Skip to main content
SpringerLink
Log in
Book cover

Crystal Growth of Si for Solar Cells pp 177–191Cite as

Thin-Film Poly-Si Formed by Flash Lamp Annealing

  • Chapter
  • First Online:

  • 1542 Accesses

Part of the book series: Advances in Materials Research ((ADVSMATERIALS,volume 14))

Abstract

Flash lamp annealing (FLA) has attracted attentions as a technique of rapidly crystallizing precursor a-Si films to form poly-Si films with high crystallinity on low-cost glass substrates. In this chapter, a brief explanation on fundamental physics typically seen in nonthermal equilibrium annealing and in utilization of metastable a-Si as precursor films have been given. Recent findings concerning FLA-triggered crystallization of micrometer-order-thick a-Si films and microstructures of the poly-Si films are also introduced.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. A.G. Aberle, in Proceedings of the IEEE 4th WCPEC, Hawaii, 2006, p. 1481

    Google Scholar 

  2. A.H Mahan, S.P. Ahrenkiel, B. Roy, R.E.I. Schropp, H. Li, D.S. Ginley, in Proceedings of the IEEE 4th WCPEC, Hawaii, 2006, p. 1612

    Google Scholar 

  3. T. Matsuyama, M. Tanaka, S. Tsuda, S. Nakano, Y. Kuwano, Jpn. J. Appl. Phys. 32, 3720 (1993)

    Article  CAS  ADS  Google Scholar 

  4. R. Morimoto, A. Izumi, A. Masuda, H. Matsumura, Jpn. J. Appl. Phys. 41, 501 (2002)

    Article  CAS  ADS  Google Scholar 

  5. M.J. Keevers, T.L. Young, U. Schubert, M.A. Green, in Proceedings of the 22nd EU PVSEC, Milan, 2007, p. 1783

    Google Scholar 

  6. I. Gordon, D. Van Gestel, L. Carnel, G. Beaucarne, J. Poortmans, K.Y. Lee, P. Dogan, B. Gorka, C. Becker, F. Fenske, B. Rau, S. Gall, B. Rech, J. Plentz, F. Falk, D. Le Bellac, in Proceedings of the 22nd EU PVSEC, Milan, 2007, p. 1890

    Google Scholar 

  7. L. Carnel, I. Gordon, D. Van Gestel, G. Beaucarne, J. Poortmans, in Proceedings of the 22nd EU PVSEC, Milan, 2007, p. 1880

    Google Scholar 

  8. S. Janz, M. Kuenle, S. Lindekugel, E.J. Mitchell, S. Reber, in Proceedings of the 33rd IEEE PVSC, San Diego, 2008, p. 168

    Google Scholar 

  9. M. Smith, R. McMahon, M. Voelskow, D. Panknin, W. Skorupa, J. Cryst. Growth 285, 249 (2005)

    Article  CAS  ADS  Google Scholar 

  10. W. Skorupa, R.A. Yankov, W. Anward, M. Voelskow, T. Gebel, D. Downey, E.A. Arevalo, Mater. Sci. Eng. B 114–115, 358 (2004)

    Article  CAS  Google Scholar 

  11. R.L. Cohen, J.S. Williams, L.C. Feldman, K.W. West, Appl. Phys. Lett. 33, 751 (1978)

    Article  CAS  ADS  Google Scholar 

  12. H.A. Bomke, H.L. Berkowitz, M. Harmatz, S. Kronenberg, R. Lux, Appl. Phys. Lett. 33, 955 (1978)

    Article  CAS  ADS  Google Scholar 

  13. L. Correra, L. Pedulli, Appl. Phys. Lett. 37, 55 (1980)

    Article  CAS  ADS  Google Scholar 

  14. B. Pécz, L. Dobos, D. Panknin, W. Skorupa, C. Lioutas, N. Vouroutzis, Appl. Surf. Sci. 242, 185 (2005)

    Article  ADS  CAS  Google Scholar 

  15. M. Smith, R.A. McMahon, M. Voelskow, W. Skorupa, J. Stoemenos, J. Cryst. Growth 277, 162 (2005)

    Article  CAS  ADS  Google Scholar 

  16. M.P. Smith, R.A. McMahon, K.A. Seffen, D. Panknin, M. Voelskow, W. Skorupa, Mater. Res. Soc. Symp. Proc. 910, 571 (2007)

    CAS  Google Scholar 

  17. H. Kiyohashi, N. Hayakawa, S. Aratani, H. Masuda, High Temp. High Pressure 34, 167 (2002)

    Article  CAS  Google Scholar 

  18. J. Huang, P.K. Gupta, J. Noncryst. Solids 139, 239 (1992)

    Article  CAS  ADS  Google Scholar 

  19. I. Sawai, S. Inoue, J. Soc. Chem. Ind. Jpn. 41, 663 (1938) [in Japanese]

    Google Scholar 

  20. V.K. Bityukov, V.A. Petrov, High Temp. High Pressure 38, 293 (2000)

    CAS  Google Scholar 

  21. S. Inaba, S. Oda, K. Morinaga, J. Non-Cryst. Solids 325, 258 (2003)

    Article  CAS  ADS  Google Scholar 

  22. Y. Kikuchi, H. Sudo, N. Kuzuu, J. Appl. Phys. 82, 4121 (1997)

    Article  CAS  ADS  Google Scholar 

  23. A.A.D.T. Adikaari, N.K. Mudugamuwa, S.R.P. Silva, Appl. Phys. Lett. 90, 171912 (2007)

    Article  ADS  CAS  Google Scholar 

  24. I. Steinbach, M. Apel, Mater. Sci. Eng. A 449–451, 95 (2007)

    Google Scholar 

  25. M. Smith, R.A. McMahon, M. Voelskow, W. Skorupa, J. Appl. Phys. 96, 4843 (2004)

    Article  CAS  ADS  Google Scholar 

  26. C. Spinella, S. Lombardo, J. Appl. Phys. 84, 5383 (1998)

    Article  CAS  ADS  Google Scholar 

  27. K. Ohdaira, S. Nishizaki, Y. Endo, T. Fujiwara, N. Usami, K. Nakajima, H. Matsumura, Jpn. J. Appl. Phys. 46, 7198 (2007)

    Article  CAS  ADS  Google Scholar 

  28. K. Ohdaira, T. Fujiwara, Y. Endo, S. Nishizaki, H. Matsumura, Jpn. J. Appl. Phys. 47, 8239 (2008)

    Article  CAS  ADS  Google Scholar 

  29. K. Ohdaira, Y. Endo, T. Fujiwara, S. Nishizaki, H. Matsumura, Jpn. J. Appl. Phys. 46, 7603 (2007)

    Article  CAS  ADS  Google Scholar 

  30. N.M. Poley, H.L. Whitaker, J. Vac. Sci. Technol. 11, 114 (1974)

    CAS  ADS  Google Scholar 

  31. R. Berriche, D.L. Kohlstedt, Mater. Dev. Microelectron. Packag.: Perform. Reliab., Proc. Electron. Mater. Process. Congr., 4th 1991, p. 47

    Google Scholar 

  32. N. Jiang, J. Silcox, J. Appl. Phys. 87, 3768 (2000)

    Article  CAS  ADS  Google Scholar 

  33. K. Ohdaira, K. Shiba, H. Takemoto, T. Fujiwara, Y. Endo, S. Nishizaki, Y.R. Jang, H. Matsumura, Thin Solid Films 517, 3472 (2009)

    Article  CAS  ADS  Google Scholar 

  34. K. Ohdaira, T. Fujiwara, Y. Endo, K. Shiba, H. Takemoto, S. Nishizaki, Y.R. Jang, K. Nishioka, H. Matsumura, in Proceedings of the 33rd IEEE PVSC, San Diego, 2008, p.418

    Google Scholar 

  35. K. Ohdaira, T. Fujiwara, Y. Endo, S. Nishizaki, H. Matsumura, J. Appl. Phys. (in press)

    Google Scholar 

  36. K. Ohdaira, T. Fujiwara, Y. Endo, S. Nishizaki, K. Nishioka, H. Matsumura, in Tech. Digest 17th PVSEC, Fukuoka, 2007, p. 1326

    Google Scholar 

  37. H. Campbell, P.M. Fauchet, Solid State Commun. 58, 739 (1986)

    Article  CAS  ADS  Google Scholar 

  38. H. Kodera, Jpn. J. Appl. Phys. 2, 212 (1963)

    Article  CAS  ADS  Google Scholar 

  39. H.D. Geiler, E. Glaser, G. Götz, W. Wagner, J. Appl. Phys. 59, 3091 (1986)

    Article  CAS  ADS  Google Scholar 

  40. C. Grigoropoulos, M. Rogers, S.H. Ko, A.A. Golovin, B.J. Matkowsky, Phys. Rev. B 73, 184125 (2006)

    Article  ADS  CAS  Google Scholar 

  41. T. Takamori, R. Messier, R. Roy, Appl. Phys. Lett. 20, 201 (1972)

    Article  CAS  ADS  Google Scholar 

  42. G. Auvert, D. Bensahel, A. Perio, V.T. Nguyen, G.A. Rozgonyi, Appl. Phys. Lett. 39, 724 (1981)

    Article  CAS  ADS  Google Scholar 

  43. K. Ohdaira, Y. Endo, T. Fujiwara, S. Nishizaki, K. Nishioka, H. Matsumura, T. Karasawa, T. Torikai, in Proceedings of the 22nd EU PVSEC, Milan, 2007, p. 1961

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physical Materials Science, School of Materials Science Japan Advanced Institute of Science and Technology (JAIST), 1-1, Asahidai, 923-1292, Nomi, Ishikawa, Japan

    Keisuke Ohdaira

Authors
  1. Keisuke Ohdaira
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Inst. Materials Research, Tohoku University, Katahira 2-1-1, Sendai, 980-8577, Japan

    Kazuo Nakajima

  2. Inst. Materials Research, Tohoku University, Katahira 2-1-1, Sendai, 980-8577, Japan

    Noritaka Usami

Rights and permissions

Reprints and permissions

Copyright information

© 2009 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Ohdaira, K. (2009). Thin-Film Poly-Si Formed by Flash Lamp Annealing. In: Nakajima, K., Usami, N. (eds) Crystal Growth of Si for Solar Cells. Advances in Materials Research, vol 14. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-02044-5_11

Download citation

Publish with us

Policies and ethics

Search

Navigation