Abstract
In recent years a new field in the micromechanical characterization of materials has emerged. Researchers started to integrate atomic force microscopes (AFM) into microtensile tests. This allowed to investigate surface deformation of layers with thicknesses in the range of micrometers. In the first part of this article experiments on organic samples are presented followed by developments on anorganic specimens. In the second part of the paper latest developments at the Center of Mechanics of ETH Zurich are presented. The setup allows to monitor crack growth with micrometer resolution. At the same time forces can be measured in the millinewton range. Specimens are made from photodefinable polyimide. The stress-crack- length diagrams of two experiments are presented which enables to identify different stages of crack growth and therefore of fracture behaviour. Finally, possible extensions of the setup employing digital image correlation (DIC) are envisioned by analyzing the displacement field around the crack tip.
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References
Small MK, Coupeau C, Grilh J (1995) Atomic-force microscopy of in-situ deformed LiF. Scripta Metall Mater 32(10):1573–1578
Goken M, Vehoff H, Neumann P (1996) Atomic force microscopy investigations of loaded crack tips in nial. J Vac Sci Technol B 14(2):1157–1161
Tong W, Hector LG, Weiland H, Wieserman LF (1997) In-situ surface characterization of a binary aluminum alloy during tensile deformation. Scripta Mater 36(11):1339–1344
Bhushan B (1999) Wear and mechanical characterisation on micro- to picoscales using AFM. Int Mater Rev 44(3):105–117
Hild S, Gutmannsbauer W, Luth R, Fuhrmann J, Guntherodt HJ (1996) A nanoscopic view of structure and deformation of hard elastic polypropylene with scanning force microscopy. J Polym Sci Pt B-Polym Phys 34(12):1953–1959
Oderkerk J, de Schaetzen G, Goderis B, Hellemans L, Groeninckx G (2002) Micromechanical deformation and recovery processes of nylon-6 rubber thermoplastic vulcanizates as studied by atomic force microscopy and transmission electron microscopy. Macromolecules 35(17):6623–6629
Nishino T, Nozawa A, Kotera M, Nakamae K (2000) In situ observation of surface deformation of polymer films by atomic force microscopy. Rev Sci Instrum71(5):2094–2096
Opdahl A, Somorjai GA (2001) Stretched polymer surfaces: Atomic force microscopy measurement of the surface deformation and surface elastic properties of stretched polyethylene. J Polym Sci Pt B-Polym Phys 39(19):2263–2274
Bobji MS, Bhushan B (2001) In situ microscopic surface characterization studies of polymeric thin films during tensile deformation using atomic force microscopy. J Mater Res 16(3):844–855
Tambe NS, Bhushan B (2004) In situ study of nano-cracking in multilayered magnetic tapes under monotonic and fatigue loading using an AFM. Ultramicroscopy 100(3–4):359–373
Bhushan B, Mokashi PS, Ma T (2003) A technique to measure Poisson’s ratio of ultrathin polymeric films using atomic force microscopy. Rev Sci Instrum 74(2):1043–1047
Roggemann MC, Williams JG (2002) Use of an atomic force microscope to measure surface deformations in polymeric systems. J Adhes Sci Technol 16(7):905–920
Li XD, Xu WJ, Sutton MA, Mello M (2006) Nanoscale deformation and cracking studies of advanced metal evaporated magnetic tapes using atomic force microscopy and digital image correlation techniques. Mater Sci Technol 22(7):835–844
Li XD, Xu WJ, Sutton MA, Mello M (2007) In situ nanoscale in-plane deformation studies of ultrathin polymeric films during tensile deformation using atomic force microscopy and digital image correlation techniques. IEEE Trans Nanotechnol 6(1):4–12
Bamberg E, Grippo CP, Wanakamol P, Slocum AH, Boyce MC, Thomas EL (2006) A tensile test device for in situ atomic force microscope mechanical testing. Precis Eng-J Int Soc Precis Eng Nanotechnol 30(1):71–84
Thomas C, Ferreiro V, Coulon G, Seguela R (2007) In situ AFM investigation of crazing in polybutene spherulites under tensile drawing. Polymer 48(20):6041–6048
Chasiotis I, Knauss WG (2002) A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy. Exp Mech 42(1):51–57
Cho SW, Cardenas-Garcia JF, Chasiotis I (2005) Measurement of nanodisplacements and elastic properties of MEMS via the microscopic hole method. Sensor Actuat A-Phys 120(1):163–171
Cho SW, Chasiotis I (2007) Elastic properties and representative volume element of polycrystalline silicon for MEMS. Exp Mech 47(1):37–49
Chasiotis I, Cho SW, Jonnalagadda K (2006) Fracture toughness and subcritical crack growth in polycrystalline silicon. J Appl Mech-Trans ASME 73(5):714–722
Cho SW, Jonnalagadda K, Chasiotis I (2007) Mode I and mixed mode fracture of polysilicon for MEMS. Fatigue Fract Eng Mater Struct 30(1):21–31
Cho S, Chasiotis I, Friedmann TA, Sullivan JP (2005) Young’s modulus, Poisson’s ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices. J Micromech Microeng 15(4):728–735
Lee Y, Tada J, Isono Y (2005) Mechanical characterization of single crystal silicon and UV-LIGA nickel thin films using tensile tester operated in AFM. Fatigue Fract Eng Mater Struct 28(8):675–686
Isono Y, Namazu T, Terayama N (2006) Development of AFM tensile test technique for evaluating mechanical properties of sub-micron thick DLC films. J Microelectromech Syst 15(1):169–180
Haque MA, Saif MTA (2002) In-situ tensile testing of nano-scale specimens in SEM and TEM. Exp Mech 42(1):123–128
LLC HD MicroSystems. Pyralin PI2720 Processing Guidelines. 1998.
Kajii H, Taneda T, Ohmori Y (2003) Organic light-emitting diode fabricated on a polymer substrate for optical links. Thin Solid Films 438:334–338
Lee JG, Seol YG, Lee NE (2006) Polymer thin film transistor with electroplated source and drain electrodes on a flexible substrate. Thin Solid Films 515(2):805–809
Tung S, Witherspoon SR, Roe LA, Silano A, Maynard DP, Ferraro N (2001) A MEMS-based flexible sensor and actuator system for space inflatable structures. Smart Mater Struct 10(6):1230–1239
Aslam M, Gregory C, Hatfield JV (2004) Polyimide membrane for micro-heated gas sensor array. Sens Actuat B-Chem 103(1–2):153–157
Kuoni A, Holzherr R, Boillat M, de Rooij NF (2003) Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor. J Micromech Microeng 13(4):S103–S107
ISO527-3. Plastics-determination of tensile properties-part 3. Technical report, 1995.
Lang U, Reichen M, Dual J (2006) Fabrication of a tensile test for polymer micromechanics. Microelectron Eng 83(4–9):1182–1184
Lang U, Dual J Observing crack propagation in polyimide microtensile specimens by in situ atomic force microscopy, 2008. Submitted to Exp Mech
Anderson TL (1995) Fracture mechanics: Fundamentals and applications, CRC Press, Boca Raton, p 630.
Keller J, Vogel D, Schubert A, Michel B (2004) Displacement and strain field measurements from SPM images. In: Bhushan B, Fuchs H, Hosaka S (eds) Applied scanning probe methods, volume I of Nanoscience and technology, Springer pp 253–276
Feddersen CE (1971) Evaluation and prediction of residual strength of center cracked tension panels. In: Rosenfield MS (ed) Damage tolerance in aircraft structures, vol ASTM STP 486. pp 50–86
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Lang, U., Dual, J. (2009). Microtensile Tests Using In Situ Atomic Force Microscopy. In: Bhushan, B., Fuchs, H. (eds) Applied Scanning Probe Methods XII. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-85039-7_8
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DOI: https://doi.org/10.1007/978-3-540-85039-7_8
Publisher Name: Springer, Berlin, Heidelberg
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