Abstract
Inelastic scattering always occurs when charged particles interact with the atoms of an object. Since the inelastic process is delocalized the image formed by the inelastically scattered electrons does not contain much information about the atomic structure of the specimen. Nevertheless, the inelastically scattered electrons do carry information about its elemental composition on a nanometre scale.
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Rose, H., Krahl, D. (1995). Electron Optics of Imaging Energy Filters. In: Reimer, L. (eds) Energy-Filtering Transmission Electron Microscopy. Springer Series in Optical Sciences, vol 71. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48995-5_2
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DOI: https://doi.org/10.1007/978-3-540-48995-5_2
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