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Plasma Physics pp 259-321 | Cite as

Dusty Plasmas

Chapter

Abstract

Since the 1980s, a new branch of plasma physics has emerged—the study of dusty plasmas. Because of similarities with complex fluids, dusty plasmas are also known as complex plasmas. This field has roots in astrophysics [222] and became interesting for laboratory plasma research when powder formation in plasma-enhanced chemical vapour deposition was identified to limit the deposition rate [223, 224], and when dust formation and dust trapping was observed during plasma etching of silicon wafers [225].

Keywords

Dust Particle Dusty Plasma Dust Cloud Dust Charge Sheath Region 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer-Verlag Berlin Heidelberg 2010

Authors and Affiliations

  1. 1.Christian-Albrechts-Universität Kiel, Institut für Experimentelle und Angewandte PhysikKielGermany

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