Abstract
This paper describes the modification of a length measuring machine for the semiautomatic calibration of linear scales with a pitch distance of a few micrometers. It consists of the following modules: a high resolution optics including a CCD camera, appropriate illumination, a motion system consisting two stacked linear stages with submicron resolution, responsible for moving the scale in front of the optics with a well defined speed. The paper presents the various pitch distance definitions. From these definitions simple algorithms are derived. The main point is to minimize the effect of optical distortion, diffraction and nonlinearity by using properly designed optics and illumination. The stage system carrying the scale is driven by piezomotor providing unlimited travel with nanometer resolution. The displacement of the scale is measured by an HP laser interferometer.
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© 2009 Springer-Verlag Berlin Heidelberg
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Hermann, G. (2009). Design of a Linear Scale Calibration Machine. In: Rudas, I.J., Fodor, J., Kacprzyk, J. (eds) Towards Intelligent Engineering and Information Technology. Studies in Computational Intelligence, vol 243. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-03737-5_38
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DOI: https://doi.org/10.1007/978-3-642-03737-5_38
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-03736-8
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