Abstract
After the invention of atomic force microscopy (AFM), micromachining tech-nology was soon introduced into the fabrication of AFM probes [1]. Well-defined probes with sharp tips, soft spring, and high resonant frequency were produced in a batch process for commercialization. In addition, using Si mi-cromachining which is compatible with Si integrated circuits, electronic func-tions for sensing and regulating the force acting on the tip have been installed in the micromachined AFM probe [2].
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Ono, T., Esashi, M., Yamada, H., Sugawara, Y., Takahara, J., Hane, K. (2002). Integrated and Functional Probes. In: Kawata, S., Ohtsu, M., Irie, M. (eds) Nano-Optics. Springer Series in Optical Sciences, vol 84. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-45273-7_5
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DOI: https://doi.org/10.1007/978-3-540-45273-7_5
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