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Aperture-modulated Diffusers (AMDs)

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Book cover International Trends in Optics and Photonics

Part of the book series: Springer Series in OPTICAL SCIENCES ((SSOS,volume 74))

Summary

In this chapter we discuss the design of optical diffusers for the generation of flat-top intensity distributions, as required for 248 nm or 193 nm excimerlaser applications [4,5]. We investigate the generation of far-field distributions with various shapes, uniform intensity and high efficiency.

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References

  1. Schmitz, E.-H. (1981) Handbuch zur Geschichte der Optik, Bd. 1: von der Antike bis Newton. Verlag J.P. Wayenborgh, Bonn

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  2. Herzig, H.P. (Ed.) (1997) Micro-Optics: Elements, Systems, and Applications. Taylor Francis, London

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  3. Turunen, J., Wyrowski, F. (Eds.) (1997) Diffractive Optics for Industrial and Commercial Applications. Akademie Verlag, Berlin

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  4. Singer, W., Herzig, H.P., Kuittinen, M., Piper, E., Wangler, J. (1996) Diffractive Beamshaping Elements at the Fabrication Limit. Opt. Eng. 35: 2779–2787

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  5. Ogawa, T., Uematsu, M., Uesawa, F., Kimura, M., Shimizu, H., Oda, T. (1995) Sub-quarter Micron Optical Lithography with Practical Super Resolution Technique. Proc. SPIE 2440: 772–783

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  6. Goodman, J.W. (1996) Introduction to Fourier Optics. McGraw-Hill, New York

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  7. Ricks, D.W. (1993) Scattering from Diffractive Optics. In: Lee, S.H. (Ed.) Diffractive and Miniaturized Optics. Critical Reviews of Optical Science and Technology, Vol. CR49, pp. 187–211

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Authors
  1. H. P. Herzig
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  2. P. Kipfer
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Editor information

Editors and Affiliations

  1. Faculty of Engineering, Hokkei-Gakuen University, 1-1 Minami-26, Nishi 11, Chuo-ku, 064-0926, Sapporo, Hokkaido, Japan

    Toshimitsu Asakura

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© 1999 Springer-Verlag Berlin Heidelberg

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Herzig, H.P., Kipfer, P. (1999). Aperture-modulated Diffusers (AMDs). In: Asakura, T. (eds) International Trends in Optics and Photonics. Springer Series in OPTICAL SCIENCES, vol 74. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48886-6_16

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  • DOI: https://doi.org/10.1007/978-3-540-48886-6_16

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-14212-7

  • Online ISBN: 978-3-540-48886-6

  • eBook Packages: Springer Book Archive

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