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Studies of Vibrational Relaxation of Silane and Its Fluorine Derivatives by a Time Resolved Photoacoustic Technique

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Photoacoustic and Photothermal Phenomena

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 58))

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Abstract

Chemical kinetics and energy transfer processes in silane and its fluorine derivatives are interesting because of their importance in practical applications such as CVD processes. However, little is known thus far about the elementary chemical/energy transfer processes of these molecules, in contrast to the case of methane and its fluorine derivatives.

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Author information

Authors and Affiliations

  1. Department of Reaction Chemistry, The University of Tokyo, Hongo, Bunkyo-ku, Tokyo 113, Japan

    M. Koshi, M. Yoshimura, K. Koseki & H. Matsui

Authors
  1. M. Koshi
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  2. M. Yoshimura
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  3. K. Koseki
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  4. H. Matsui
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Editor information

Editors and Affiliations

  1. Institute of Physical Chemistry, University of Heidelberg, Im Neuenheimer Feld 253, D-6900, Heidelberg, Fed. Rep. of Germany

    Peter Hess

  2. Institute of Experimental Physics, Ruhr University, Universitätsstr. 150, D-4630, Bochum, Fed. Rep. of Germany

    Josef Pelzl

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© 1988 Springer-Verlag Berlin Heidelberg

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Koshi, M., Yoshimura, M., Koseki, K., Matsui, H. (1988). Studies of Vibrational Relaxation of Silane and Its Fluorine Derivatives by a Time Resolved Photoacoustic Technique. In: Hess, P., Pelzl, J. (eds) Photoacoustic and Photothermal Phenomena. Springer Series in Optical Sciences, vol 58. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-48181-2_22

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  • DOI: https://doi.org/10.1007/978-3-540-48181-2_22

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-13705-5

  • Online ISBN: 978-3-540-48181-2

  • eBook Packages: Springer Book Archive

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