Abstract
Nanotechnology emerges out of fundamental science through capability for accurate, repeatable and reproducible measurements on the nanoscale which allows scientists and engineers to accumulate knowledge. Understanding the measurement science is the first step towards development of new ideas. This paper describes some research initiatives which underpin the development of nanotechnology. Programs underway at the National Research Council of Canada include: development of metrological scanning-probe microscope instrumentation for dimensional calibration, materials characterization, development of artefacts designed specifically for dimensional calibration, investigation of metrology for application to soft materials and investigation of intrinsic length standards for realization of the SI metre at the nanoscale.
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References
Koops, K.R., et al.: Calibration strategies for scanning probe metrology. Meas Sci. Technol. 18, 390–394 (2007)
Dai, G., Koenders, L., Pohlenz, F., Dziomba, T., Danzebrink, H.-U.: Accurate and traceable calibration of one-dimensional gratings. Meas Sci. Technol. 13, 1241–1249 (2005)
Misumi, I., Gonda, S., Huang, Q., Keem, T., Kurosawa, T., Fujii, A., Hisata, N., Yamagishi, T., Fujimoto, H., Enjoji, K., Aya, S., Sumitani, H.: Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales. Meas Sci. Technol. 16, 2080–2090 (2005)
Dixson, R., Orji, N.G., Fu, J., Cresswell, M., Allen, R., Guthrie, W.: Traceable atomic force microscope dimensional metrology at NIST. In: Proc. SPIE, vol. 6152, pp. 1–11 (2006)
Haycocks, J., Jackson, K.: Traceable calibration of transfer standards for scanning probe microscopy. Prec. Eng. 29, 168–175 (2005)
Holmes, M., Hocken, R., Trumper, D.: The long-range scanning stage: a novel platform for scanned-probe microscopy. Prec. Eng. 24, 191–209 (2000)
Meli, F., Thalmann, R.: Long-range AFM profiler used for accurate pitch measurements. Meas Sci. Technol. 9, 1087–1092 (1998)
Eves, B.J.: Design of a large measurement-volume metrological AFM. Meas Sci. Technol. (2009) (to be published)
Joyce, S.A., Houston, J.E.: A new force sensor incorporating force-feedback control for interfacial force microscopy. Rev. Sci. Instrum. 62, 710–715 (1991)
Thomas, R.C., et al.: Probing adhesion forces at the molecular scale. J. Am. Chem. Soc. 117, 3830–3834 (1995)
Tangyunyong, P., et al.: Nanometer-scale mechanics of gold-films. Phys. Rev. Lett. 71, 3319–3322 (1993)
Graham, et al.: Quantitative nanoscale mechanical properties of a phase segregated homopolymer surface. J. Mater. Res. 13, 3565–3570 (1998)
Warren, et al.: Nanomechanical properties of ZDDP films by interfacial force microscopy. A Abstr. Pap. Am. Chem. Soc. 213, 211–COLL (1997)
Pratt, J.R., Kramer, Newell, D., Smith, D.T.: Review of SI traceable force metrology for instrumented indentation and atomic force microscopy. Meas. Sci. Technol. 16, 2129–2137 (2005)
Ianoul, A., et al.: Imaging nanometer domains of beta-adrenergic receptor complexes on the surface of cardiac myocytes. Nat. Chem. Biol. 1, 196–202 (2005)
Ira, Johnston, L.J.: Ceramide Promotes Restructuring of Model Raft Membranes. Langmuir 22, 11284–11289 (2006)
Johnston, L.J.: Nanoscale imaging of domains in supported lipid membranes. Langmuir 23, 5886–5895 (2007)
Meli, F.: Nano 4 Final Report, 34 p. (2000), http://kcdb.bipm.org/appendixB/
Breil, R., et al.: Intercomparison of scanning probe microscopes. Prec. Eng. 26, 296–305 (2002)
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Decker, J.E. et al. (2009). Developments in Metrology in Support of Nanotechnology. In: Bittnar, Z., Bartos, P.J.M., Němeček, J., Šmilauer, V., Zeman, J. (eds) Nanotechnology in Construction 3. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-00980-8_8
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DOI: https://doi.org/10.1007/978-3-642-00980-8_8
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-00979-2
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