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References
Biersack, J.P.: Calculation of projected ranges in analytical solutions and a simple general algorithm. Nucl. Instrum. Meth. 182/183, 199 (1981)
Eckstein, W.: Computer Simulation of Ion-Solid Interactions. Springer, Berlin Heidelberg New York (1991)
Kido, Y., Kawamoto, J.: Universal expressions of projected range and damage distributions. Appl. Phys. Lett. 48, 257 (1986)
Lindhard, J., Scharff, M., Schiott, H.E.: Range concepts and heavy-ion ranges (notes on atomic collisions II). Mat. Fys. Medd. Dan. Vidensk. Selsk. 33(14), 3 (1963).
Mayer, J.W., Eriksson, L., Davies, J.A.: Ion Implantation in Semiconductors. Academic, New York (1970)
Winterbon, K.B., Sigmund, P., Sanders, J.B.: Spatial distribution of energy deposited by atomic particles in elastic collisions. Mat. Fys. Medd. Dan. Vidensk. Selsk. 37(14), 5. (1970)
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Suggested Reading
Nastasi, M., Mayer, J.W., Hirvonen, J.K.: Ion-Solid Interactions: Fundamentals and Applications. Cambridge University Press, Cambridge (1996)
Simonton, R., Tasch, A.F.: Channeling effects in ion implantation. In: Ziegler, J.F. (ed.) Handbook of Ion Implantation Technology, p. 119. North-Holland, New York (1992)
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(2006). Ion Range and Range Distribution. In: Ion Implantation and Synthesis of Materials. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-45298-0_6
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DOI: https://doi.org/10.1007/978-3-540-45298-0_6
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