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AeroMEMS Sensor Arrays for Time Resolved Wall Pressure and Wall Shear Stress Measurements

  • Conference paper
Imaging Measurement Methods for Flow Analysis

Part of the book series: Notes on Numerical Fluid Mechanics and Multidisciplinary Design ((NNFM,volume 106))

Abstract

Novel highly sensitive AeroMEMS sensor arrays for transient wall pressure and wall shear stress measurements in fluid flows are presented. Sealed through silicon vias (TSV) and the employment of an elaborate mounting technique enable to electrically contact the sensor chips from the back side. Hence, flow disturbing bond wires on the front side are avoided when chips are mounted flush with the measured surface. The integration of a pressure and a wall hot-wire sensor on a single chip makes simultaneous pressure and wall shear stress measurements possible. The sensors suitability for measurements of fluctuations up to at least 19 kHz is demonstrated in a high-frequency laminar to turbulent transition experiment in a transonic wind tunnel. A complex 3D multi-sensor array has been developed employing 154 pressure sensors to gain extensive, precise and transient data about the surface pressure on a cylinder. Wind tunnel experiments are conducted at a Reynolds number of 2∙105.

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References

  1. Blake, M.K.: Mechanics of Flow-Induced Sound and Vibration. Academic Press, New York (1986)

    MATH  Google Scholar 

  2. Löfdahl, L., Gad-el-Hak, M.: MEMS applications in turbulence and flow control. Progress in Aerospace Sciences (1999), doi:10.1016/S0376-0421(98)00012-8

    Google Scholar 

  3. Tsao, T., Jiang, F., Liu, C., Miller, R., Tung, S., Huang, J.B., Gupta, B., Babcock, D., Lee, C., Tai, Y.C., Ho, C.M., Kim, J., Goodman, R.: MEMS based Active Drag Reduction in Turbulent Boundary Layers. In: Helvajian, H. (ed.) Microengineering Aerospace Systems. The Aerospace Press, El Segundo (1999)

    Google Scholar 

  4. Löfdahl, L., Gad-el-Hak, M.: MEMS-based pressure and shear stress sensors for turbulent flows. Measurement Science and Technology (1999), doi:10.1088/0957-0233/10/8/302

    Google Scholar 

  5. Tung, S., Maines, B., Jiang, F., Tsao, T.: Development of a MEMS-Based Control System for Compressible Flow Separation. Journal of Microelectromechanical Systems (2004), doi:10.1109/JMEMS.2003.823228

    Google Scholar 

  6. Willmarth, W.W., Wooldridge, C.E.: Measurements of the fluctuating pressure at the wall beneath a thick turbulent boundary layer. Journal of Fluid Mechanics (1962), doi:10.1017/S0022112062001160

    Google Scholar 

  7. Bull, M.K., Thomas, A.S.W.: High frequency wall-pressure fluctuations in turbulent boundary layers. Physics of Fluids (1976), doi:10.1063/1.861496

    Google Scholar 

  8. Leger, T.J., Johnston, D.A., Wolff, J.M.: Flex Circuit Sensor Array for Surface Unsteady Pressure Measurements. Journal of Propulsion and Power, ID: 0748-4658 20, 754–758 (2004)

    Article  Google Scholar 

  9. Berns, A., Buder, U., Wolter, A., Leder, A., Obermeier, E.: AeroMEMS sensor array for high-resolution wall pressure measurements. Sensors and Actuators A (2006), doi:10.1016/j.sna.2006.04.056

    Google Scholar 

  10. Berns, A., Ngo, H.-D., Buder, U., Obermeier, E.: AeroMEMS Pressure sensor Array Featuring Through-Wafer Vias for High-Resolution Wall Pressure Measurements. In: 21st IEEE MEMS Conference (2008), doi:10.1109/MEMSYS.2008.4443801

    Google Scholar 

  11. Berns, A., Buder, U., Obermeier, E., Wang, X.H., Domhardt, J., Leuckert, J., Nitsche, W.: AeroMEMS Sensor with Integrated Pressure and Hot-Wire Sensor for High-Frequency Transition Detection. In: 47th AIAA Aerospace Sciences Meetings and Exhibit, AIAA 2009-318 (2009)

    Google Scholar 

  12. Leder, A.: 3D-Flow Structures behind Truncated Circular Cylinders. In: 4th ASME/JSME Joint Fluids Engineering Conference, FEDSM 2003-45083 (2003)

    Google Scholar 

  13. Berns, A., Buder, U., Obermeier, E., Wolter, A., Leder, A.: Application of AeroMEMS Surface Pressure Sensor Arrays in Experimental Fluid Mechanics. In: 46th AIAA Aerospace Sciences Meetings and Exhibit, AIAA-2008-0271 (2008)

    Google Scholar 

  14. Berns, A., Metzen, R.v., Mukhopadhyay, B., Obermeier, E., Wolter, A., Leder, A.: Ultra Sensitive AeroMEMS Sensor Array for High-Resolution Wall Pressure Measurements. In: 19th Eurosensors Conference, ID: MB 2007 (2005)

    Google Scholar 

  15. Berns, A., Buder, U., Wang, X.H., Nitsche, W., Obermeier, E.: AeroMEMS Pressure Sensor with Integrated Wall Hot-wire. In: 7th IEEE Conference on Sensors (2008), doi:10.1109/ICSENS.2008.4716746

    Google Scholar 

  16. Laermer, F., Schilp, A., Funk, K., Offenberg, M.: Bosch Deep Si Etching: Improving Uniformity and Etch Rate for Advanced MEMS Applications. In: 12th IEEE MEMS Conference (1999), doi:10.1109/MEMSYS.1999.746812

    Google Scholar 

  17. Berns, A., Buder, U., Obermeier, E., Wolter, A., Leder, A., Frederich, O., Thiele, F.: Aero-Micro-Electromechanical System Sensor Arrays for Time Resolved Wall Pressure Measurements. AIAA Journal (2009) (to be published)

    Google Scholar 

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Berns, A., Obermeier, E. (2009). AeroMEMS Sensor Arrays for Time Resolved Wall Pressure and Wall Shear Stress Measurements. In: Nitsche, W., Dobriloff, C. (eds) Imaging Measurement Methods for Flow Analysis. Notes on Numerical Fluid Mechanics and Multidisciplinary Design, vol 106. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-01106-1_23

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  • DOI: https://doi.org/10.1007/978-3-642-01106-1_23

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-01105-4

  • Online ISBN: 978-3-642-01106-1

  • eBook Packages: EngineeringEngineering (R0)

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