Summary
The paper demonstrates a possibility for effective modification of the thin-film material’ chemical composition, structure and physical properties as result of selective removal of atoms by the certain energy ion beam. One of the most promising results of this effect is a production of devices with nanostructured high-density patterned magnetic media.
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References
B.A. Gurovich et al.: Patent US 6,218,278 B1, priority May 1998.
B.A. Gurovich, D.I. Dolgy, E.A. Kuleshova, E.P. Velikhov, E.D. Ol’shansky, A.G. Domantovsky, B.A. Aronzon, E.Z. Meilikhov, Physics Uspekhi 44(1) (2001) 95.
L.D. Landau, E.M. Lifshitz, Mechanics. 3rd edition, Vol.1, Butterworth-Heinemann, 1976.
M.W. Thompson, Defects and Radiation Damage in Metals. Cambridge Press, 1969.
Handbook of Thin Film Technology (Eds. L.I. Maissel, R. Gland), New York: McGraw-Hill, 1970.
K.L. Chopra, M.R. Randlett, R.N. Duff, Appl. Phys. Lett. 9, 402, (1966).
Handbook of Physical Quantities. (Eds. I.S. Grigoriev, E.Z. Meilikhov), Published by CRC Pr, 1996.
P.B. Hirsch, A. Howie, R.B. Nicholson, D.W. Pashley, M.J. Whelan, Electron Microscopy of Thin Crystals, London, Butterworth, 1965.
R. Wiesendanger, H-J. Guntherodt (Eds.) Scanning Tunneling Microscopy II: Further Applications and Related Techniques, Springer Series in Surface Science, 28, Berlin: Springer, 1992.
Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (Eds. D. Briggs, M.P. Seah), New York: Willey, 1983.
Physical Metallurgy, 3rd edition, (Eds. R.W. Cahn and P. Haasen), North-Holland Physics Publishing, 1983.
A.A. Abrikosov, Fundamental of the Theory of Metals, Amsterdam: North-Holland, 1988.
K.L. Chopra, M.R. Randlett, R.N. Duff, Philos. Mag., 16, 261, (1967).
S. Chou and P. Krauss, Microelectronic Engineering 35, 237, (1997).
S. Chou, P. Krauss, W. Zhang, L. Guo and L. Zhuang, J. Vac. Sci. Technol. B 15(6) 2897, (1997).
S. Zankovych, T. Hoffmann, J. Seekamp, J.-U. Brunch and C.M. Sotomayor Torres, Nanotechnology 12 91, (2001).
B. Heidari, I. Maximov and L. Montelius, J. Vac. Sci. Technol. B 18(6), 3557, (2000).
L.J. Heyderman, H. Schift, C. David, B. Ketterer, M. Auf der Maur, J. Gobrecht, Microelectronic Engineering 57–58, 375, (2001).
F. Carcenac, C. Vieu, A. Lebib, Y. Chen, L. Manin-Ferlazzo, H. Launois, Microelectronic Engineering 53, 163, (2000).
B.A. Gurovich, D.I. Dolgy, E.A. Kuleshova, E.Z. Meilikhov, A.G. Domantovsky, K.E. Prikhodko, K.I. Maslakov, B.A. Aronzon, V.V. Rylkov, A. Yu. Yakubovsky, Selective Removal of Atoms as a New Method for Fabrication of Nanoscale Patterned Media. Microelectronic Engineering, 69, N 2–4, pp. 65–75, (2003)
Gurovich B.A., Kuleshova E.A., Meilikhov E.Z., Maslakov K.I. Selective removal of atoms as a new method for manufacturing of nanostructures for various applications. Journal of Magnetism and Magnetic Materials 2004, 272–276, pp. 1629–1630, (2004).
Gurovich B.A., Kuleshova E.A., Dolgy D.I. et all. Selective removal of atoms as a new method for fabrication of single-domain patterned magnetic media and multi-layered nanostructures. B. Aktas et al. (eds.), Nanostructured Magnetic Materials and their Applications. Kluwer Academic Publishers, pp. 13–22, (2004).
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Gurovich, B. et al. (2007). Selective Removal of Atoms as Basis for Ultra-High Density Nano-Patterned Magnetic and Other Media. In: Aktaş, B., Mikailov, F., Tagirov, L. (eds) Magnetic Nanostructures. Springer Series in Materials Science, vol 94. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-49336-5_5
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DOI: https://doi.org/10.1007/978-3-540-49336-5_5
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-49334-1
Online ISBN: 978-3-540-49336-5
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