Abstract
In this paper, a SCARA type vacuum robot for cluster tools has been designed, which can transfer semiconductor wafers in high vacuum chamber.The robot should be able to perform radial linear extending and retracting movement R, rotation movement θ, and vertically up-down movement Z. The rotation and radial linear movements are driven by direct drive motors which located in atmosphere environment, two magnetic couplings are applied to transmit the torques from atmosphere to vacuum environment. The dynamics model of the robot is builded, control system is set up.
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© 2008 Springer-Verlag Berlin Heidelberg
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Wu, J., Liu, P., Wang, Y. (2008). Design and Analysis of Vacuum Robot for Cluster Tools. In: Xiong, C., Huang, Y., Xiong, Y., Liu, H. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5314. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88513-9_31
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DOI: https://doi.org/10.1007/978-3-540-88513-9_31
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-88512-2
Online ISBN: 978-3-540-88513-9
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