The basics of two-temperature model are discussed for application to thermal transport during electron-beam based micro/nanomachining process. The propagation of electrons in the target material is modeled using the discrete inelastic scattering electron-beam Monte Carlo method, which is coupled with the two-temperature model to determine the electron-phonon interactions with the lattice. A series of results are presented, including the comparisons against the simpler Fourier conduction model.
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© 2008 Springer-Verlag Berlin Heidelberg
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(2008). Two-Temperature Model Coupled with e-Beam Transport. In: Thermal Transport for Applications in Micro/Nanomachining. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-73607-3_6
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DOI: https://doi.org/10.1007/978-3-540-73607-3_6
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-73605-9
Online ISBN: 978-3-540-73607-3
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)