Abstract
X-ray diffraction and transmission electron microscopy (TEM) provide complementary structural data on semiconductor quantum dots. While TEM characterizes single structures with atomic resolution X-ray diffraction yields information on statistical averages of large ensembles. For the work reported here, established methods were refined and some new methods were developed. Materials systems investigated were (In,Ga)As/GaAs, Ga(Sb,As)/GaAs and (Si,Ge)/Si. The composition of wetting layer and quantum dots could be quantitatively determined, showing a good agreement between quite a number of different X-ray and TEM methods. For all systems the depletion of the wetting layer and the enrichment of the strain providing species in the upper part of the quantum dot could be quantitatively analysed. For the model system (Si,Ge)/Si it was found that a ring of deep wetting layer depletion forms around the (Si,Ge)-islands. It was shown that this strain driven depletion prevents further lateral nucleation and thus eventually limits the size of the islands. A specific three-dimensional ordering of multilayered (In,Ga)As quantum dots grown on GaAs high-index surfaces was demonstrated and could be explained in the framework of elasticity theory and surface kinetics.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
D. Bimberg, M. Grundmann, N.N. Ledentsov, Quantum Dot Heterostructures (Wiley, Chichester, 1999)
D. Bimberg, N.N. Ledentsov, J. Phys.: Condens. Matter 15, R1 (2003)
K. Scheerschmidt, D. Conrad, H. Kirmse, R. Schneider, W. Neumann, Ultramicroscopy 81, 289 (2000)
W. Neumann, H. Kirmse, I. Häusler, R. Otto, J. Microsc. 223, 200 (2006)
R. Köhler, P. Schäfer, T. Panzner, M. Schmidbauer, R. Feidenhans’l, HASYLAB Annual Report. p. 60, 2001
M. Schmidbauer, D. Grigoriev, M. Hanke, P. Schäfer, T. Wiebach, R. Köhler, Phys. Rev. B 71, 115324 (2005)
Th. Wiebach, M. Schmidbauer, M. Hanke, H. Raidt, R. Köhler, H. Wawra, Phys. Rev. B 61, 5571 (2000)
M. Schmidbauer, X-Ray Diffuse Scattering from Self-Organized Mesoscopic Semi-Conductor Structures. Springer Tracts in Modern Physics, vol. 199 (Springer, Berlin, 2004)
W. Dorsch, H.P. Strunk, H. Wawra, G. Wagner, J. Groenen, R. Carles, Appl. Phys. Lett. 72, 179 (1998)
A.-K. Gerlitzke, Heteroepitaktisches Wachstum von Si1−x Ge x -Nanostrukturen auf Si-Substraten mittels Flüssigphasenepitaxie (Mensch & Buch, Berlin, 2006)
Th. Teubner, T. Boeck, J. Cryst. Growth 289, 366 (2006)
S. Christiansen, M. Albrecht, H.P. Strunk, H.J. Maier, Appl. Phys. Lett. 64, 3617 (1994)
M. Hanke, M. Schmidbauer, D. Grigoriev, P. Schäfer, R. Köhler, A.-K. Gerlitzke, H. Wawra, Phys. Rev. B 69, 075317 (2004)
T. Tham, Ph.D. thesis, Humboldt-Universität zu Berlin, 2002
W. Neumann, H. Kirmse, I. Häusler, R. Otto, I. Hähnert, J. Alloys Comp. 382, 2 (2004)
R. Schneider, I. Häusler, A.-K. Gerlitzke, W. Neumann, in Microscopy Conference 2005, Davos, 2005
I. Häusler, H. Schwabe, R. Schneider, W. Neumann, M. Hanke, R. Köhler, A. Gerlitzke, in Microscopy Conference 2005, Davos, 2005
I. Häusler, H. Schwabe, H. Kirmse, W. Neumann, in 14. Jahrestagung der DGK 2006, Freiburg, 2006
I. Häusler, H. Kirmse, W. Neumann, in Proc. 16. Intern. Microscopy Congress, Sapporo, 2006
M. Hanke, Ph.D. thesis, Humboldt-Universität zu Berlin, 2002
S.A. Chaparro, Y. Zhang, J. Drucker, Appl. Phys. Lett. 76, 3534 (2000)
U. Denker, O.G. Schmidt, N.Y. Jin-Phillip, K. Eberl, Appl. Phys. Lett. 78, 3723 (2001)
M. Hanke, H. Raidt, R. Köhler, H. Wawra, Appl. Phys. Lett. 83, 4927 (2003)
V.A. Shchukin, N.N. Ledentsov, D. Bimberg, Epitaxy of Nanostructures (Springer, New York, 2004)
P.W. Fry, I.E. Itskevich, D.J. Mowbray, M.S. Skolnick, J.J. Finley, J.A. Barker, E.P. O’Reilly, L.R. Wilson, I.A. Larkin, P.A. Maksym, M. Hopkinson, M. Al-Khafaji, J.P.R. David, A.G. Cullis, G. Hill, J.C. Clark, Phys. Rev. Lett. 74, 733 (2000)
P. Jayavel, H. Tanaka, T. Kita, O. Wada, H. Ebe, M. Sugawara, J. Tatebayashi, Y. Arakawa, Y. Nakata, T. Akiyama, Appl. Phys. Lett. 84, 1820 (2004)
R.L. Sellin, F. Heinrichsdorff, C. Ribbat, M. Grundmann, U.W. Pohl, D. Bimberg, J. Cryst. Growth 221, 581 (2000)
M. Hanke, D. Grigoriev, M. Schmidbauer, P. Schäfer, R. Köhler, R.L. Sellin, U.W. Pohl, D. Bimberg, Appl. Phys. Lett. 85, 3062 (2004)
M. Hanke, D. Grigoriev, M. Schmidbauer, P. Schäfer, R. Köhler, U.W. Pohl, R.L. Sellin, D. Bimberg, N.D. Zakharov, P. Werner, Physica E 21, 684 (2004)
A. Krost, F. Heinrichsdorff, D. Bimberg, A. Darhuber, G. Bauer, Appl. Phys. Lett. 68, 785 (1996)
I. Kegel, T.H. Metzger, A. Lorke, J. Peisl, J. Stangl, G. Bauer, K. Nordlund, W.V. Schoenfeld, P.M. Petroff, Phys. Rev. B 63, 035318 (2001)
L.G. Wang, P. Kratzer, N. Moll, M. Scheffler, Phys. Rev. B 62, 1897 (2000)
A. Rosenauer, U. Fischer, D. Gerthsen, A. Förster, Ultramicroscopy 72, 121 (1998)
A. Lemaître, G. Patriarche, F. Glas, Appl. Phys. Lett. 85, 3717 (2004)
J. Márquez, L. Geelhaar, K. Jacobi, Appl. Phys. Lett. 78, 2309 (2001)
G. Springholz, V. Holý, M. Pinczolits, G. Bauer, Science 282, 734 (1998)
G. Springholz, M. Pinczolits, P. Mayer, V. Holý, G. Bauer, H.H. Kang, L. Salamanca-Riba, Phys. Rev. Lett. 84, 4669 (2000)
J. Tersoff, C. Teichert, M.G. Lagally, Phys. Rev. Lett. 76, 1675 (1996)
Q. Xie, A. Madhukar, P. Chen, N. Kobayashi, Phys. Rev. Lett. 75, 2542 (1995)
M. Schmidbauer, T. Wiebach, H. Raidt, M. Hanke, R. Köhler, H. Wawra, Phys. Rev. B 58, 10523 (1998)
M. Schmidbauer, T. Wiebach, H. Raidt, M. Hanke, R. Köhler, H. Wawra, J. Phys. D: Appl. Phys. 32, 230 (1999)
M. Schmidbauer, F. Hatami, M. Hanke, P. Schäfer, K. Braune, W.T. Masselink, R. Köhler, M. Ramsteiner, Phys. Rev. B 65, 125320 (2002)
M. Schmidbauer, F. Hatami, P. Schäfer, M. Hanke, T. Wiebach, H. Niehus, W.T. Masselink, R. Köhler, Mat. Res. Soc. Symp. Proc. 642, J6.8 (2001)
D. Leonard, M. Krishnamurthy, C.M. Reaves, S.P. Denbaars, P.M. Petroff, Appl. Phys. Lett. 63, 3203 (1993)
T. Mano, R. Nötzel, G.J. Hamhuis, T.J. Eijkemans, J.H. Wolter, Appl. Phys. Lett. 81, 1705 (2002)
Y.I. Mazur, W.G. Ma, X. Wang, Z.M. Wang, G.J. Salamo, M. Xiaoa, T.D. Mishima, M.B. Johnson, Appl. Phys. Lett. 83, 987 (2003)
M. Schmidbauer, S. Seydmohamadi, D. Grigoriev, Z.M. Wang, Y.I. Mazur, P. Schäfer, M. Hanke, R. Köhler, G.J. Salamo, Phys. Rev. Lett. 96, 066108 (2006)
E.A. Kondrashkina, S.A. Stepanov, R. Opitz, M. Schmidbauer, R. Köhler, R. Hey, M. Wassermeier, D.V. Novikov, Phys. Rev. B 56, 10469 (1997)
V. Holý, G. Springholz, M. Pinczolits, G. Bauer, Phys. Rev. Lett. 83, 356 (1999)
Y. Sugiyama, Y. Nakata, Y. Muto, S. Futatsugi, T. Yokoyama, N. Fujitsu Labs. Ltd., Atsugi, J. Sel. Top. Quantum Electron. 4, 880 (1998)
F. Hatami, N.N. Ledentsov, M. Grundmann, J. Böhrer, F. Heinrichsdorff, M. Beer, D. Bimberg, S.S. Ruvimov, P. Werner, U. Gösele, J. Heydenreich, U. Richter, S.V. Ivanov, B.Y. Meltser, P.S. Kop’ev, Z.I. Alferov, Appl. Phys. Lett. 67, 656 (1995)
J.M. Gérard, J.B. Génin, J. Lefebvre, J.M. Moison, N. Lebouché, F. Barthe, J. Cryst. Growth 150, 351 (1995)
K. Suzuki, R.A. Hogg, K. Tachibana, Y. Arakawa, Jpn. J. Appl. Phys. 37, L203 (1998)
L. Müller-Kirsch, Ph.D. thesis, Technische Universität Berlin, 2002
L. Müller-Kirsch, R. Heitz, U.W. Pohl, D. Bimberg, I. Häusler, H. Kirmse, W. Neumann, Appl. Phys. Lett. 79, 1027 (2001)
I. Häusler, Master’s thesis, Humboldt-Universität zu Berlin, 2001
F. Hatami, U. Müller, H. Kissel, K. Braune, R.-P. Blum, S. Rogaschewski, H. Niehus, H. Kirmse, W. Neumann, M. Schmidbauer, R. Köhler, W.T. Masselink, J. Cryst. Growth 216, 26 (2000)
R. Otto, H. Kirmse, I. Häusler, A. Rosenauer, D. Bimberg, L. Müller-Kirsch, Appl. Phys. Lett. 85(21), 4908 (2004)
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Köhler, R. et al. (2008). Structural Characterisation of Quantum Dots by X-Ray Diffraction and TEM. In: Bimberg, D. (eds) Semiconductor Nanostructures. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-77899-8_5
Download citation
DOI: https://doi.org/10.1007/978-3-540-77899-8_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-77898-1
Online ISBN: 978-3-540-77899-8
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)