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Scanning Probe Anodization for Nanopatterning

  • Chapter
Applied Scanning Probe Methods X

Part of the book series: Nano Science and Technolgy ((NANO))

Abstract

Local oxidation of material surfaces has attracted great attention in the research field of scanning probe microscope (SPM) based nanofabrication since the first demonstrations on nanopatterning of semiconductor surfaces in 1990. This method has become the crucial technology for nanofabrication and nanolithography applicable to patterning of a wide variety of materials, including metals, semiconductors, inorganic compounds and organic materials. The mechanism of the SPM-induced local oxidation is ascribed to electrochemical oxidation, i. e., anodization, in the presence of adsorbed water at the SPM tip–sample junction. Besides oxidation, such scanning probe electrochemistry has been extended to various chemical surface modifications other than oxidation, e. g., nitrization, carbonization and electrochemical reduction. This chapter reviews its historical background, demonstrated applications and technical developments in these nearly two decades.

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Authors and Affiliations

  1. Kyoto University, Sakyo, 606-8501, Kyoto, Japan

    Hiroyuki Sugimura

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  1. Hiroyuki Sugimura
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Editors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), The Ohio State University, 201W. 19th Avenue, 43210-1142, Columbus, Ohio , USA

    Bharat Bhushan

  2. Advanced Institute of Science & Technology, School of Materials Science, 923-1292, Ishikawa, Japan

    Masahiko Tomitori

  3. Institute of Physics, FB 16, University of MĂĽnster, Wilhelm-Klemm-Str. 10, 48149, MĂĽnster, Germany

    Harald Fuchs

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Sugimura, H. (2008). Scanning Probe Anodization for Nanopatterning. In: Bhushan, B., Tomitori, M., Fuchs, H. (eds) Applied Scanning Probe Methods X. Nano Science and Technolgy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74085-8_7

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