Abstract
We have developed a high resolution modulated reflectance imaging system to detect nonvisible and subsurface silicon and metal defects in IC devices.
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References
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© 1990 Springer-Verlag Berlin Heidelberg
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Smith, W.L., Welles, C.G., Rosencwaig, A. (1990). Subsurface Defect Inspection in IC Devices with Thermal Wave Imaging. In: Murphy, J.C., Spicer, J.W.M., Aamodt, L.C., Royce, B.S.H. (eds) Photoacoustic and Photothermal Phenomena II. Springer Series in Optical Sciences, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46972-8_35
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DOI: https://doi.org/10.1007/978-3-540-46972-8_35
Publisher Name: Springer, Berlin, Heidelberg
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