Abstract
A sub-nanometer resolution scanning nonlinear dielectric microscopy (SNDM) was developed for the observation of ferroelectric polarization. We also demonstrate that the resolution of the SNDM is higher than that of conventional piezo-response imaging. Next, we report a new SNDM technique detecting the higher nonlinear dielectric constants \(\varepsilon_{3333}\) and \(\varepsilon_{33333}\). It is expected that higher-order nonlinear dielectric imaging will provide higher lateral and depth resolution. Finally, a new type of scanning nonlinear dielectric microscope probe, called the \(\varepsilon_{311}\)-type probe, and a system to measure the ferroelectric polarization component parallel to the surface are developed.
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Cho, Y. Characterization by Scanning Nonlinear Dielectric Microscopy. In: Ishiwara, H., Okuyama, M., Arimoto, Y. (eds) Ferroelectric Random Access Memories. Topics in Applied Physics, vol 93. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-45163-1_9
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DOI: https://doi.org/10.1007/978-3-540-45163-1_9
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Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-40718-8
Online ISBN: 978-3-540-45163-1
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