholar 

  18. Y. Urino, T. Shimizu, M. Okano, N. Hatori, M. Ishizaka, T. Yamamoto, T. Baba, T. Akagawa, S. Akiyama, T. Usuki, D. Okamoto, M. Miura, M. Noguchi, J. Fujikata, D. Shimura, H. Okayama, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, E. Saito, T. Nakamura, Y. Arakawa, First demonstration of high density optical interconnects integrated with lasers, optical modulators and photodetectors on single silicon substrate. Opt. Express 19, B159–B165 (2011)

    Article  Google Scholar 

  19. N. Hirayama, H. Takahashi, Y. Noguchi, M. Yamagishi, T. Horikawa, Low-loss Si waveguides with variable-shaped-beam EB lithography for large-scaled photonic circuits, in Extended Abstract Solid State Devices and Materials (2012), pp. 530–531

    Google Scholar 

  20. T. Shimizu, N. Hatori, M. Okano, M. Ishizaka, Y. Urino, T. Yamamoto, M. Mori, T. Nakamura, Y. Arakawa, Multichannel and high-density hybrid integrated light source with a laser diode array on a silicon optical waveguide platform for interchip optical interconnection. Photon. Res. 2, A19–A24 (2014)

    Article  Google Scholar 

  21. N. Hatori, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, Y. Urino, M. Mori, T. Nakamura, Y. Arakawa, A hybrid integrated light source on a silicon platform using a trident spot-size converter. J. Lightwave Technol. 32, 1329–1336 (2014)

    Article  ADS  Google Scholar 

  22. T. Shimizu, M. Ishizaka, N. Hatori, M. Okano, T. Yamamoto, M. Mori, Y. Urino, T. Nakamura, Y. Arakawa, Multi-channel hybrid integrated light source for ultra-high-bandwidth optical interconnections and its structural optimization for low power consumption by considering thermal interference between LD array. Trans. Jpn. Inst. Elect. Pack. 7, 94–103 (2014)

    Article  Google Scholar 

  23. L. Liao, A. Liu, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, M. Paniccia, 40 Gbit/s silicon optical modulator for high speed applications. Electron. Lett. 43, 1196–1197 (2007)

    Article  Google Scholar 

  24. D.J. Thomson, F.Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, G.T. Reed, High contrast 40 Gb/s optical modulation in silicon. Opt. Express 19, 11507–11516 (2011)

    Article  ADS  Google Scholar 

  25. P. Dong, L. Chen, Y.-K. Chen, High-speed low-voltage single-drive push-pull silicon Mach-Zehnder modulators. Opt. Express 20, 6163–6169 (2012)

    Article  ADS  Google Scholar 

  26. S. Akiyama, T. Baba, M. Imai, T. Akagawa, M. Takahashi, N. Hirayama, H. Takahashi, Y. Noguchi, H. Okayama, T. Horikawa, T. Usuki, 12.5-Gb/s operation with 0.29-V•cm VπL using silicon Mach-Zehnder modulator based-on forward-biased pin diode. Opt. Express 20, 2911–2923 (2012)

    Article  ADS  Google Scholar 

  27. J. Fujikata, M. Miura, M. Noguchi, D. Okamoto, T. Horikawa, Y. Arakawa, Si waveguide-integrated metal–semiconductor–metal and p–i–n-type Ge photodiodes using Si-capping layer. Jpn. J. Appl. Phys. 52, 04CG10 (2013)

    Google Scholar 

  28. Y. Urino, T. Usuki, J. Fujikata, M. Ishizaka, K. Yamada, T. Horikawa, T. Nakamura, Y. Arakawa, High-density and wide-bandwidth optical interconnects with silicon optical interposers. Photon. Res. 2, A1–A7 (2014)

    Article  Google Scholar 

  29. Y. Arakawa, H. Sakaki, Multidimensional quantum well laser and temperature dependence of its threshold current. Appl. Phys. Lett. 40, 939–941 (1982)

    Article  ADS  Google Scholar 

  30. A. Lee, Q. Jiang, M. Tang, A. Seeds, H. Liu, Continuous-wave InAs/GaAs quantum-dot laser diodes monolithically grown on Si substrate with low threshold current densities. Opt. Express 20, 22181–22187 (2012)

    Article  ADS  Google Scholar 

  31. A.Y. Liu, C. Zhang, J. Norman, A. Snyder, D. Lubyshev, J.M. Fastenau, A.W.K. Liu, A.C. Gossard, J.E. Bowers, High performance continuous wave 1.3 μm quantum dot lasers on silicon. Appl. Phys. Lett. 104, 041104-1–-4 (2014)

    Google Scholar 

  32. K. Tanabe, T. Rae, K. Watanabe, Y. Arakawa, High-temperature 1.3 μm InAs/GaAs quantum dot lasers on Si substrates fabricated by wafer bonding. Appl. Phys. Express 6, 082703-1-4 (2013)

    Google Scholar 

  33. T. Baba, S. Akiyama, M. Imai, N. Hirayama, H. Takahashi, Y. Noguchi, T. Horikawa, T. Usuki, 50-Gb/s ring-resonator-based silicon modulator. Opt. Express 21, 11869–11876 (2013)

    Article  ADS  Google Scholar 

  34. K. Padmaraju, D.F. Logan, T. Shiraishi, J.J. Ackert, A.P. Knights, K. Bergman, Wavelength locking and thermally stabilizing microring resonators using dithering signals. J. Lightwave Technol. 32, 505–515 (2014)

    Article  ADS  Google Scholar 

  35. X. Zheng, E. Chang, P. Amberg, I. Shubin, J. Lexau, F. Liu, H. Thacker, S.S. Djordjevic, S. Lin, Y. Luo, J. Yao, J.H. Lee, K. Raj, R. Ho, J.E. Cunningham, A.V. Krishnamoorthy, A high-speed, tunable silicon photonic ring modulator integrated with ultra-efficient active wavelength control. Opt. Express 22, 12628–12633 (2014)

    Article  ADS  Google Scholar 

  36. E. Timurdogan, C.M.S. Agaskar, J. Sun, E.S. Hosseini, A. Biberman, M.R. Watts, An ultralow power athermal silicon modulator. Nat. Commun. 5(4008), 1–11 (2014)

    Google Scholar 

  37. S. Akiyama, T. Baba, M. Imai, M. Mori, T. Usuki, High-performance silicon modulator for integrated transceivers fabricated on 300-mm wafer, in Proceedings of ECOC, P.2.8 (2014)

    Google Scholar 

  38. Y. Urino, N. Hatori, K. Mizutani, T. Usuki, J. Fujikata, K. Yamada, T. Horikawa, T. Nakamura, Y. Arakawa, First demonstration of athermal silicon optical interposers with quantum dot lasers operating up to 125 ºC. J. Lightwave Technol. 33, 1223–1229 (2015)

    Article  ADS  Google Scholar 

  39. D. Okamoto, Y. Urino, T. Akagawa,, S. Akiyama, T. Baba, T. Usuki, M. Miura, J. Fujikata, T. Shimizu, M. Okano, N. Hatori, M. Ishizaka, T. Yamamoto, H. Takahashi, Y. Noguchi, M. Noguchi, M. Imai, M. Yamagishi, S. Saitou, N. Hirayama, M. Takahashi, E. Saito, D. Shimura, H. Okayama, Y. Onawa, H. Yaegashi, H. Nishi, H. Fukuda, K. Yamada, M. Mori, T. Horikawa, T. Nakamura, Y. Arakawa, Demonstration of 25-Gbps optical data links on silicon optical interposer using FPGA transceiver, in Proceedings of ECOC, P.2.11 (2014)

    Google Scholar 

  40. T. Shimizu, M. Okano, H. Takahashi, N. Hatori, M. Ishizaka, T. Yamamoto, M. Mori, T. Horikawa, Y. Urino, T. Nakamura, Y. Arakawa, Demonstration of over 1000-channel hybrid integrated light source for ultra-high bandwidth interchip optical interconnection, in Proceedings of OFC, Th1C.6 (2014)

    Google Scholar 

  41. S. Akiyama, T. Usuki, High-speed and efficient silicon modulator based on forward-biased pin diodes. Front. Phys. 2(65), 1–7 (2014)

    Google Scholar 

  42. H. Takahashi, M. Toyama, M. Seki, D. Shimura, K. Koshino, N. Yokoyama, M. Ohtsuka, A. Sugiyama, E. Ishitsuka, T. Sano, T. Horikawa, The impacts of ArF Excimer Immersion Lithography on Integrated Silicon Photonics Technology, in Ext. Abst. Solid State Devices and Materials (2012), pp. 528–529

    Google Scholar 

  43. H. Okayama, D. Shimura, Y. Onawa, H. Takahashi, M. Seki, K. Koshino, N. Yokoyama, M. Oshtsuka, T. Tsuchizawa, H. Nishi, K. Yamada, H. Yaegashi, T. Horikawa, H. Sasaki, Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography. Electron. Lett. 49, 1401–1402 (2013)

    Article  Google Scholar 

  44. T. Amano, S. Ukita, Y. Egashira, M. Sasaki, M. Mori, K. Kurata, A 25-Gbps operation of polymer-based optical and electrical hybrid LSI package substrate with optical card edge connector, in Proceedings of IEEE Optical interconnects conference, WB2 (2015)

    Google Scholar 

  45. K. Yashiki, Y. Suzuki, Y. Hagihara, M. Kurihara, M. Tokushima, J. Fujikata, A. Ukita, K. Takemura, T. Shimizu, D. Okamoto, J. Ushida, S. Takahashi, T. Uemura, M. Okano, J. Tsuchida, T. Nedachi, M. Fushimi, I. Ogura, J. Inasaka, K. Kurata, 5 mW/Gbps hybrid-integrated Si-photonics-based optical I/O cores and their 25-Gbps/ch error-free operation with over 300-m MMF, in Proceedings of OFC, Th1G.1 (2015)

    Google Scholar 

  46. J. Petrilla, 100G MMF Reach Objective, in IEEE P802.3 Next Generation 100 Gb/s Optical Ethernet Study Group Plenary Meeting (2012), http://www.ieee802.org/3/100GNGOPTX/public/mar12/plenary/petrilla_02b_0312_NG100GOPTX.pdf

  47. J. Petrilla, 100G PSM4 Power, Size & Cost Estimates & Comparisons, in IEEE P802.3bm 40 Gb/s and 100 Gb/s Fiber Optic Task Force Interim Meeting (2013), http://www.ieee802.org/3/bm/public/jan13/petrilla_03a_0113_optx.pdf

  48. H.C. Nguyen, S. Hashimoto, M. Shinkawa, T. Baba, Compact and fast photonic crystal silicon optical modulators. Opt. Express 20, 22465–22474 (2012)

    Google Scholar 

  49. A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P.C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, J. Leuthold, High-speed plasmonic phase modulators. Nat. Photonics 8, 229–233 (2014)

    Article  ADS  Google Scholar 

  50. Y. Kim, M. Takenaka, T. Osada, M. Hata, S. Takagi, Strain-induced enhancement of plasma dispersion effect and free-carrier absorption in SiGe optical modulators. Sci. Rep. 4, 4683 (2014)

    ADS  Google Scholar 

  51. S.J. Koester, M. Li, High-speed waveguide-coupled graphene-on-graphene optical modulators. Appl. Phys. Lett. 100, 171107 (2012)

    Article  ADS  Google Scholar 

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Acknowledgments

This work was conducted by the Institute for Photonics-Electronics Convergence System Technology (PECST), supported by a grant from the Japan Society for the Promotion of Science (JSPS) through its “Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program)” initiated by the Council for Science and Technology Policy. Part of the fabrication was conducted at the Tsukuba Innovation Arena Super Clean Room (TIA-SCR) and Nano-Processing Facility (NPF) by AIST. The authors also acknowledge Tatsuya Usuki, Suguru Akiyama, Takeshi Akagawa, Takeshi Baba, Junichi Fujikata, Daisuke Okamoto, Makoto Miura, Masashige Ishizaka, Nobuaki Hatori, Takanori Shimizu, Makoto Okano, Tsuyoshi Yamamoto, Tsuyoshi Horikawa, Hiroyuki Takahashi, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Masashi Yamagishi, Shigeru Saitou, Naoki Hirayama, Masashi Takahashi, Emiko Saito, Koji Yamada, Daisuke Shimura, Hideaki Okayama, Yosuke Onawa, Hiroki Yaegashi, Hidetaka Nishi, Hiroshi Fukuda, Masahiko Mori, and Kenji Mizutani for their efforts and contributions.

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Authors and Affiliations

  1. Photonics Electronics Technology Research Association (PETRA), West 7A, 16-1 Onogawa, Tsukuba, Ibaraki, 305-8569, Japan

    Yutaka Urino & Takahiro Nakamura

  2. Institute for Nano Quantum Information Electronics (NanoQuine), The University of Tokyo, 4-6-1, Komaba, Meguro-Ku, Tokyo, 153-8505, Japan

    Yasuhiko Arakawa

Authors
  1. Yutaka Urino
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  2. Takahiro Nakamura
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  3. Yasuhiko Arakawa
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Correspondence to Yutaka Urino .

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Editors and Affiliations

  1. Nanoscience Laboratory, University of Trento, Department of Physics, Povo, Italy

    Lorenzo Pavesi

  2. Measurement Science and Standards, National Research Council of Canada, Ottawa, Ontario, Canada

    David J. Lockwood

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Urino, Y., Nakamura, T., Arakawa, Y. (2016). Silicon Optical Interposers for High-Density Optical Interconnects. In: Pavesi, L., Lockwood, D. (eds) Silicon Photonics III. Topics in Applied Physics, vol 122. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10503-6_1

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  • DOI: https://doi.org/10.1007/978-3-642-10503-6_1

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