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Vacuum Gauges

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References

  1. J. M. Lafferty, “Review of pressure measurement techniques for ultrahigh vacua”, J. Vac. Sci. Technol. 9(1), pp. 101–107 (1972).

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Mechanical Gauges

  1. N. G. Utterback and T. Griffith, Jr., “Reliable submicron pressure readings with capacitance manometer”, Rev. Sci. Instrum. 37 (7), pp. 866–870 (1966).

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Thermal Conductivity Gauges

  1. J. H. Leck, “The high temperature Pirani gauge”, J. Sci. Instrum. 29, pp. 258–263 (1952).

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  2. J. W. Beams, D. M. Spitzer, Jr., and J. P. Wade, Jr., “Spinning rotor pressure gauge”, Rev. Sci. Instrum. 33 (2), pp. 151–155 (1962).

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  3. J. K. Fremerey, “High vacuum gas friction manometer”, J. Vac. Sci. Technol. 9 (1), pp. 108–111 (1972).

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  4. P. Takasakul, J. A. Bentz, R. V. Tompson, and S. K. Loyalka, “The spinning rotor gauge: Measurements of viscosity, velocity slip coefficients, and tangential momentum accommodation coefficients”, J. Vac. Sci. Technol. A 14 (5), pp. 2946–2952 (1996).

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  5. K. Kokubun, M. Hirata, H. Murakami, Y. Toda, and M. Ono, “A bending and stretching mode crystal oscillator as a friction vacuum gauge”, Vacuum 34 (8/9), pp. 731–735 (1984).

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  6. M. Ono, M. Hirata, K. Kokubun, H. Murakami, F. Tamura, H. Hojo, H. Kawashima, and H. Kyogoku, “Design and performance of a qualtz oscillator vacuum gauge with a controller”, J. Vac. Sci. Technol. A 3(3), pp. 1746–1749 (1985).

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Ionization Gauges

  1. G. K. T. Conn and H. N. Daglish, “Cold cathode ionization gauges for the measurement of low pressures”, Vacuum 3 (1), pp. 24–34 (1953).

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  2. D. Alpert, “New developments in the production and measurement of ultra high vacuum”, J. Appl. Phys. 24 (7), pp. 860–876 (1953).

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  3. J. H. Singleton, “Practical guide to the use of Bayard-Alpert ionization gauges”, J. Vac. Sci. Technol. A 19 (4), pp. 1712–1719 (2001).

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  4. N. Yoshimura, H. Oikawa, and O. Mikami, “Measurement of outgassing rates from materials by differential pressure rise method”, Shinku (J. Vac. Soc. Japan) 13 (1), pp. 23–28 (1970) (in Japanese).

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  5. J. P. Hobson, “The pumping of nitrogen by a Bayard-Alpert ionization gauge in an ultra-high-vacuum system”, Vacuum 11, pp. 16–25 (1961).

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  6. G. F. Weston, “Measurement of ultra-high vacuum. Part I. Total pressure measurements”, Vacuum 29 (8/9), pp. 277–291 (1979).

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  7. F. Nakao, “Determination of the ionization gauge sensitivity using the relative ionization cross-section”, Vacuum 25 (9/10), pp. 431–435 (1975).

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  8. P. A. Redhead, “New hot-filament ionization gauge with low residual current”, J. Vac. Sci. Technol. 3 (4), pp. 173–180 (1966).

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  9. U. Beeck and G. Reich, “Comparison of the pressure indication of a Bayard-Alpert and an extractor gauge”, J. Vac. Sci. Technol. 9(1), pp. 126–132 (1972).

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  10. J. M. Lafferty, “Hot-cathode magnetron ionization gauge for the measurement of ultrahigh vacua”, J. Appl. Phys. 32, (3) pp. 424–434 (1961).

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  11. J. M. Lafferty, “Hot-cathode magnetron ionization gauge with an electron multiplier ion detector for the measurement of extreme ultra-high vacua”, Rev. Sci. Instrum. 34 (5), pp. 467–476 (1963).

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  12. R. N. Peacock, N. T. Peacock, and D. S. Hauschulz, “Comparison of hot cathode and cold cathode ionization gauges”, J. Vac. Sci. Technol. A 9(3), pp. 1977–1985 (1991).

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  13. K. M. Welch, L. A. Smart, and R. J. Todd, “Enhanced ignition of cold cathode gauges through the use of radioactive Isotopes”, J. Vac. Sci. Technol. A 14(3), pp. 1288–1291 (1996).

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  14. B. R. Kendall and E. Drubetsky, “Starting delays in cold-cathode gauges at low pressures”, J. Vac. Sci. Technol. A 14(3), pp. 1292–1296 (1996).

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  15. G. J. Schulz and A. V. Phelps, “Ionization gauges for measuring pressures up to the millimeter range”, Rev. Sci. Instrum. 28 (12), pp. 1051–1054 (1957).

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Partial Pressure Gauges

  1. D. Lichtman, “Perspectives on residual gas analysis”, J. Vac. Sci. Technol. A 2(2), pp. 200–205 (1984).

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  2. G. F. Weston, “Measurement of ultra-high vacuum. Part 2. Partial pressure measurements”, Vacuum 30 (2), pp. 49–67 (1980).

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  3. N. Yoshimura, H. Hirano, K. Ohara, and I. Ando, “Outgassing characteristics of an electropolished stainless-steel pipe with an operating extractor ionization gauge”, J. Vac. Sci. Technol. A 9 (4), pp. 2315–2318 (1991).

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  4. N. Yoshimura, T. Sato, S. Adachi, and T. Kanazawa, “Outgassing characteristics and microstructure of an electropolished stainless steel surface”, J. Vac. Sci. Technol. A 8 (2), pp. 924–929 (1990).

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  5. F. Nakao, “Simplified methods for the calculation of partial pressure using the relative ionization cross-section”, Vacuum 25 (5), pp. 201–209 (1975).

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Development of New Gauges for XHV

  1. F. Watanabe, “Point collector ionization gauge with spherical grid for measuring pressures below 10-11 Pa”, J. Vac. Sci. Technol. A 5(2), pp. 242–248 (1987).

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  2. F. Watanabe, “Ion spectroscopy gauge: Total pressure measurement down to 10-12 Pa with discrimination against electron-stimulated-desorption ions”, J. Vac. Sci. Technol. A 10(5), pp. 3333–3339 (1992).

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  3. F. Watanabe, “Total pressure measurement down to 10-12 Pa without electron stimulated desorption ion errors”, J. Vac. Sci. Technol. A 11(4), pp. 1620–1626 (1993).

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  4. C. Ohshima and A. Otuka, “Performance of an ionization gauge with a large-angle ion deflector. I. Total pressure measurement in extreme high vacuum”, J. Vac. Sci. Technol. A 12(6), pp. 3233–3238 (1994).

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  5. H. Akimichi, T. Arai, K. Takeuchi, Y. Tuzi, and I. Arakawa, “Calibration of an axial symmetric transmission gauge in ultrahigh and extreme high vacuum”, J. Vac. Sci. Technol. A 15(3), pp. 753–758 (1997).

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  6. H. Akimichi, K. Takeuchi, Y. Tuzi, and I. Arakawa, “Long term behavior of an axial-symmetric transmission gauge”, J. Vac. Sci. Technol. A 17(4), pp. 2021–2025 (1999).

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  7. N. Takahashi, J. Yuyama, Y. Tuzi, H. Akimichi, and I. Arakawa, “Axial-symmetric transmission gauge: Extension of its pressure measuring range and reduction of the electron stimulated desorption ion effect in ultrahigh vacuum”, J. Vac. Sci. Technol. A 23(3), pp. 554–558 (2005).

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  8. F. Watanabe and M. Suemitsu, “Separation of electron-stimulated-desorption neutrals from outgassing originating from the grid surface of emission-controlled gauges: Studies with a heated-grid gauge”, J. Vac. Sci. Technol. A 17(6), pp. 3467–3472 (1999).

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  9. F. Watanabe and A. Kasai, “Low outgassing residual gas analyzer with a beryllium-copper-alloy-flanged ion source”, J. Vac. Sci. Technol. A 13(2), pp. 497–500 (1995).

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  10. T. Satou and C. Oshima, “Performance of an ionization gauge with a large-angle ion deflector. II. Mass analysis of residual gas and electron stimulated desorption ions”, J. Vac. Sci. Technol. A 13(2), pp. 448–450 (1995).

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  11. C. Dong and G. R. Myneni, “Field emitter based extractor gauges and residual gas analyzers”, J. Vac. Sci. Technol. A 17(4), pp. 2026–2033 (1999).

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  12. N. Takahashi, T. Hayashi, H. Akimichi, and Y. Tuzi, ”Development of the quadrupole mass spectrometer with the Bessel-Box type energy analyzer: Function of the energy analyzer in the partial pressure measurements”, J. Vac. Sci. Technol. A 19(4), pp. 1688–1692 (2001).

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  13. F. Watanabe, “Investigation and reduction of spurious peaks caused by electron-stimulated desorption and outgassing by means of a grid heating method in a hot-cathode quadrupole residual gas analyzer”, J. Vac. Sci. Technol. A 20(4), pp. 1222–1229 (2002).

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  14. St. Wilfert and Chr. Edelmann, “Miniaturized vacuum gauges”, J. Vac. Sci. Technol. A 22(2), pp. 309–320 (2004).

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Other Articles

  1. J. Dimeff, J. W. Lane, and G. W. Coon, “New wid-range pressure transducer”, Rev. Sci. Instrum. 33 (8), pp. 804–811 (1962).

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  2. G. C. Baldwin and M. R. Gaerttner, “Thermal transpiration error in absolute pressure measurement with capacitance manometers”, J. Vac. Sci. Technol. 10(1), pp. 215–217 (1973).

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Thermal Conductivity Gauges

  1. B. G. Dickins, “The effect of accommodation on heat conduction through gases”, Proc. R. Soc. London, Ser. A 143, pp. 517–540 (1933).

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  2. J. H. Leck and C. S. Martin, “A Pirani gauge for operation up to a pressure of 10 mm of mercury”, J. Sci. Instrum. 33, May, pp. 181–183 (1956).

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  3. J.-S. Shie, Bruce C. S. Chou, and Y.-M. Chen, “High performance Pirani vacuum gauge”, J. Vac. Sci. Technol. A 13(6), pp. 2972–2979 (1995).

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  4. Vincent S. Smentkowski and John T. Yates, Jr., “Universal calibration of W5%Re vs. W26%Re (type-C) thermocouples in the temperature range 32–2588 K”, J. Vac. Sci. Technol. A 14(1), pp. 260–265 (1996).

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  5. W. J. Alvesteffer, D. C. Jacobs, and D. H. Baker, “Miniaturized thin film thermal vacuum sensor”, J. Vac. Sci. Technol. A 13(6), pp. 2980–2985 (1995).

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  6. O. Paul, O. Brand, R. Lenggenhager, and H. Baltes, “Vacuum gauging with complementary metal-oxide-semiconductor microsensors”, J. Vac. Sci. Technol. A 13(3), pp. 503–508 (1995).

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  7. R. E. Ellefson and A. P. Miiller, “Recommended practice for calibrating vacuum gauges of the thermal conductivity type”, J. Vac. Sci. Technol. A 18(5), pp. 2568–2577 (2000).

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Viscosity Gauges

  1. K. Kokubun, M. Hirata, M. Ono, H. Murakami, and Y. Toda, “Frequency dependence of a qualtz oscillator on gas pressure”, J. Vac. Sci. Technol. A 3(6), pp. 2184–2187 (1985).

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  2. J. K. N. Sharma, P. Mohan, and D. R. Sharma, “Comparison of two primary pressure standards using spinning rotor gauges”, J. Vac. Sci. Technol. A 8(2), pp. 941–947 (1990).

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  3. S.-H. Choi, Sharrill Dittmann, and Charles R. Tilford, “Stabilization techniques for spinning rotor gage residual drag”, J. Vac. Sci. Technol. A 8(6), pp. 4079–4085 (1990).

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  4. A. Chambers, A. D. Chew, and A. P. Troup, “Rotating disk gauge for absolute total pressure measurement in high vacuum”, J. Vac. Sci. Technol. A 10(4), pp. 2655–2660 (1992).

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  5. W. Jitschin, K. Jousten, and D. Wandrey, “Design and evaluation of a primary high-vacuum standard”, J. Vac. Sci. Technol. A 10(5), pp. 3344–3351 (1992).

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  6. S. K. Loyalka, “Theory of the spinning rotor gauge in the slip regime”, J. Vac. Sci. Technol. A 14(5), pp. 2940–2945 (1996).

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  7. P. D. Levine and J. R. Sweda, “A primary standard high vacuum calibration station for industrial applications”, J. Vac. Sci. Technol. A 14(3), pp. 1297–1302 (1996).

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  8. C. Boffito, M. Moraja, and G. Pastore, “Spinning rotor gauge in the range from 10-4 Pa to atmospheric pressure”, J. Vac. Sci. Technol. A 15(4), pp. 2391–2394 (1997).

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  9. K. Jousten, A. R. Filippelli, C. R. Tilford, and F. J. Redgrave, “Comparison of the standards for high and ultrahigh vacuum at three national standards laboratories”, J. Vac. Sci. Technol. A 15(4), pp. 2395–2406 (1997).

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  10. J. Šetina, “Two point calibration scheme for the linearization of the spinning rotor gauge at transition regime pressures”, J. Vac. Sci. Technol. A 17(4), pp. 2086–2092 (1999).

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Ionization Gauges

  1. P. A. Redhead, “Modulated Bayard-Alpert Gauge” Rev. Sci. Instrum. 31 (3), pp. 343–344 (1960).

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  2. J. P. Hobson and P. A. Redhead, “Operation of an inverted-magnetron gauge in the pressure range 10-3–10-12 mmHg”, Can. J. Phys. 36, pp. 271–288 (1958).

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  3. P. A. Redhead, “Magnetron gauge: A cold-cathode vacuum gage”, Can. J. Phys. 37, 1260–1271 (1959).

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  4. N. Yoshimura, H. Oikawa, and O. Mikami, “Measurement of outgassing rates from materials by differential pressure rise method”, Shinku (J. Vac. Soc. Japan) 13 (1), pp. 23–28 (1970) (in Japanese).

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  5. W. Jitschin, “Accuracy of vacuum gauges”, J. Vac. Sci. Technol. A 8(2), pp. 948–956 (1990).

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  6. S. Ruthberg, “Standards and vacuum measurement accuracy”, J. Vac. Sci. Technol. 9(1), pp. 186–195 (1972).

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  7. P. A. Redhead, “Errors in the measurement of pressure with ionization gauges”, 1960 7th National Symposium on Vacuum Technology Transactions (Pergamon Press, 1961), pp.108–111.

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  8. G. Barnes, “Erroneous readings of large magnitude in a Bayard-Alpert ionization gauge and their probable cause”, Rev. Sci. Instrum. 31 (10), pp. 1121–1127 (1960).

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  9. T. E. Hartman, “Ultra-High vacuum use of Bayard-Alpert ionization gauges”, Rev. Sci. Instrum. 34 (3), pp. 281–285 (1963).

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  10. T. E. Hartman, “Anomalous residual currents in the ultrahigh vacuum use of Bayard-Alpert ionization gauges”, Rev. Sci. Instrum. 34 (11), pp. 1190–1195 (1963).

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  11. P. A. Redhead, “The sensitivity of Bayard-Alpert gauges”, J. Vac. Sci. Technol. 6(5), pp. 848–854 (1969).

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  12. G. Comsa, “The behavior of ions in a BAG structure”, J. Vac. Sci. Technol. 8(4), pp. 582–589 (1971).

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  13. G. Comsa, “Ion collection in Bayard-Alpert gauges”, J. Vac. Sci. Technol. 9(1), pp. 117–121 (1972).

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  14. J. R. Young, “Measuring hydrocarbon gas pressure with an ionization gauge”, J. Vac. Sci. Technol. 10(1), pp. 212–214 (1973).

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  15. R. Holanda, “Investigation of the sensitivity of ionization-type vacuum gauges”, J. Vac. Sci. Technol. 10(6), pp. 1133–1139 (1973).

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  16. J. E. Bartmess and R. M. Georgiadis, “Empirical methods for determination of ionization gauge relative sensitivities for different gases”, Vacuum 33 (3), pp. 149–153 (1983).

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  17. C. R. Tilford, “Reliability of high vacuum measurements”, J. Vac. Sci. Technol. A 1(2), pp. 152–162 (1983).

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  18. D. G. Bills, P. C. Arnord, S. L. Dodgen, and C. B. Van Cleve, “New ionization gauge geometries providing stable and reproducible sensitivities”, J. Vac. Sci. Technol. A 2(2), pp. 163–167 (1984).

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  21. N. T. Peacock, “Measurement of x-ray currents in Bayard-Alpert type gauges”, J. Vac. Sci. Technol. A 10(4), pp. 2674–2678 (1992).

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  22. M. Saitoh, K. Shimura, T. Iwata, T. Momose, and H. Ishimaru, “Influence of vacuum gauges on outgassing rate measurements”, J. Vac. Sci. Technol. A 11(5), pp. 2816–2821 (1993).

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  23. P. C. Arnold and S. C. Borichevsky, “Nonstable behavior of widely used ionization gauges”, J. Vac. Sci. Technol. A 12(2), pp. 568–573 (1994).

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  24. P. C. Arnold, D. G. Bills, M. D. Borenstein, and S. C. Borichevsky, “Stable and reproducible Bayard-Alpert ionization gauge”, J. Vac. Sci. Technol. A 12(2), pp. 580–586 (1994).

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  31. P. A. Redhead and J. P. Hobson, “Total pressure measurements below 10-10 Torr with non-magnetic ionization gauges”, Brit. J. Appl. Phys. 16, pp. 1555–1566 (1965).

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  32. A. Van Oostrom, “Modulation of Bayard-Alpert ionization gauges with grid end-caps”, J. Sci. Instrum. 44, pp. 927–930 (1967).

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  33. P. J. Szwemin, “Behavior of the Bayard-Alpert gauge with cage modulator operating without electron current”, J. Vac. Sci. Technol. 9(1), pp. 122–125 (1972).

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  34. L. G. Pittaway, “Modulation of the desorbed ion current in Bayard-Alpert gauges”, J. Vac. Sci. Technol. 10(4), pp. 507–512 (1973).

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  35. A. Barz and P. Kocian, “Extractor gauge as a nude system”, J. Vac. Sci. Technol. 7(1), pp. 200–203 (1970).

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  39. G. A. Beitel and C. M. Gosselin, “Performance of a modified buried collector gauge”, J. Vac. Sci. Technol. 7(6), pp. 580–585 (1970).

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  40. J. H. Leck, “The measurement of total pressure in the range 10-8–10-12 Torr”, Vacuum 20 (9), pp. 369–372 (1970).

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  41. K. Close and J. Yarwood, “The measurement of low gas pressures in terms of ion currents”, Vacuum 20 (2), pp. 56–64 (1970).

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  42. D. Blechschmidt, “An ionization gauge using a channel electron multiplier for pressures below 10-12 Torr”, J. Vac. Sci. Technol. 10(2), pp. 376–380 (1973).

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Residual Gas Analyzens

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    Nagamitsu Yoshimura

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Yoshimura, N. (2008). Vacuum Gauges. In: Vacuum Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74433-7_6

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