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Transparent Conductive Zinc Oxide pp 187–233Cite as

Magnetron Sputtering of ZnO Films

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 104))

Glow discharge sputtering is one of the oldest deposition techniques that utilizes an energy input to promote surface diffusion at the substrate and thus, to achieve dense and well-adhering coatings at low substrate temperatures. The term “sputtering” means the ejection of atoms from a usually solid target material due to the impact of highly energetic species. These highly energetic species are usually positive ions, which can either be accelerated in the cathode sheath of a plasma discharge or in an ion source.

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References

  1. J.S. Chapin, Res. Dev. 25, 37 (1974)

    Google Scholar 

  2. F.S. Hickernell, J. Appl. Phys. 44, 1061 (1973)

    ADS  Google Scholar 

  3. F.S. Hickernell, Rev. Phys. Appl. 20, 319 (1985)

    Google Scholar 

  4. F.C.M. van de Pol, F.R. Blom, T.J.A. Popma, Thin Solid Films 204, 349 (1991)

    ADS  Google Scholar 

  5. H.J. Gläser, Glass Technol. 21, 254 (1980)

    Google Scholar 

  6. R.E. Laird, J.D. Wolfe, SVC Ann. Tech. Conf. Proc. 37, 428 (1994)

    Google Scholar 

  7. M. Arbab, Thin Solid Films 381, 15 (2001)

    ADS  Google Scholar 

  8. Y. Tsuda, H. Omoto, K. Tanaka, H. Ohsaki, Thin Solid Films 502, 223 (2006)

    ADS  Google Scholar 

  9. J. Kawaguchi, E. Kusano, Patent de 3628057a1, 1986

    Google Scholar 

  10. M.J. Brett, R.W. McMahon, J.D. Affinito, R. Parsons, J. Vac. Sci. Technol. A 1, 352 (1983)

    ADS  Google Scholar 

  11. K. Ellmer, F. Kudella, R. Mientus, R. Schieck, S. Fiechter, Thin Solid Films 247,15 (1994)

    ADS  Google Scholar 

  12. R. Menner, R. Schäffler, B. Sprecher, B. Dimmler, in Proceedings of the 2nd World Conference on Photovoltaic Energy Conversion, Vienna, 1998

    Google Scholar 

  13. J. Müller, G. Schöpe, O. Kluth, B. Rech, V. Sittinger, B. Szyszka, R. Geyer, P. Lechner, H. Schade, M. Ruske, G. Dittmar, H.-P. Bochem, Thin Solid Films 442,158 (2003)

    Google Scholar 

  14. R.K. Waits, J. Vac. Sci. Technol. 15, 179 (1978)

    ADS  Google Scholar 

  15. R.K. Waits, J. Vac. Sci. Technol. A 18, 1736 (2000)

    ADS  Google Scholar 

  16. D.M. Mattox, SVC Ann. Tech. Conf. Proc. 47, 23 (2004)

    Google Scholar 

  17. R. Latz, K. Michael, M. Scherer, Jpn. J. Appl. Phys. 30, L149 (1991)

    ADS  Google Scholar 

  18. M. Katayama, Thin Solid Films 341, 140 (1999)

    ADS  Google Scholar 

  19. P. Binkowska, B. Cord, P. Wohlfart, Microsyst. Technol. 13, 139 (2007)

    Google Scholar 

  20. J. Schroeder, B. Cord, W. Maaß, K.H. Schuller, U. Patz, Thin Solid Films 175,287 (1989)

    ADS  Google Scholar 

  21. J.S. Colligon, J. Vac. Sci. Technol. A 13, 1649 (1995)

    ADS  Google Scholar 

  22. D.W. Hess, J. Vac. Sci. Technol. A 8, 1677 (1990)

    ADS  Google Scholar 

  23. N. Kaiser, Appl. Opt. 41, 3053 (2002)

    ADS  Google Scholar 

  24. J.A. Thornton, Surface Eng. 2, 283 (1986)

    Google Scholar 

  25. P.J. Kelly, R.D. Arnell, Vacuum 56, 159 (2000)

    Google Scholar 

  26. R. Herrmann, G. Bräuer, in Thin Films for Optical Coatings, ed. By R.E. Hummel, K.H. Guenter. Handbook of Optical Properties, vol. 1 (CRC, Boca Raton, 1995) pp. 135-187

    Google Scholar 

  27. B. Chapman, Glow Discharge Processes (Wiley, New York, 1980)

    Google Scholar 

  28. Y.P. Raizer, Gas Discharge Physics (Springer, Berlin Heidelberg New York, 1991)

    Google Scholar 

  29. D. Rosen, I. Katardjiev, S. Berg, W. Möller, Nucl. Instrum. Meth. B 228, 193 (2005)

    ADS  Google Scholar 

  30. S.M. Rossnagel, in Handbook of Vacuum Science and Technology, ed. by D. Hoffman, B. Singh, J. Thomas (Academic Press, San Diego, 1998) pp. 609-627

    Google Scholar 

  31. R. Behrisch (ed.), Sputtering by Particle Bombardment I (Springer, Berlin Heidelberg New York, 1981)

    Google Scholar 

  32. R. Behrisch (ed.), Sputtering by Particle Bombardment II (Springer, Berlin Heidelberg New York, 1983)

    Google Scholar 

  33. R.E. Somekh, J. Vac. Sci. Technol. A 2, 1285 (1984)

    ADS  Google Scholar 

  34. T. Takagi, J. Vac. Sci. Technol. A 2, 382 (1984)

    ADS  Google Scholar 

  35. H.J. Gläser (ed.), Large Area Glass Coating (Von Ardenne Anlagentechnik GmbH, Dresden, 2002)

    Google Scholar 

  36. F.M. Penning, U.S. Patent 2,146,025, 1936

    Google Scholar 

  37. F.M. Penning, J.H. Moubis, Proc. K. Ned. Akad. Wet. 43, 203 (1940)

    Google Scholar 

  38. S. Jäger, B. Szyszka, J. Szczyrbowski, G. Bräuer, Surf. Coat. Technol. 98, 1304 (1998)

    Google Scholar 

  39. R. Cebulla, R. Wendt, K. Ellmer, J. Appl. Phys. 83, 1087 (1998)

    ADS  Google Scholar 

  40. G.L. Harding, B. Window, E.C. Horrigan, Sol. Energ. Mater. 22, 69 (1991)

    Google Scholar 

  41. M.J. Brett, R.R. Parsons, Solid State Commun. 54, 603 (1985)

    ADS  Google Scholar 

  42. S. Brehme, F. Fenske, W. Fuhs, E. Nebauer, M. Poschenrieder, B. Selle, I. Sieber, Thin Solid Films 342, 167 (1999)

    ADS  Google Scholar 

  43. T. Wallendorf, S. Marke, C. May, J. Strümpfel, Surf. Coat. Technol. 174-175, 222 (2003)

    Google Scholar 

  44. H. Czternastek, A. Brudnik, M. Jachimowski, E. Kolawa, J. Phys. D Appl. Phys. 25, 865 (1992)

    Google Scholar 

  45. T. Nakada, Y. Ohkubo, A. Kunioka, Jpn. J. Appl. Phys. 30, 3344 (1991)

    ADS  Google Scholar 

  46. T. Minami, K. Oohashi, S. Takata, T. Mouri, N. Ogawa, Thin Solid Films 193-194, 721 (1990)

    ADS  Google Scholar 

  47. M. Miyazaki, K. Sato, A. Mitsui, H. Nishimura, J. Non-Cryst. Solids 218, 323 (1997)

    ADS  Google Scholar 

  48. M. Kon, P.K. Song, A. Mitsui, Y. Shigesato, Jpn. J. Appl. Phys. 41, 6174 (2002)

    ADS  Google Scholar 

  49. T. Minami, T. Yamamoto, T. Miyata, Thin Solid Films 366, 63 (2000)

    ADS  Google Scholar 

  50. N. Malkomes, M. Vergöhl, B. Szyszka, J. Vac. Sci. Technol. A 19, 414 (2001)

    ADS  Google Scholar 

  51. B. Szyszka, Thin Solid Films 351, 164 (1999)

    ADS  Google Scholar 

  52. M. Kon, P.K. Song, Y. Shigesato, P. Frach, S. Ohno, K. Suzuki, Jpn. J. Appl. Phys. 42, 263 (2003)

    ADS  Google Scholar 

  53. Y. Igasaki, M. Ishikawa, G. Shimaoka, Appl. Surf. Sci. 33-34, 926 (1988)

    ADS  Google Scholar 

  54. J.B. Webb, D.F. Williams, M. Buchanan, Appl. Phys. Lett. 39, 640 (1981)

    ADS  Google Scholar 

  55. T. Minami, H. Nanto, S. Takata, Appl. Phys. Lett. 41, 958 (1982)

    ADS  Google Scholar 

  56. K. Ito, T. Nakazawa, Jpn. J. Appl. Phys. 22, 245 (1983)

    ADS  Google Scholar 

  57. Y. Igasaki, H. Saito, J. Appl. Phys. 70, 3613 (1991)

    ADS  Google Scholar 

  58. S. Bose, S. Ray, A.K. Barua, J. Appl. Phys. 29, 1873 (1996)

    Google Scholar 

  59. R. Wang, L.L.H. King, A.W. Sleight, J. Mater. Res. 11, 1659 (1996)

    ADS  Google Scholar 

  60. T. Minami, H. Sato, H. Nanto, S. Takata, Jpn. J. Appl. Phys. 24, L781 (1985)

    ADS  Google Scholar 

  61. K.C. Park, D.Y. Ma, K.H. Kim, Thin Solid Films 305, 201 (1997)

    ADS  Google Scholar 

  62. M.L. Addonizio, A. Antonaia, G. Cantele, C. Privato, Thin Solid Films 349, 93 (1999)

    ADS  Google Scholar 

  63. F.-J. Haug, Z. Geller, H. Zogg, A.N. Tiwari, C. Vignali, J. Vac. Sci. Technol. A 19, 171 (2001)

    ADS  Google Scholar 

  64. B.H. Choi, H.B. Im, J.S. Song, K.H. Yoon, Thin Solid Films 193, 712 (1990)

    ADS  Google Scholar 

  65. Z.C. Jin, I. Hamberg, C.G. Granqvist, Thin Solid Films 164, 381 (1988)

    ADS  Google Scholar 

  66. W.D. Westwood, in Physics of Thin Films, vol. 14, ed. by M.H. Fracombe, J.L. Vossen (Academic Press, New York, 1989) pp. 1-79

    Google Scholar 

  67. S. Schiller, G. Beister, W. Sieber, Thin Solid Films 111, 259 (1984)

    ADS  Google Scholar 

  68. B. Szyszka, Ph.D. thesis, Justus-Liebig-Universität (1999)

    Google Scholar 

  69. C. Nender T. Larsson, H.O. Blomm, S. Berg, J. Vac. Sci. Technol. A 6, 1832 (1988)

    ADS  Google Scholar 

  70. S. Berg, T. Nyberg, Thin Solid Films 476, 215 (2005)

    ADS  Google Scholar 

  71. N. Malkomes, M. Vergöhl, J. Appl. Phys. 89, 732 (2001)

    ADS  Google Scholar 

  72. V. Kirchhoff, T. Kopte, T. Winkler, M. Schulze, P. Wiedemuth, Surf. Coat. Technol. 98, 828 (1998)

    Google Scholar 

  73. H. Kupfer, R. Kleinhempel, F. Richter, C. Peters, U. Krause, T. Kopte, Y. Cheng, J. Vac. Sci. Technol. A 24, 106 (2006)

    Google Scholar 

  74. D.J. Christie, H.V. Walde, T.J. Ash, SVC Ann. Tech. Conf. Proc. 48, 39 (2005)

    Google Scholar 

  75. J. Szczyrbowski, G. Teschner, SVC Ann. Tech. Conf. Proc. 38, 389 (1995)

    Google Scholar 

  76. G. Bräuer, M. Ruske, J. Szczyrbowski, G. Teschner, A. Zmelty, Vacuum 51, 655 (1998)

    Google Scholar 

  77. J. Aranovich, A. Ortiz, R.H. Bube, J. Vac. Sci. Technol. A 16, 994 (1979)

    ADS  Google Scholar 

  78. T. Minami, H. Sato, H. Nanto, S. Takata, Thin Solid Films 176, 277 (1989)

    ADS  Google Scholar 

  79. H. Agura, A. Suzuki, T. Matsushita, T. Aoki, M. Okuda, Thin Solid Films 445,263 (2003)

    ADS  Google Scholar 

  80. F. Ruske, V. Sittinger, W. Werner, B. Szyszka, K. Dietrich, R. Rix, K. U. van Osten, Surf. Coat. Technol. 200, 236 (2005)

    Google Scholar 

  81. C.G. Van de Walle, Phys. Rev. Lett. 85, 1012 (2000)

    ADS  Google Scholar 

  82. S. Maniv, C.J. Miner, W.D. Westwood, J. Vac. Sci. Technol. A 1, 1370 (1983)

    ADS  Google Scholar 

  83. R. Wendt, K. Ellmer, Surf. Coat. Technol. 93, 27 (1997)

    Google Scholar 

  84. N. Malkomes, B. Szyszka, J. Vac. Sci. Technol. A 19, 2368 (2001)

    ADS  Google Scholar 

  85. M. Vergöhl, N. Malkomes, T. Matthée, G. Bräuer, Thin Solid Films 377-378, 43 (2000)

    ADS  Google Scholar 

  86. N. Malkomes, A. Pflug, B. Szyszka, M. Vergöhl, SVC Ann. Tech. Conf. Proc. 45,41 (2002)

    Google Scholar 

  87. W.D. Sproul, D.J. Christie, D.C. Carter, Thin Solid Films 491, 1 (2005)

    ADS  Google Scholar 

  88. C. May, R. Menner, J. Strümpfel, M. Oertel, B. Sprecher, Surf. Coat. Technol. 169-170, 512 (2003)

    Google Scholar 

  89. B. Szyszka, V. Sittinger, X. Jiang, R.J. Hong, W. Werner, A. Pflug, M. Ruske, A. Lopp, Thin Solid Films 442, 179 (2003)

    ADS  Google Scholar 

  90. B. Szyszka, Thin Solid Films, submitted

    Google Scholar 

  91. O. Kubaschewski, C.B. Alcock, Metallurgical Thermochemistry (Pergamon, Oxford, 1979)

    Google Scholar 

  92. N. Tsuji, H. Komiyama, K. Tanaka, Jpn. J. Appl. Phys. 9, 835 (1990)

    ADS  Google Scholar 

  93. M.J. Brett, R.R. Parsons, Can. J. Phys. 63, 819 (1985)

    ADS  Google Scholar 

  94. T. Ohnishi, A. Ohtomo, K. Takahashi, M. Yoshimoto, H. Koinuma, Appl. Phys. Lett. 72, 824 (1998)

    ADS  Google Scholar 

  95. F.S. Hickernell, T. Hickernell, in IEEE Ultrasonics Symposium, 373-376, 1992

    Google Scholar 

  96. E. Jacobsohn, D. Shechtman, Mat. Res. Soc. Symp. Proc. 242, 779 (1992)

    Google Scholar 

  97. K.B. Sundaram, A.I. Khan, Thin Solid Films 295, 87 (1997)

    ADS  Google Scholar 

  98. S. Takada, J. Appl. Phys. 73, 4739 (1993)

    ADS  Google Scholar 

  99. J.G. Gardeniers, Z.M. Rittersma, G.J. Burger, J. Appl. Phys. 83, 7844 (1998)

    ADS  Google Scholar 

  100. M. Kadota, M. Minakata, Jpn. J. Appl. Phys. 37, 2923 (1998)

    ADS  Google Scholar 

  101. T. Inukai, M. Matsuoka, K. Ono, Thin Solid Films 257, 22 (1995)

    ADS  Google Scholar 

  102. V. Craciun, J. Elders, J.G. Gardeniers, I.W. Boyd, Appl. Phys. Lett. 65, 2963 (1994)

    ADS  Google Scholar 

  103. B. Szyszka, T. Höing, X. Jiang, A. Bierhals, N. Malkomes, M. Vergöhl, V. Sittinger, U. Bringmann, G. Bräuer, SVC Ann. Tech. Conf. Proc. 44, 272 (2001)

    Google Scholar 

  104. P.J. Kelly, Y. Zhu, A. Postill, Thin Solid Films 426, 111 (2003)

    ADS  Google Scholar 

  105. K.U. van Osten, (gfe) company information, 2007

    Google Scholar 

  106. J. Müller, G. Schöpe, O. Kluth, B. Rech, M. Ruske, J. Trube, B. Szyszka, X. Jiang, G. Bräuer, Thin Solid Films 392, 327 (2001)

    Google Scholar 

  107. F. Ruske, Ph.D. thesis, Justus-Liebig-Universität (2007)

    Google Scholar 

  108. Y. Qu, T.A. Gessert, K. Ramanathan, R.G. Dhere, R. Noufi, T.J. Coutts, J. Vac. Sci. Technol. A 11, 996 (1993)

    ADS  Google Scholar 

  109. Y. Qu, T.A. Gessert, T.J. Coutts, R. Noufi, J. Vac. Sci. Technol. A 12, 1507 (1994)

    ADS  Google Scholar 

  110. S. Kohiki, M. Nishitani, T. Wada, Jpn. J. Appl. Phys. 33, 6706 (1994)

    ADS  Google Scholar 

  111. J.W. Seong, K.-H. Kim, Y.W. Beag, S.K. Koh, K.H. Yoon, J. Vac. Sci. Technol. A 22, 1139 (2004)

    ADS  Google Scholar 

  112. S.J. Jung, Y.H. Han, B.M. Koo, J.J. Lee, J.H. Joo, Thin Solid Films 475, 275 (2005)

    ADS  Google Scholar 

  113. B. Rech, O. Kluth, T. Repmann, T. Roschek, J. Springer, J. Müller, F. Finger, H. Stiebig, H. Wagner, Sol. Energ. Mater. Sol. Cell. 74, 439 (2002)

    Google Scholar 

  114. H. indischmann, Crit. Rev. Solid State 17, 547 (1992)

    Google Scholar 

  115. T. Minami, H. Sato, H. Imamoto, S. Takata, Jpn. J. Appl. Phys. 31, 257 (1992)

    ADS  Google Scholar 

  116. K. Tominaga, T. Yuasa, M. Kume, O. Tada, Jpn. J. Appl. Phys. 24, 944 (1985)

    ADS  Google Scholar 

  117. R. Mennerm, M. Powalla, in Forschungsverbund Sonnenenergie Tagungsband, 71-78, 2005

    Google Scholar 

  118. D. Severin, O. Kappertz, T. Nyberg, S. Berg, M. Wuttig, Thin Solid Films 515,3554 (2007)

    ADS  Google Scholar 

  119. A. Alam, K. Sasaki, T. Hata, Thin Solid Films 281, 209 (1996)

    ADS  Google Scholar 

  120. A. Pflug, N. Malkomes, V. Sittinger, B. Szyszka, SVC Ann. Tech. Conf. Proc. 45,16 (2002)

    Google Scholar 

  121. F. Ruske, A. Pflug, V. Sittinger, W. Werner, B. Szyszka, Thin Solid Films 502,44 (2006)

    ADS  Google Scholar 

  122. J. Rietzel, S. Nadel, SVC Ann. Tech. Conf. Proc. 47, 224 (2004)

    Google Scholar 

  123. M.W. McBride, SVC Ann. Tech. Conf. Proc. 33, 250 (1990)

    Google Scholar 

  124. A. Ben-Shalom, L. Kaplan, R.L. Boxman, S. Goldsmith, M. Nathan, Thin Solid Films 236, 20 (1993)

    ADS  Google Scholar 

  125. L. Kaplan, A. Ben-Shalom, R.L. Boxman, S. Goldsmith, U. Rosenberg, M. Nathan, Thin Solid Films 253, 1 (1994)

    ADS  Google Scholar 

  126. T. David, S. Goldsmith, R.L. Boxman, Thin Solid Films 447-448, 61 (2004)

    ADS  Google Scholar 

  127. A. Suzuki, T. Matsushita, N. Wada, Y. Sakamoto, M. Okuda, Jpn. J. Appl. Phys. 35, L56 (1996)

    ADS  Google Scholar 

  128. H. Hiramatsu, K. Imaeda, N. Horio, M. Nawata, J. Vac. Sci. Technol. A 16, 669 (1998)

    ADS  Google Scholar 

  129. H. Hosono, H. Ohta, M. Orita, K. Ueda, M. Hirano, Vacuum 66, 419 (2002)

    Google Scholar 

  130. H. Tanaka, K. Ihara, T. Miyata, H. Sato, T. Minami, J. Vac. Sci. Technol. A 22,1757 (2004)

    ADS  Google Scholar 

  131. U. Helmersson, M. Lattemann, J. Bohlmark, A.P. Ehiasarian, J.T. Gudmundsson, Thin Solid Films 513, 1 (2006)

    ADS  Google Scholar 

  132. M. Siemers, A. Pflug, B. Szyszka, SVC Ann. Tech. Conf. Proc. 49, 60 (2006)

    Google Scholar 

  133. F. Ruske, A. Pflug, V. Sittinger, W. Werner, B. Szyszka, D.J. Christie, in Proceedings of the 6th International Conference on Coatings on Glass and Plastics, Dresden, Germany, 2006

    Google Scholar 

  134. M. Birkholz, U. Albers, T. Jung, Surf. Coat. Technol. 179, 279 (2004)

    Google Scholar 

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  1. Fraunhofer Institute for Surface Engineering and Thin Films (IST), Bienroder Weg 54 E, 38108, Braunschweig, Germany

    B. Szyszka

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  1. Abteilung Solare Energetik (SE5), Hahn-Meitner-Institut Berlin GmbH, Glienicker Str. 100, 14109, Berlin, Germany

    Klaus Ellmer

  2. FB11 Materialwissenschaften, Technische Universität Darmstadt, Petersenstr. 23, 64287, Darmstadt, Germany

    Andreas Klein

  3. Abteilung Silizium-Photovltaik, Hahn-Meitner-Institut Berlin GmbH, Kekulestr. 5, 12489, Berlin, Germany

    Bernd Rech

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Szyszka, B. (2008). Magnetron Sputtering of ZnO Films. In: Ellmer, K., Klein, A., Rech, B. (eds) Transparent Conductive Zinc Oxide. Springer Series in Materials Science, vol 104. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-73612-7_5

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