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Czochralski Silicon Single Crystals for Semiconductor and Solar Cell Applications

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Springer Handbook of Crystal Growth

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Abstract

This chapter reviews growth and characterization of Czochralski silicon single crystals for semiconductor and solar cell applications. Magnetic-field-applied Czochralski growth systems and unidirectional solidification systems are the focus for large-scale integrated (LSI) circuits and solar applications, for which control of melt flow is a key issue to realize high-quality crystals.

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Abbreviations

3-D:

three-dimensional

AC:

alternate current

CCD:

charge-coupled device

CZ:

Czochralski

DC:

direct current

MCZ:

magnetic Czochralski

TMCZ:

transverse magnetic-field-applied Czochralski

ULSI:

ultralarge-scale integrated circuit

VMCZ:

vertical magnetic-field-applied Czochralski

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Authors and Affiliations

  1. Research Institute for Applied Mechanics, Kyushu University, 6-1 Kasuga-kouen, Kasuga, 816-8580, Fukuoka, Japan

    Koichi Kakimoto

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  1. Koichi Kakimoto
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Correspondence to Koichi Kakimoto .

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Editors and Affiliations

  1. Advanced Renewable Energy Company, 18 Celina Avenue, 03063, Nashua, NH, USA

    Govindhan Dhanaraj Dr.

  2. Department of Geology, University of Mysore, Manasagangotri, 570 006, Mysore, India

    Kullaiah Byrappa Ph.D.

  3. University of North Texas, 1155 Union Circle, 76203-5017, Denton, TX, USA

    Vishwanath Prasad Dr.

  4. Department of Materials Science and Engineering, Stony Brook University, 11794-2275, Stony Brook, NY, USA

    Michael Dudley Dr.

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Kakimoto, K. (2010). Czochralski Silicon Single Crystals for Semiconductor and Solar Cell Applications. In: Dhanaraj, G., Byrappa, K., Prasad, V., Dudley, M. (eds) Springer Handbook of Crystal Growth. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74761-1_8

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