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Quantitative Electron Energy-Loss Spectroscopy

  • Chapter
Energy-Filtering Transmission Electron Microscopy

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 71))

Abstract

Electron energy-loss spectroscopy in the transmission electron microscope provides the interpretative foundation for energy-filtered TEM imaging. Typically, we record the energy-dependence of intensity from a known area of a specimen, defined by the incident beam or by an image-plane (area-selecting) aperture. Recently it has also become feasible to record and process a complete energy-loss spectrum for each point in an image, although the information generated (a so-called spectrum-image) requires massive amounts of data storage [5.1,2]. Recording the entire spectrum (or large parts of it) is necessary for some types of spectrum processing, such as Fourier-log deconvolution, which removes the effects of plural scattering. In this chapter, we concentrate on quantitative aspects of EELS and on the instrumentation used in spectroscopy.

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Authors
  1. Ray F. Egerton
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  2. Richard D. Leapman
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Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Wilhelm-Klemm-Straße 10, D-48149, Münster, Germany

    Ludwig Reimer

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© 1995 Springer-Verlag Berlin Heidelberg

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Egerton, R.F., Leapman, R.D. (1995). Quantitative Electron Energy-Loss Spectroscopy. In: Reimer, L. (eds) Energy-Filtering Transmission Electron Microscopy. Springer Series in Optical Sciences, vol 71. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48995-5_5

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  • DOI: https://doi.org/10.1007/978-3-540-48995-5_5

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-14055-0

  • Online ISBN: 978-3-540-48995-5

  • eBook Packages: Springer Book Archive

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