Abstract
When the first transistors were built in the late 1940s, few could prediet their wide-spread adoption and the capabilities of the integrated circuits (ICs) that would evolve from those initial discoveries. Although the concept of a field-effect transistor controlled by an external gate electrode had been conceived [1] two decades before the first observation of transistor action, the first practical transistors were bipolar transistors, rather than field-effect transistors; adequate control of the interface between the semiconductor and the gate insulator needed for a practical field-effect transistor was lacking. Extensive efforts throughout the 1960s finally provided the interface control needed for practical use of the presently dominant, insulated-gate, field-effect transistors built using the metal-oxide-semiconductor (MOS) system based on silicon and thermally grown silicon dioxide.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J.E. Lilienfeld, U.S. Patent 1,900,018 (1933)
L. Guo, P.R. Krauss, S.Y. Chou, Appl. Phys. Lett. 71, 1881 (1997)
M.D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S.A. Lyon, S.Y. Chou, Appl. Phys. Lett. 84, 5299 (2004)
G. Snider, P.J. Kuekes, T. Hogg, R.S. Williams, Appl. Phys. A 80, 1183 (2005)
D.J. Eaglesham, M. Cerullo, Phys. Rev. Lett. 64, 1943 (1990)
M. Krishnamurthy, J.S. Drucker, J.A. Venables, J. Appl. Phys. 69, 6461 (1991)
G. Medeiros-Ribeiro, A.M. Bratkovski, T.I. Kamins, D.A.A. Ohlberg, R.S. Williams, Science 279, 353 (1998)
R. Stanley Williams, G. Medeiros-Ribeiro, T.I. Kamins, D.A.A. Ohlberg, Acc. Chem. Res. 32, 425 (1999)
P.D. Siverns, S. Malik, G. McPherson, D. Childs, C. Roberts, R. Munay, B.A. Joyce, H. Davock, Phys. Rev. B 58, R10127 (1998)
H.Y. Liu, I.R. Sellers, M. Gutierrez, K.M. Groom, W.M. Soong, M. Hopkinson, J.P.R. David, R. Beanland, T.J. Badcock, D.J. Mowbray, M.S. Skolnick, J. Appl. Phys. 96, 1988 (2004)
T.I. Kamins, E.C. Carr, R.S. Williams, S.J. Rosner, J. Appl. Phys. 81, 211 (1997)
M. Zinke-Allmang, L.C. Feldman, S. Nakahara, B.A. Davidson, Phys. Rev. B 39, 7848 (1989)
I.M. Lifshitz, V.V. Slyozov, J. Phys. Chem. Solids 19, 35 (1961)
C. Wagner, Z. Electrochem. 65, 581 (1961)
B.K. Chakraverty, J. Phys. Chem. Solids. 28, 2401 (1967)
B.K. Chakraverty, J. Phys. Chem. Solids 28, 2413 (1967)
M. Zinke-Allmang, L.C. Feldman, M.H. Grabow, Surf. Sci. Rep. 16, 377 (1992)
G. Capellini, M. De Seta, F. Evangelisti, Appl. Phys. Lett. 78, 303 (2001)
T.I. Kamins, G. Medeiros-Ribeiro, D.A.A. Ohlberg, R.S. Williams, J. Appl. Phys. 94, 4215 (2003)
T.I. Kamins, G. Medeiros-Ribeiro, D.A.A. Ohlberg, R.S. Williams, J. Appl. Phys. 95, 1562 (2004)
J. Tersoff, F.K. LeGoues, Phys. Rev. Lett. 72, 3570 (1994)
J. Tersoff, C. Teichert, M.G. Lagally, Phys. Rev. Lett. 76, 1675 (1996)
T.I. Kamins, D.P. Basile, J. Electron. Mater. 29, 570 (2000)
T.I. Kamins, R.S. Williams, Appl. Phys. Lett. 71, 1201 (1997)
L. Vescan, J. Cryst. Growth 194, 173 (1998)
G. Jin, J.L. Liu, S.G. Thomas, Y.H. Luo, K.L. Wang, B.-Y. Nguyen, Appl. Phys. Lett. 75, 2752 (1999)
B. Damilano, N. Grandjean, S. Dalmasso, J. Massies, Appl. Phys. Lett. 75, 3751 (1999)
L.W. Ji, Y.K. Su, S.J. Chang, S.C. Hung, C.S. Chang, L.W. Wu, IEE Proc. Circuits Devices Syst. 151, 486 (2004)
G.T. Liu, A. Stintz, H. Li, K.J. Malloy, L.F. Lester, Electron. Lett. 35, 1163 (1999)
D. Bimberg, N.N. Ledentsov, J.A. Lott, MRS Bull. 27, 531 (2002)
Y. Chen, D.A.A. Ohlberg, G. Medeiros-Ribeiro, Y.A. Chang, R.S. Williams, Appl. Phys. Lett. 76, 4004 (2000)
Y. Chen, D.A.A. Ohlberg, R.S. Williams, J. Appl. Phys. 91, 3213 (2002)
R. Ragan, Y. Chen, D.A.A. Ohlberg, G. Medeiros-Ribeiro, R.S. Williams, J. Cryst. Growth 251, 657 (2003)
J.F. Lin, J.P. Bird, Z. He, P.A. Bennett, D.J. Smith, Appl. Phys. Lett. 85, 281 (2004)
R.S. Muller, T.I. Kamins, Device Electronics for Integrated Circuits, 3rd edn. (Wiley, New York, 2003), p. 231
T.I. Kamins, X. Li, S. Sharma, R.S. Williams, in Fall 2003 Mat. Res. Soc. Meeting, Boston, Dec. 3, 2003, paper N9.10
M.K. Sunkara, S. Sharma, R. Miranda, G. Lian, E.C. Dickey, Appl. Phys. Lett. 79, 1546 (2001)
Y. Cui, L.J. Lauhon, M.S. Gudiksen, J.F. Wang, C.M. Lieber, Appl. Phys. Lett. 78, 2214 (2001)
S. Sharma, T.I. Kamins, R.S. Williams, Appl. Phys. A 80, 1225 (2005)
A.M. Morales, C.M. Lieber, Science 279, 208 (1998)
R.S. Wagner, W.C. Ellis, K. Jackson, S.M. Arnold, J. Appl. Phys. 35, 2993 (1964)
G.A. Bootsma, J.H. Gassen, J. Cryst. Growth 10, 223 (1971)
Y. Wu, P. Yang, Chem. Mater. 12, 605 (2000)
J. Westwater, D.P. Gosain, S. Tomiya, S. Usui, H. Ruda, J. Vac. Sci. Technol. B 15, 554 (1997)
T.I. Kamins, R.S. Williams, D.P. Basile, T. Hesjedal, J.S. Harris, J. Appl. Phys. 89, 1008 (2001)
R.S. Wagner, W.C. Ellis, Trans. Metall. Soc. AIME 233, 1053 (1965)
E.I. Givargizov, J. Cryst. Growth 20, 217 (1973), J. Cryst. Growth 31, 20 (1975)
A.M. Morales, C.M. Lieber, Science 279, 208 (1998)
K.F. Peters, Y.-W. Chung, J.B. Cohen, Appl. Phys. Lett. 71, 2391 (1997)
M. Wautelet, J.P. Dauchot, M. Hecq, Nanotechnology 11, 6 (2000)
S. Sharma, T.I. Kamins, R.S. Williams, J. Cryst. Growth 267, 613 (2004)
S.S. Yi, unpublished
D.W. Wang, H.J. Dai, Angew. Chem. Int. Ed. 41, 4783 (2002)
T.I. Kamins, X. Li, R.S. Williams, X. Liu, Nano Lett. 4, 503 (2004)
B.J. Ohlsson, M.T. Bjork, M.H. Magnusson, K. Deppert, L. Samuelson, Appl. Phys. Lett. 79, 3335 (2001)
M.H. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, P. Yang, Science 292, 1897 (2001)
M.T. Bjork, B.J. Ohlsson, T. Sass, A.I. Persson, C. Thelander, M.H. Magnusson, K. Deppert, L.R. Wallenberg, L. Samuelson, Nano Lett. 2, 87 (2002)
M.S. Gudiksen, L.J. Lauhon, J. Wang, D.C. Smith, C.M. Lieber, Nature 415, 617 (2002)
M.T. Björk, B.J. Ohlsson, T. Sass, A.I. Persson, C. Thelander, M.H. Magnusson, K. Deppert, L.R. Wallenberg, L. Samuelson, Appl. Phys. Lett. 80, 1058 (2002)
L.J. Lauhon, M.S. Gudiksen, D. Wang, C.M. Lieber, Nature 420, 57 (2002)
T. Martensson, C. Patrik, T. Svensson, B.A. Wacaser, M.W. Larsson, W. Seifert, K. Deppert, A. Gustafsson, L.R. Wallenberg, L. Samuelson, Nano Lett. 4, 1987 (2004)
S.S. Yi, G. Girolami, J. Amano, M. Saif Islam, S. Sharma, T.I. Kamins, I. Kimukin, Appl. Phys. Lett. 89, 133121 (2006)
Q. Tang, T.I. Kamins, X. Liu, D.E. Grupp, J.S. Harris, Electrochem. Solid-State Lett. 8, G204 (2005)
E.I. Givargizov, J. Vac. Sci. Technol. B 11, 449 (1993)
Y.L. Chuch, L.J. Chou, S.L. Cheng, J.H. He, W.W. Wu, L.J. Chen, Appl. Phys. Lett. 86, 133112 (2005)
M. Tabib-Azar, M. Nassirou, R. Wang, S. Sharma, T.I. Kamins, M. Saif Islam, R.S. Williams, Appl. Phys. Lett. 87, 113102 (2005)
M. Belov, N.J. Quitoriano, S. Sharma, W.K. Hiebert, T.I. Kamins, S. Evoy, J. Appl. Phys. 103, 074304 (2008)
D.L. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979)
M.S. Islam, S. Sharma, T.I. Kamins, R. Stanley Williams, Nanotechnology 15, L5 (2004)
M.S. Islam, S. Sharma, T.I. Kamins, R. Stanley Williams, Appl. Phys. A 80, 1133 (2005)
S. Sharma, T.I. Kamins, M.S. Islam, R. Stanley Williams, A. Marshall, J. Cryst. Growth 280, 562 (2005)
S.-W. Chung, J.-Y. Yu, J. Heath, Appl. Phys. Lett. 76, 2068 (2000)
Y. Huang, X.F. Duan, Q.Q. Wei, C.M. Lieber, Science 291, 630 (2001)
P.A. Smith, C.D. Nordquist, T.N. Jackson, T.S. Mayer, B.R. Martin, J. Mbindyo, T.E. Mallouk, Appl. Phys. Lett. 77, 1399 (2000)
S.B. Sinnott, R. Andrews, Crit. Rev. Solid State Mater. Sci. 26, 145 (2001)
S.J. Tans, A.R.M. Verschueren, C. Dekker, Nature 393, 49 (1998)
S.J. Wind, J. Appenzeller, R. Martel, V. Derycke, P. Avouris, Appl. Phys. Lett. 80, 3817 (2002)
J. Tersoff, Appl. Phys. Lett. 74, 2122 (1999)
R.S. Friedman, M.C. McAlpine, D.S. Ricketts, D. Ham, C.M. Lieber, Nature 434, 1085 (2005)
D.W. Wang, Q. Wang, A. Javey, R. Tu, H.J. Dai, H. Kim, P.C. McIntyre, T. Krishnamohan, K.C. Saraswat, Appl. Phys. Lett. 83, 2432 (2003)
J. Goldberger, A.I. Hochbaum, R. Fan, P.D. Yang, Nano Lett. 6, 973 (2006)
H.T. Ng, J. Han, T. Yamada, P. Nguyen, Y.P. Chen, M. Meyyappan, Nano Lett. 4, 651 (2004)
J.-I. Hahm, C.M. Lieber, Nano Lett. 4, 51 (2004)
J. Li, Q. Ye, A. Cassell, H.T. Ng, R. Stevens, J. Han, M. Meyyappan, Appl. Phys. Lett. 82, 2491 (2003)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Kamins, T.I. (2009). Beyond CMOS Electronics: Self-Assembled Nanostructures. In: Huff, H.R. (eds) Into the Nano Era. Springer Series in Materials Science, vol 106. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74559-4_9
Download citation
DOI: https://doi.org/10.1007/978-3-540-74559-4_9
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-74558-7
Online ISBN: 978-3-540-74559-4
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)