This chapter describes the diffraction theory relationships between figure errors of grazing incidence mirrors and their imaging performance at synchrotron radiation beam lines. A practical illustrative example is the topographic errors of a synchrotron mirror as a function of spatial frequency. The basic idea of figure error inspection by direct slope measurement is described.
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References
J.S. Taylor, G.E. Sommargren, D.W. Sweeney, R.M. Hudyama, UCRL-JC-128290 Rev. 1 (1998)
E.L. Church, P.Z. Takacs, Opt. Eng. 34(2), 353 (1995)
E.L. Church, P.Z. Takacs, Appl. Optics 32(19), 3344 (1993)
V.V. Yashchuk, M.R. Howells, W.R. McKinney, P.Z. Takacs, in Proceedings of The 3rd International Workshop on Metrology for X-Ray Optics, Daegu, 2006
V.V. Yashchuk, S.C. Irick, E.M. Gullikson, M.R. Howells, A.A. MacDowell, W.R. McKinney, F. Salmassi, T. Warwick, in Advances in Metrology for X-Ray and EUV Optics, ed. by L. Assoufid, P.Z. Takacs, J.S. Taylor, Proceedings of SPIE, vol. 5921, 2005, p. 18
P. Takacs, S. Qian, J. Colbert, SPIE 749, 59 (1987)
P.Z. Takacs, S.-N. Qian, United States Patent 4,884,697, 1989
F. Siewert, T. Noll, T. Schlegel, T. Zeschke, H. Lammert, in AIP Conference Proceedings, vol. 705, Mellvile, New York, 2004, p. 847
H. Lammert, T. Noll, T. Schlegel, F. Siewert, T. Zeschke, in Patentschrift DE10303659 B4 2005.07.28
I. Weingärtner, M. Schulz, C. Elster, in Proceedings of SPIE, vol. 3782, 1999, p. 306
C. Elster, I. Weingärtner, Appl. Opt. 38, 5024 (1999)
V.V. Yashchuk, S.C. Irick, E.M. Gullikson, M.R. Howells, A.A. MacDowell, W.R. McKinney, F. Salmassi, T. Warwick, Advances in Metrology for X-Ray and EUV Optics, ed. by L. Assoufid, P.Z. Takacs, J.S. Taylor, Proceedings of SPIE, vol. 5921, 2005, p. 18
S.C. Irick, Rev. Sci. Instrum. 63(1), (1992)
R. Signorato, M. Sanchez del Rio, in Proceedings of SPIE, vol. 3152, 1997, p. 136
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Siewert, F. (2008). Slope Error and Surface Roughness. In: Erko, A., Idir, M., Krist, T., Michette, A.G. (eds) Modern Developments in X-Ray and Neutron Optics. Springer Series in optical science, vol 137. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74561-7_9
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