Abstract
A VUV-SXR spherical grating monochromator beam line 4B9B has been completed and is now operating with the Beijing Electron-Positron Collider (BEPC) in a 1.55 GeV colliding beam mode and 2.2 GeV SR dedicated mode. Beam line 4B9B, which covers a wide spectral range (approximately 10–1000 eV) provides a focused monochromatic beam to a UHV photoemission experimental station and also to a differentially pumped low vacuum branch located downstream of the photoemission station, for X-ray microscopy and other soft X-ray applications. A scanning soft X-ray microscope stage has been designed and partly tested. The scanning system, which includes stepping motor driven precise linear actuators, piezoelectric drivers, encoders using a laser interferometer and capacitance technology are described in this paper.
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© 1992 Springer-Verlag Berlin Heidelberg
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Shu, D. et al. (1992). The X-Ray Scanning Microscope Beam Branch Line and Its Scanning System Design at BEPC. In: Michette, A.G., Morrison, G.R., Buckley, C.J. (eds) X-Ray Microscopy III. Springer Series in Optical Sciences, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46887-5_35
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DOI: https://doi.org/10.1007/978-3-540-46887-5_35
Publisher Name: Springer, Berlin, Heidelberg
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