Monte Carlo methods for modeling particle-beam transport and thermal conduction are introduced. Procedures for generating interaction distances, scattering directions, and attenuation rates for particle ensembles are outlined. Two different simulation methods, the continuous slow-down approach and the discrete inelastic scattering method, are presented for particle-beam transport. These models are used in later chapters to simulate the electron-beam propagation inside a workpiece and to determine the electron-energy deposition profiles. Finally, detailed simulation procedures are given for thermal conduction by electrons and phonons including their ballistic behaviors.
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© 2008 Springer-Verlag Berlin Heidelberg
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(2008). Modeling of Transport Equations via MC Methods. In: Thermal Transport for Applications in Micro/Nanomachining. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-73607-3_3
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DOI: https://doi.org/10.1007/978-3-540-73607-3_3
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-73605-9
Online ISBN: 978-3-540-73607-3
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