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Multiple-Wavelength Interferometry for Absolute Distance Measurement

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International Trends in Optics and Photonics

Part of the book series: Springer Series in OPTICAL SCIENCES ((SSOS,volume 74))

Summary

Multiple-wavelength interferometry enables an increase in the range of nonambiguity and a reduction in the sensitivity of classical interferometry. It can also be operated on rough surfaces. The accuracy depends on the stability and the calibration of the different wavelengths. An electronically calibrated three-wavelength source for synthetic wavelengths in the millimeter range with an accuracy better than 10−5 was demonstrated. Absolute distance measurements were performed up to 200 mm with a resolution better than 10 μm. Distance measurements to non-cooperative targets, using a custom designed lock-in CCD and appropriate signal processing, was also demonstrated.

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Authors
  1. R. Dändliker
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  2. Y. Salvadé
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Editors and Affiliations

  1. Faculty of Engineering, Hokkei-Gakuen University, 1-1 Minami-26, Nishi 11, Chuo-ku, 064-0926, Sapporo, Hokkaido, Japan

    Toshimitsu Asakura

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© 1999 Springer-Verlag Berlin Heidelberg

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Dändliker, R., Salvadé, Y. (1999). Multiple-Wavelength Interferometry for Absolute Distance Measurement. In: Asakura, T. (eds) International Trends in Optics and Photonics. Springer Series in OPTICAL SCIENCES, vol 74. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48886-6_19

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  • DOI: https://doi.org/10.1007/978-3-540-48886-6_19

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-14212-7

  • Online ISBN: 978-3-540-48886-6

  • eBook Packages: Springer Book Archive

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