Abstract
The paper presents a novel approach to measure the parameters of quasi-parallel plates in a Fizeau interferometer. The beams reflected from the front and rear surfaces lead to a complicated interferogram intensity distribution. The phase shifting techniques (temporal and spatial) are proposed to process the interferograms and obtain a two-beam-like fringe pattern encoding the plate thickness variations. Further pattern processing is conducted using the Vortex transform.
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References
P. de Groot, “Measurement of transparent plates with wavelengthtuned phase-shifting interferometry”, Appl. Opt. 39(16), 2658–2663 (2000).
K. Hibino, B.F. Oreb, P.S. Fairman, and J. Burke, “Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer”, Appl. Opt. 43(6), 1241–1249 (2004).
J. Schwider, “Advanced evaluation techniques in interferometry,” Chap. 4 in Progress in Optics, E. Wolf ed., 28, 271–359, North Holland, Amsterdam, Oxford, New York, Tokyo, 1990.
J.E. Greivenkamp, and J.H. Brunning, “Phase shifting interferometry,” Chap 14 in Optical Shop Testing, D. Malacara ed., 501–598, John Wiley & Sons, Inc., New York, Chichester, Brisbane, Toronto, Singapore, 1992.
K. Creath, “Temporal phase measurement methods,” Chap. 4 in Interferogram Analysis: Digital Fringe Pattern Measurement, D.W. Robinson and G. Reid, eds., 94–140, Institute of Physics Publishing, Bristol, Philadelphia, 1993.
D. Malacara, M. Servin, and Z. Malacara, Interferogram Analysis for Optical Shop Testing, Marcel Dekker, Inc., New York, Basel, Hong Kong, 1998.
K.G. Larkin, D.J. Bone, and M.A. Oldfield, “Natural demodulation of two-dimensional fringe patterns. I. General background of the spiral quadrature transform”, J. Opt. Soc. Am. A, 18(8), 1862–1870 (2001).
K.G. Larkin, “Natural demodulation of two-dimensional fringe patterns. II. Stationary phase analysis of the spiral phase quadrature transform”, J. Opt. Soc. Am. A, 18(8), 1871–1881 (2001).
J. Schwider, R. Burrow, K.E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, “Digital wave-front measuring interferometry: some systematic error sources”, Appl. Opt. 22(21), 3421–3432 (1983).
P. Hariharan, B. Oreb, T. Eiju, “Digital phase-shifting interferometry: a simple error compensating phase calculation algorithm”, Appl. Opt. 26(13), 2504–2505 (1987).
M. Servin, J.A. Quiroga, J.L. Marroquin, “General n-dimensional quadrature transform and its application to interferogram demodulation”, J. Opt. Soc. Am. A, 20(5), 925–934, 2003.
K.G. Larkin, “Efficient nonlinear algorithm for envelope detection in white light interferometry”, J. Opt. Soc. Am. A 13(4), 832–843 (1996).
K. Patorski, A. Styk, “Interferogram intensity modulation calculations using temporal phase shifting: error analysis”, Opt. Eng. 45(8), 085602, (2006).
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Styk, A., Patorski, K. (2007). Fizeau interferometry with automated fringe pattern analysis using temporal and spatial phase shifting. In: Jabłoński, R., Turkowski, M., Szewczyk, R. (eds) Recent Advances in Mechatronics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-73956-2_134
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DOI: https://doi.org/10.1007/978-3-540-73956-2_134
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