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Vacuum Pumps

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References

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Sputter Ion Pump

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Getter Pump

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Other Articles

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Dry Vacuum Pump

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Diffusion Pump

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Turbomolecular Pump

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Cryopump

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Sputter Ion Pump

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    Nagamitsu Yoshimura

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Yoshimura, N. (2008). Vacuum Pumps. In: Vacuum Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74433-7_2

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