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Magneto-Optic Ellipsometry

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Infrared Ellipsometry on Semiconductor Layer Structures

Part of the book series: Springer Tracts in Modern Physics ((STMP,volume 209))

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Abstract

The free-charge-carrier properties effective mass m, mobility μ, and carrier concentration N are of fundamental importance for understanding basic material properties of semiconductors. N, m, and μ intriguingly combine concepts of classical (such as the effective “inertial” carrier mass) and quantum physics (e.g., the electron energy-momentum dispersion and the electron band occupation). A long term goal has been the accurate and simultaneous measurement of N, m, and μ by non-contact optical means in materials, which are part of complex layered systems, such as semiconductor heterostructures. The effective mass concept addressed here descends from the similarity with the acceleration of a body with mass m and the acceleration experienced by a free electron (or hole) due to an external force. In general, the thereby obtained effective mass is a tensor and depends on the inverse curvature of the electron energetic states versus electron-momentum dispersion (m) ij ≈(d2E/dkidkj-1[1].

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Schubert, M. Magneto-Optic Ellipsometry. In: Infrared Ellipsometry on Semiconductor Layer Structures. Springer Tracts in Modern Physics, vol 209. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-44701-6_8

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  • DOI: https://doi.org/10.1007/978-3-540-44701-6_8

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-23249-0

  • Online ISBN: 978-3-540-44701-6

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