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Realization of the Synchronization Mechanism of Step and Scan Projection Lithography

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Intelligent Robotics and Applications (ICIRA 2008)

Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 5315))

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Abstract

Analyze the synchronous motion process of the step and scan projection lithography. Classify the subsystems of the machine into synchronous master subsystems and synchronous slave subsystems; realize the state broadcasting of synchronous master subsystem by synchronous serial bus; analyze the communication among subsystems and their data-collection systems and realize the communication using high speed serial hotlink. In order to validate the synchronization mechanism, a synchronous experimental platform is established. The experimental result shows the system is stable, Creliable and satisfied with the requirements of synchronization and engineering.

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Author information

Authors and Affiliations

  1. Huazhong University of Science and Technology, Wuhan, China

    Liangliang Yang, Yunfei Zhou & Wei Teng

  2. GuangXi University, Nanning, China

    Haihong Pan

Authors
  1. Liangliang Yang
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  2. Yunfei Zhou
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  3. Haihong Pan
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  4. Wei Teng
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Editor information

Editors and Affiliations

  1. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 430074, Wuhan, China

    Caihua Xiong

  2. The Institute of Industrial Research, University of Portsmouth, UK

    Honghai Liu

  3. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, 430074, Wuhan, P. R. China

    Yongan Huang  & Youlun Xiong  & 

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© 2008 Springer-Verlag Berlin Heidelberg

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Yang, L., Zhou, Y., Pan, H., Teng, W. (2008). Realization of the Synchronization Mechanism of Step and Scan Projection Lithography. In: Xiong, C., Liu, H., Huang, Y., Xiong, Y. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5315. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88518-4_17

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  • DOI: https://doi.org/10.1007/978-3-540-88518-4_17

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-88516-0

  • Online ISBN: 978-3-540-88518-4

  • eBook Packages: Computer ScienceComputer Science (R0)

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