Abstract
An imaging X-ray microscope was assembled with two zone plates at UVSOR. For both the condenser zone plate (CZP) and the objective zone plate (MZP), the same sized zone plates were used: diameter — 0.5 mm; outermost zone width — 0.5 μm; central mask — 95 μm; number of zones, n — 250; supported with 0.3 μm polyimide film. With these zone plates, a mesh (Cu #1000) and a zone plate were observed. The spatial resolution was estimated as 1.5 μm.
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© 1992 Springer-Verlag Berlin Heidelberg
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Watanabe, N. et al. (1992). Soft X-Ray Microscopy with Zone Plates at UVSOR. In: Michette, A.G., Morrison, G.R., Buckley, C.J. (eds) X-Ray Microscopy III. Springer Series in Optical Sciences, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46887-5_33
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DOI: https://doi.org/10.1007/978-3-540-46887-5_33
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-13894-6
Online ISBN: 978-3-540-46887-5
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