Abstract
The ability to microstructure specific materials is always associated with the ability to selectively remove material over small scale-lengths. Localized etching whether it is chemical or physical, wet or dry, parallel or sequential is central to every modern microstructuring method. For example a beam of accelerated ions is scanned on the surface of interest removing material along its trajectory. Alternatively the surface is prepared/treated in a manner that changes its “quality” locally making it more susceptible or more resistive to a particular etching agent. The whole surface is subsequently exposed to the etching agent which can be a uniform accelerated ion beam, a laser beam or an acid. The etching agent preferentially attacks the pre-treated (or the untreated) portion of the surface removing material.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
K.E. Petersen, Proc. IEEE 70, 420–456 (1982)
W.P. Eaton, J.H. Smith, Smart Mater. Struct. 6, 530–539 (1997)
T. Frank, J. Micromech. Microeng. 8, 114–118 (1998)
M. Koch, D. Chatelain, A.G.R. Evans, A. Brunnschweiler, J. Micromech. Microeng. 8, 123–126 (1998)
M. Yamada, N. Nada, M. Saitoh, K. Watanabe, Appl. Phys. Lett. 62, 435 (1993)
J. Webjorn, V. Pruneri, St.P.J. Russell, J.R.M. Barr, D.C. Hanna, Electron. Lett. 30, 894 (1994)
C. Restoin, S. Massy, C. Darraud-Taupiac, A. Barthelemy, Opt. Mater. 22, 193 (2003)
C. Restoin, C. Darraud-Taupiac, J.L. Decossas, J.C. Vareille, J. Hauden, Mater. Sci. Semicon. Proc. 3, 405–407 (2000)
A.C.G. Nutt, V. Gopalan, M.C. Gupta, Appl. Phys. Lett. 60, 2828 (1992)
S.Z. Yin, Microwave Opt. Technol. Lett. 22, 396 (1999)
F. Lacour, N. Courjal, M.P. Bernal, A. Sabac, C. Bainier, M. Spajer, Opt. Mater. 27, 1421 (2005)
H. Hu, A.P. Milenin, R.B. Wehrspohn, H. Hermann, W. Sohler, J. Vac. Sci. Technol. A 24, 1012–1015 (2006)
V. Foglietti, E. Cianci, D. Pezzeta, C. Sibilia, M. Marangoni, R. Osellame, R. Ramponi, Microelectron. Eng. 67–68, 742 (2003)
W.S. Yang, H.Y. Lee, W.K. Kim, D.H. Yoon, Opt. Mater. 27, 1642–1646 (2005)
H.W. Chong, A. Mitchell, J.P. Hayes, M.W. Austin, Appl. Surf. Sci. 201(1–4), 196–203 (2002)
L. Gui, B.X. Xu, T.C. Chong, IEEE Photonics Technol. Lett. 16, 1337–1339 (2004)
S. Mailis, G.W. Ross, L. Reekie, J.A. Abernethy, R.W. Eason, Electron. Lett. 36, 1801–1803 (2000)
K. Nassau, H.J. Levinstein, G.M. Loiacono, J. Phys. Chem. Solids 27, 983 (1966)
R.S. Weis, T.K. Gaylord, Appl. Phys. A 37, 191–203 (1985)
N.G.R. Broderick, G.W. Ross, H.L. Offerhaus, D.J. Richardson, D.C. Hanna, Phys. Rev. Lett. 84, 4345 (2000)
I.E. Barry, G.W. Ross, P.G.R. Smith, R.W. Eason, G. Cook, Mater. Lett. 37, 246 (1998)
C.L. Sones, S. Mailis, W.S. Brocklesby, R.W. Eason, J.R. Owen, J. Mater. Chem. 12, 295 (2002)
D. Xue, K. Kitamura, Ferroelectrics 29, 89–93 (2002) (Letters section)
T.J. Sono, J.G. Scott, C.L. Sones, C.E. Valdivia, S. Mailis, R.W. Eason, J.G. Frey, L. Danos, Phys. Rev. B 74, 205424 (2006)
N. Niizeki, T. Yamada, H. Toyoda, Jpn. J. Appl. Phys. 6(3), 318–326 (1967)
I.E. Barry, G.W. Ross, P.G.R. Smith, R.W. Eason, Appl. Phys. Lett. 74, 1487 (1999)
A.C. Busacca, C.L. Sones, V. Apostolopoulos, R.W. Eason, S. Mailis, Appl. Phys. Lett. 81, 4946 (2002)
S. Grilli, P. Ferraro, L. Sansone, M. Paturzo, S. De Nicola, G. Plerattini, P. De Natale, IEEE Photonics Technol. Lett. 18, 541–543 (2006)
K. Mitane, U. Goselr, J. Electron. Mater. 21, 669 (1992)
F. Gray, K. Hermansson, Appl. Phys. Lett. 71, 3400 (1997)
K. Ljungberg, A. Soderbarg, Y. Backlund, Appl. Phys. Lett. 78, 1035 (1993)
H. Himi, H. Matsui, S. Fujino, T. Hattori, Jpn. J. Appl. Phys. Part I 33, 6 (1994)
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Mailis, S., Sones, C.L., Eason, R.W. (2009). Micro-Structuring and Ferroelectric Domain Engineering of Single Crystal Lithium Niobate. In: Ferraro, P., Grilli, S., De Natale, P. (eds) Ferroelectric Crystals for Photonic Applications. Springer Series in Materials Science, vol 91. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-77965-0_1
Download citation
DOI: https://doi.org/10.1007/978-3-540-77965-0_1
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-77963-6
Online ISBN: 978-3-540-77965-0
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)