Abstract
Confocal microscopy is a powerful technique that permits three-dimensional (3D) imaging of thick objects. Recently, however, two new techniques have been introduced, which are rivals for 3D imaging in reflection mode. Coherence probe microscopy (CPM) is used for surface inspection and profiling, particularly in the semiconductor device industry [1–10]. Optical coherence tomography (OCT) is used
for medical diagnostics, particularly in ophthalmology and dermatology [11,12]. These are both types of low coherence interferometry (LCI), in which coherence gating is used for optical sectioning. LCI has many advantages over the conventional (narrow-band source) interferometric techniques, including the ability to reject strongly light that has undergone scattering outside of a small sample volume, thus allowing precise non-invasive optical probing of dense tissue and other turbid media. LCI can be used to investigate deep, narrow structures.
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References
M. Davidson, K. Kaufman, I. Mazor and F. Cohen: P. Soc. Photo–Opt. Inst. 775, 233 (1987)
B. S. Lee and T. C. Strand: Appl. Optics 29, 3784 (1990)
B. L. Danielson and C. Y. Boisrobert: Appl. Optics 30, 2975 (1991)
S. S. C. Chim and G. S. Kino: Opt. Lett. 15, 579 (1990)
S. S. C. Chim and G. S. Kino: Appl. Optics 31, 2550 (1992)
T. Dresel, G. Häusler, and H. Venzke: Appl. Optics 31, 919 (1992)
P. de Groot and L. Deck: Opt. Lett. 18, 1462 (1993)
L. Deck and P. de Groot: Appl. Optics 33, 7334 (1994)
P. Sandoz and G. Tribillon: J. Mod. Optics 40, 1691 (1993)
P. Sandoz: J. Mod. Optics 43, 1545 (1996)
D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M.R. Lee, T. Flotte, K. Gregory, C.A. Puliafito and Fujimoto, J. G.: Science 254, 1178 (1991)
J. Schmitt, A. Knüttel and R. F. Bonner: Appl. Optics 32, 6032 (1993)
S. Chen, A. W. Palmer, K. T. V. Grattan and B. T. Meggitt: Appl. Optics 31, 6003 (1992)
Y. J. Rao, Y. N. Ning and D. A. Jackson: Opt. Lett. 18, 462 (1993)
M. V. Plissi, A. L. Rogers, D. J. Brassington and M. G. F. Wilson: Appl. Optics 34, 4735 (1995)
V. J. Corcoran: J. Appl. Phys. 36, 1819 (1965)
A. E. Siegman: Appl. Optics 5, 1588 (1966)
Y. Fujii, and H. Takimoto: Opt. Commun. 18, 45 (1976)
T. Sawatari: Appl. Optics 12, 2768 (1973)
M. Kempe and W. Rudolf: J. Opt. Soc. Am. A 13, 46 (1996)
P. Hariharan: J. Mod. Optics 4, 2061 (1993)
M. Roy and P. Hariharan: P. Soc. Photo–Opt. Inst. 2544, 64 (1995)
M. V. Berry: J. Mod. Optics 34, 1401 (1987)
J. A. Izatt, M. R. Hee, G. M. Owen, E. A. Swanson, J.G. Fujimoto: Opt. Lett. 19, 590 (1994)
Y. Fujii and Y. Yamazaki: J. Microsc. 158, 145 (1990)
L. Giniunas, R. Juskaitis and S. V. Shatalin: Electron. Lett. 27, 724 (1991)
T. Dabbs and M. Glass: Appl. Optics 31, 705 (1992)
M. Gu, C. J. R. Sheppard and X. Gan: J. Opt. Soc. Am. A 8, 1755 (1991)
M. Gu and C. J. R. Sheppard: J. Mod. Optics 38, 1621 (1991)
R. Gauderon and C. J. R. Sheppard: J. Mod. Optics 45, 529 (1998)
M. D. Sharma and C. J. R. Sheppard: Bioimaging 6, 98 (1998)
M. D. Sharma and C. J. R. Sheppard: J. Mod. Optics 46, 605 (1999)
D. K. Hamilton and C. J. R. Sheppard: Opt. Acta 29, 1573 (1982)
D. K. Hamilton and H. J. Matthews: Optik 71, 31 (1985)
H. J. Matthews, D. K. Hamilton and C. J. R. Sheppard: Appl. Optics 25, 2372 (1986)
M. Gu and C. J. R. Sheppard: Opt. Commun. 100, 79 (1993)
M. Gu and C. J. R. Sheppard: Micron 24, 557 (1993)
H. Zhou, M. Gu and C. J. R. Sheppard: Optik 103, 45 (1996)
J. G. Fujimoto, S. De Silvestri, E. P. Ippen, C. A. Puliafito, et al.: Opt. Lett. 11, 150 (1986)
I. J. Cox and C. J. R. Sheppard: Image and Vision Computing 1, 52 (1983)
P. J. Caber: Appl. Optics 32, 3438 (1993)
K. Larkin: J. Opt. Soc. Am. A 13, 832 (1996)
H. S. Helen, M. P. Kothiyal and R. S. Sirohi: Opt. Commun. 154, 249 (1998)
P. Hariharan, B. F. Oreb and T. Eiju: Appl. Optics 26, 2504 (1987)
D. Gale, M. I. Pether and J. C. Dainty: Appl. Optics 35, 131 (1996)
C. J. R. Sheppard and T. Wilson: P. Roy. Soc. Lond. A 295, 513 (1980)
M. Roy and C. J. R. Sheppard: Optics and Lasers in Engineering 37, 631 (2002)
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(2007). Low-Coherence Interference Microscopy. In: Optical Imaging and Microscopy. Optical Sciences, vol 87. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-69565-3_13
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