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Materials Science with Ion Beams pp 53–71Cite as

Spontaneous Patterning of Surfaces by Low-Energy Ion Beams

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Part of the book series: Topics in Applied Physics ((TAP,volume 116))

Abstract

Pattern formation by low-energy ion beams results from a balance among different kinetic processes on the surface. Some increase the roughness of the surface (e.g., sputtering) while others tend to smoothen the surface (e.g., diffusion) and the interaction between them leads to the development of a characteristic periodicity on the surface. In this chapter, we describe the different physical mechanisms that contribute to sputter ripple formation and their dependence on the processing parameters of flux and temperature. This is used to develop a linear instability model that can be applied to understanding the different features of patterning that are found under different processing conditions.

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Authors and Affiliations

  1. Division of Engineering, Brown University, Providence, RI, 02912, USA

    Eric Chason

  2. Department of Materials Science and Engineering, University of Illinois at Urbana Champaign, Urbana, IL, 61801, USA

    Wai Lun Chan

Authors
  1. Eric Chason
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  2. Wai Lun Chan
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Correspondence to Eric Chason .

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Editors and Affiliations

  1. CSNSM-CNRS, Université Paris-Sud 11, Orsay, 91405, France

    Harry Bernas

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Chason, E., Chan, W.L. (2009). Spontaneous Patterning of Surfaces by Low-Energy Ion Beams. In: Bernas, H. (eds) Materials Science with Ion Beams. Topics in Applied Physics, vol 116. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88789-8_3

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  • DOI: https://doi.org/10.1007/978-3-540-88789-8_3

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