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References
K. Deb, “An efficient constraint handling method for genetic algorithms,” Comput. Methods Appl. Mech. Engrg., Vol. 186, pp. 311-338, 2000.
K. Deb, and H. Gupta, “A constraint handling strategy for robust multicriterion optimization,” KanGAL Report No. 2005001, 2005.
K. Deb, and H. Gupta, “Introducing Robustness in Multi-Objective Optimization,” KanGAL Report No. 2004016, 2004.
Z. Fan, K. Seo, R. Rosenberg, J. Hu, E. Goodman, “System-Level Synthesis of MEMS via Genetic Programming and Bond Graphs,” in Proc. 2003 Genetic and Evolutionary Computing Conference, Chicago, Springer, Lecture Notes in Computer Science, July, 2003, pp. 2058-2071.
G. Fedder, “A Vision of Structured CAD for MEMS,” in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 76-80.
G. Fedder, S. V. Iyer and T. Mukherjee, “Automated Optimal Synthesis Of Microresonators,” in Proceedings of 9th International Conference on Solid State Sensors and Actuators (TRANSDUCERS ’97), June 16-19, 1997, Chicago, IL, USA pp, 1109-1112.
G. Fedder and T. Mukherjee, “Physical Design for Surface-Micromachined MEMS,” in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April 1996, pp. 53-60.
H. Greiner, “Robust Optical Coating Design With Evolutionary Strategies,” Applied Optics, Vol. 35, No. 28, pp. 5477-5483, 1996.
Y. S. Hong, J. H. Lee, and S. H. Kim, “A laterally driven symmetric microresonator for gyroscopic applications,” Journal of Micromechanics and Microengineering, vol. 10, pp 452-458, 2000.
K. Hwang, K. Lee, G. Park, B. Lee, Y. Cho, and S. Lee, “Robust Design of a Vibratory Gyroscope With an Unbalanced Inner Torsion Gimbal Using Axiomatic Design,” Journal of Micromechanics and Microengineering, No. 13, pp 8-17, 2003.
Y. Jin and J. Branke, “Evolutionary optimization in uncertain environments - A survey. IEEE Transactions on Evolutionary Computation,” Vol. 9, No. 3, pp. 303-317, 2005
Y. Jin and B. Sendhoff, “Trade-off between Optimality and Robustness: An Evolutionary Multiobjective Approach,” Proceedings of the Second International Conference on Evolutionary Multi-criterion Optimization, C. M. Fonseca et al (Eds.) LNCS 2632, Springer, 2003, pp 237-251.
R. Kamalian, H. Takagi, and A. M. Agogino, “Optimized Design of MEMS by Evolutionary Multi-objective Optimization with Interactive Evolutionary Computation,” in K. Deb et al. (Eds.): GECCO 2004, LNCS 3103, Springer-Verlag Berlin Heidelberg, 2004, pp. 1030-1041.
R. Liu, B. Paden, and K. Turner, “MEMS Resonators That are Robust to Process-Induced Feature Width Variations,” Journal of Microelectromechanical Systems, vol. 11, No. 5, pp. 505-511,October 2002.
L. Ma and E. K. Antonsson, “Automated Mask-Layout and Process Synthesis for MEMS,” in Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems , 2000, pp. 20-23.
T. Mukherjee and G. Fedder, “Structured Design Of Microelectromechanical Systems,” in Proceedings of 34th Design Automation Conference (DAC ’97), Anaheim, CA, USA, June 9-13, 1997, pp. 680-685.
T. Mukherjee, S. Iyer and G. K. Feeder, “Optimization-based synthesis of micro-resonators,” Sensors Actuators, A 70, pp. 118-127, 1998.
A. Ongkodjojo, F. E. H. Tay, “Global Optimization and Design for Microelectromechanical Systems devices based on Simulated Annealing,” Journal of Micromechanics and Microengineering, vol. 12, pp. 878-897, 2002.
P. J. Sedivec, “Robust Optimization: Design in MEMS,” Master Thesis, University of California, Berkeley, 2002
G. Taguchi, “Taguchi on Robust Technology Development: Bringing Quality Engineering Upstream,” ASME Press, New York, 1993.
S. Tsutsui, and A. Ghosh, “Genetic Algorithms with a Robust Solution Searching Scheme,” IEEE Transactions on Evolutionary Computation, Vol. 1, No. 3, pp 201-208, September 1997.
D. Wiesmann, U. Hammel, and T. Back, “Robust Design of Multilayer Optical Coatings by Means of Evolutionary Algorithms,” IEEE Transactions on Evolutionary Computation, Vol. 2, No. 4, pp. 162-16, November 1998.
W. Yeh, S. Mukherjee, and N. C. MacDonald, “Optimal Shape Design of An Electrostatic Comb Drive in MEMS,” J. Microelectromech. Syst. vol. 7, pp. 16-26, 1998.
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Fan, Z., Wang, J., Wen, M., Goodman, E., Rosenberg, R. (2007). An Evolutionary Approach For Robust Layout Synthesis of MEMS. In: Yang, S., Ong, YS., Jin, Y. (eds) Evolutionary Computation in Dynamic and Uncertain Environments. Studies in Computational Intelligence, vol 51. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-49774-5_23
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