The Electron Optics of the Ideal Cylindrical Field with Space Charge

  • Harald Ibach
Part of the Springer Series in Optical Sciences book series (SSOS, volume 63)


The monochromatic current is limited by the increasing electron-electron repulsive forces in high density beams. A simple analytical model for the effect of the “space charge” on the electron optical properties of cylindrical deflectors is presented. First-order compensation of the space charge effect is obtained by enlarging the deflection angle and by applying an additional negative bias to the top and bottom shields terminating the cylindrical deflectors. In spherical deflectors the azimuthal and radial foci are displaced from each other for high current loads.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1991

Authors and Affiliations

  • Harald Ibach
    • 1
  1. 1.Institut für Grenzflächenforschung und VakuumphysikKernforschungsanlage Jülich GmbHJülichFed. Rep. of Germany

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