X-Ray Projection Microscopy and Microtomography in a Scanning Electron Microscope

Abstract

Based on simple modifications of a scanning electron microscope, the principle and performance of a new prototype of X-ray projection microscope and microtomograph are presented. The lateral resolution is ≃ 2.3 µm for images recorded in less than one second and the specimen thickness is in the millimeter range. Simply only moving the target holder, it is possible to obtain different images of the same specimen using different characteristic radiations. The specimen can be put inside a glass capillary in which a gaseous or liquid environment has been established. All the possibilities of the initial SEM + EDX attachment are maintained in order to combine conventional electron probe microanalysis and x-ray microscopy. Some selected examples illustrate the above possibilities.