Abstract
After the discussion of micrometer and submicrometer silicon technology with respect to its applicability in the field of optoelectronics, optoelectronic power devices, which can have a diameter of more than 100mm and which fill complete silicon wafers, are described in this chapter in order to cover the entire field of silicon optoelectronics.
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© 2009 Springer-Verlag Berlin Heidelberg
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Zimmermann, H. (2009). Silicon Power Devices. In: Integrated Silicon Optoelectronics. Springer Series in Optical Sciences, vol 148. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-01521-2_5
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DOI: https://doi.org/10.1007/978-3-642-01521-2_5
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-01520-5
Online ISBN: 978-3-642-01521-2
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