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Fabrication of Multilayer Mirror Zone Plates and Gratings for Use with Soft X-Rays

  • Conference paper
X-Ray Microscopy III

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 67))

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Abstract

Multilayer mirror gratings and Fresnel zone plates were produced using a multistep process utilizing microfabrication techniques. The gratings were generated by holography and the zone plates by electron beam lithography on Mo/C multilayer mirrors. The pattern transfer was performed by reactive ion etching in a fluorinated plasma after an intermediate lift-off step. Gratings with pitches down to 0.24 µm as well as linear, circular (with 0.3 µm outer zone), and elliptical Fresnel zone plates (with 0.8µm outer zones) were produced.

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References

  1. H. Berrouane„ J-M. André, R. Barchewitz, C. Khan Malek, R. Rivoira, Optics Comm. 76, 2, 111 (1990).

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Author information

Authors and Affiliations

  1. L2M-CNRS, 196 Avenue Henri Ravera, F-92220, Bagneux, France

    C. Khan Malek, Ph. Guérin & F. R. Ladan

  2. CNET, 196 Avenue Henri Rayera, F-92220, Bagneux, France

    T. Moreno, A. Gloukhian & S. Fouchet

  3. Laboratoire de Chimie-Physique, U.A. no. 176, 11 rue Pierre et Marie Curie, F-75231, Paris, France

    H. Berrouane, J. M. Andre & R. Barchewitz

  4. Laboratoire de Physique des Intéractions Photons-Matière, Université d’Aix-Marseille III, Av. Escadrille Normandie-Niemen, F-13397, Marseille Cedex, France

    R. Rivoira

Authors
  1. C. Khan Malek
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  2. T. Moreno
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  3. H. Berrouane
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  4. J. M. Andre
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  5. Ph. Guérin
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  6. F. R. Ladan
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  7. A. Gloukhian
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  8. S. Fouchet
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  9. R. Rivoira
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  10. R. Barchewitz
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Editor information

Editors and Affiliations

  1. Physics Department, King’s College London, The Strand, WC2R 2LS, London, UK

    Alan G. Michette Ph. D. , Graeme R. Morrison Ph. D.  & Chistopher J. Buckley Ph. D. ,  & 

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© 1992 Springer-Verlag Berlin Heidelberg

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Malek, C.K. et al. (1992). Fabrication of Multilayer Mirror Zone Plates and Gratings for Use with Soft X-Rays. In: Michette, A.G., Morrison, G.R., Buckley, C.J. (eds) X-Ray Microscopy III. Springer Series in Optical Sciences, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46887-5_25

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  • DOI: https://doi.org/10.1007/978-3-540-46887-5_25

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-13894-6

  • Online ISBN: 978-3-540-46887-5

  • eBook Packages: Springer Book Archive

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