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Chemical Sputtering

  • Chapter
Sputtering by Particle Bombardment

Part of the book series: Topics in Applied Physics ((TAP,volume 110))

Abstract

If a target is bombarded with chemically reactive species, chemical effects have to be taken into account. Two converse effects can occur. Chemical reactions between target and projectile atoms may form species which are more loosely bound to the surface and more easily sputtered. This causes an increase of the sputtering yield. This process is usually subsumed under the expression chemical sputtering. Otherwise, newly formed compounds may posses an enhanced bond strength to the target atoms and, consequently, a higher surface binding energy. This causes a decrease of the sputtering yield compared with the original target. In this chapter the emphasis is put on sputtering of carbon with hydrogen ions because it is the best studied system. The process of chemical sputtering is defined. The experimental methods to measure it and the available experimental data are discussed. Model conceptions of the basic, microscopic mechanisms developed for chemical sputtering of carbon by hydrogen are reviewed. Finally, several additional species that cause chemical sputtering of carbon materials are presented.

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References

  • V. Kohlschütter: Jahrb. Radioakt. 9, 355 (1912)

    Google Scholar 

  • A. Güntherschulze: Z. Phys. 36, 563 (1926)

    Google Scholar 

  • W. Hauffe: in R. Behrisch, K. Wittmaack (Eds.): Sputtering by Particle Bombardment III, Top. Appl. Phys. 64 (Springer, Berlin, Heidelberg 1991) russ. translation: (MIR, Moscow 1998)

    Google Scholar 

  • J. W. Coburn, H. F. Winters: J. Vac. Sci. Technol. 16, 391 (1979)

    CAS  Google Scholar 

  • H. F. Winters, J. W. Coburn: Appl. Phys. Lett. 34, 70 (1979)

    CAS  Google Scholar 

  • J. Winter: J. Nucl. Mater. 161, 265 (1989)

    CAS  Google Scholar 

  • J. Roth, J. Bohdansky, W. Poschenrieder, M. K. Sinha: J. Nucl. Mater. 63, 222 (1976)

    CAS  Google Scholar 

  • S. K. Erents, C. M. Braganza, G. M. McCracken: J. Nucl. Mater. 63, 399 (1976)

    CAS  Google Scholar 

  • N. P. Busharov, E. A. Gorbatov, V. M. Gusev, M. I. Guseva, Y. V. Martynenko: J. Nucl. Mater. 63, 230 (1976)

    CAS  Google Scholar 

  • M. Balooch, D. R. Olander: J. Chem. Phys. 63, 4772 (1975)

    CAS  Google Scholar 

  • L. Zielinski, G. C. Schwartz: in , Electrochem. Soc. Abstracts 75 (1975) p. 117

    Google Scholar 

  • M. Armacost, P. D. Hoh, R. Wise, W. Yan, J. J. Brown, J. H. Keller, G. A. Kaplita, S. D. Halle, K. P. Muller, M. D. Naeem, S. Srinivasan, H. Y. Ng, M. Gutsche, A. Gutmann, B. Spuler: IBM J. Res. Dev. 43, 39 (1999)

    CAS  Google Scholar 

  • J. P. Chang, J. W. Coburn: J. Vac. Sci. Technol. 21, 145 (2003)

    Google Scholar 

  • T. A. Burtseva, O. K. Chugunov, E. F. Dovguchits, V. L. Komarov, I. V. Mazul, A. A. Mitrofansky, M. I. Persin, Y. G. Prokofiev, V. A. Sokolov, E. I. Trofimchuk, L. P. Zav'jalsky: J. Nucl. Mater. 191–194, 309 (1992)

    Google Scholar 

  • C. García-Rosales, W. Eckstein, J. Roth: J. Nucl. Mater. 218, 8 (1994)

    Google Scholar 

  • E. Vietzke, A. A. Haasz: in W. O. Hofer, J. Roth (Eds.): Physical Processes of the Interaction of Fusion Plasmas with Solids (Academic, New York 1996) p. 135

    Google Scholar 

  • C. García-Rosales, M. Balden: J. Nucl. Mater. 290–291, 173 (2001)

    Google Scholar 

  • E. {de Juan Pardo}, M. Balden, B. Cieciwa, C. García-Rosales, J. Roth: Phys. Scripta T111, 62 (2005)

    Google Scholar 

  • M. Balden, C. Adelhelm, E. de Juan Pardo, J. Roth: J. Nucl. Mater. 363–365, 1173 (2007)

    Google Scholar 

  • P. Sigmund, A. Gras-Marti: Nucl. Instrum. Meth. 168, 389 (1980)

    CAS  Google Scholar 

  • A. Gras-Marti, P. Sigmund: in P. Varga, G. Betz, E. P. Viehböck (Eds.): Proc. Symp. on Sputtering (SOS) (Techn. Univ. Wien, Vienna 1980) p. 512

    Google Scholar 

  • U. Littmark, W. O. Hofer: Nucl. Instrum. Meth. 168, 329 (1980)

    CAS  Google Scholar 

  • K. Schmid, J. Roth, W. Eckstein: J. Nucl. Mater. 290–293, 148 (2001)

    Google Scholar 

  • K. Schmid, J. Roth: J. Nucl. Mater. 302, 96 (2002)

    CAS  Google Scholar 

  • O. Almén, G. Bruce: Nucl. Instrum. Meth. 11, 279 (1961)

    Google Scholar 

  • R. A. Zuhr, J. Roth, W. Eckstein, von Toussaint, U., J. Luthin: J. Nucl. Mater. 290–293, 162 (2001)

    Google Scholar 

  • K. Schmid, J. Roth: Surf. Coat. Technol. 158, 81 (2002)

    Google Scholar 

  • K. Schmid, J. Roth: J. Nucl. Mater. 313–316, 302 (2003)

    Google Scholar 

  • C. Linsmeier, J. Roth, K. Schmid: Atomic and Plasma-Material Interaction Data for Fusion 12, 79 (2003)

    Google Scholar 

  • K. Schmid, M. Baldwin, R. Doerner: J. Nucl. Mater. 337–339, 862 (2005)

    Google Scholar 

  • M. J. Baldwin, R. P. Doerner, D. Nishijima, K. Schmid, D. G. Whyte, J. G. Kulpin, G. Wright: J. Nucl. Mater. 358, 96 (2006)

    CAS  Google Scholar 

  • W. D. Sproul, D. J. Christie, D. C. Carter: Thin Solid Films 491, 1 (2005)

    CAS  Google Scholar 

  • D. M. Manos, D. L. Flamm (Eds.): Plasma Etching: An Introduction (Academic, San Diego 1989)

    Google Scholar 

  • O. Auciello, D. E. Ibbotson, D. L. Flamm: Nucl. Instrum. Meth. B 23, 419 (1987)

    Google Scholar 

  • H. F. Winters, J. W. Coburn: Surf. Sci. Rep. 14, 161 (1992)

    CAS  Google Scholar 

  • J. Roth: in R. Behrisch (Ed.): Sputtering by Particle Bombardment II, Top. Appl. Phys. 52 (Springer, Berlin, Heidelberg 1981) p. 91, russ. translation: (MIR, Moscow 1986)

    Google Scholar 

  • J. W. Davis, A. A. Haasz: Appl. Phys. Lett. 57, 1976 (1990)

    CAS  Google Scholar 

  • W. Jacob: Thin Solid Films 326, 1 (1998)

    CAS  Google Scholar 

  • J. W. Coburn, H. F. Winters: J. Appl. Phys. 50, 3189 (1979)

    CAS  Google Scholar 

  • E. P. Vaulin, N. E. Georgieva, T. P. Martynenko, L. V. Feoktistov: Sov. J. Plasma Phys. 7, 23 (1981)

    Google Scholar 

  • R. P. Doerner, S. I. Krasheninnikov, K. Schmid: J. Appl. Phys. 95, 4471 (2004)

    CAS  Google Scholar 

  • K. Schmid, M. Baldwin, R. Doerner: J. Nucl. Mater. 348, 294 (2006)

    CAS  Google Scholar 

  • J. Roth: J. Nucl. Mater. 103, 291 (1982)

    Google Scholar 

  • J. Roth, J. Bohdansky, K. L. Wilson: J. Nucl. Mater. 111–112, 775 (1982)

    Google Scholar 

  • V. Philipps, K. Flaskamp, E. Vietzke: J. Nucl. Mater. 111–112, 781 (1982)

    Google Scholar 

  • J. Roth, W. Möller: Nucl. Instrum. Meth. B 7–8, 788 (1985)

    Google Scholar 

  • E. Vietzke: J. Nucl. Mater. 290–293, 158 (2001)

    Google Scholar 

  • E. Salonen, K. Nordlund, J. Keinonen, C. Wu: Europhys. Lett. 52, 504 (2000)

    CAS  Google Scholar 

  • E. Salonen, K. Nordlund, J. Keinonen, C. Wu: Phys. Rev. B 63, 195415 (2001)

    Google Scholar 

  • E. Salonen, K. Nordlund, J. Keinonen, C. Wu: J. Nucl. Mater. 290–293, 144 (2001)

    Google Scholar 

  • K. Nordlund, E. Salonen, J. Keinonen, C. Wu: Nucl. Instrum. Meth. B 180, 77 (2001)

    CAS  Google Scholar 

  • A. Krasheninnikov, E. Salonen, K. Nordlund, J. Keinonen, C. Wu: Contrib. Plasma Phys. 42, 451 (2002)

    CAS  Google Scholar 

  • A. Krasheninnikov, K. Nordlund, E. Salonen, J. Keinonen, C. Wu: Computational Mater. Sci. 25, 427 (2002)

    CAS  Google Scholar 

  • K. Nordlund: Nucl. Instrum. Meth. B 218, 9 (2004)

    CAS  Google Scholar 

  • J. Roth, J. Bohdansky, A. P. Martinelli: Radiat. Eff. Def. Sol. 48, 213 (1980)

    CAS  Google Scholar 

  • E. Hechtl, J. Bohdansky, J. Roth: J. Nucl. Mater. 103, 333 (1981)

    CAS  Google Scholar 

  • G. Sauerbrey: Zeitschrift für Physik 155, 206 (1959)

    CAS  Google Scholar 

  • M. C. Chuang, J. W. Coburn: J. Vac. Sci. Technol. A 8, 1969 (1990)

    CAS  Google Scholar 

  • G. Hayderer, M. Schmid, P. Varga, H. Winter, F. Aumayr: Rev. Sci. Instrum. 70, 3696 (1999)

    CAS  Google Scholar 

  • J. Bohdansky, J. Roth, M. K. Sinha, W. Ottenberger: J. Nucl. Mater. 63, 115 (1976)

    CAS  Google Scholar 

  • H. L. Bay, J. Roth, J. Bohdansky: J. Appl. Phys. 48, 4722 (1977)

    CAS  Google Scholar 

  • R. Behrisch, J. Roth, J. Bohdansky, A. Martinelli, B. Schweer, D. Rusbüldt, E. Hintz: J. Nucl. Mater. 93–94, 645 (1980)

    Google Scholar 

  • A. A. Haasz, P. C. Stangeby, O. Auciello: J. Nucl. Mater. 111–112, 757 (1982)

    Google Scholar 

  • O. Auciello, A. A. Haasz, P. C. Stangeby: Phys. Rev. Lett. 50, 783 (1983)

    CAS  Google Scholar 

  • P. C. Stangeby, O. Auciello, A. A. Haasz: J. Vac. Sci. Technol. A 1, 1425 (1983)

    CAS  Google Scholar 

  • J. Roth, C. Hopf: J. Nucl. Mater. 334, 97 (2004)

    CAS  Google Scholar 

  • A. Nerken, L. C. Beavis, K. {Bhagwan Das}, R. Grande, D. H. Holekeboer, J. E. McRea, D. Patterson, E. Stroebelt, P. Varadi: J. Vac. Sci. Technol. 9, 1260 (1972)

    CAS  Google Scholar 

  • J. A. Basford, M. D. Boeckmann, R. E. Ellefson: J. Vac. Sci. Technol. A 11, 22 (1993)

    Google Scholar 

  • D. J. Dagel, C. M. Mallouris, J. R. Doyle: J. Appl. Phys. 79, 8735 (1996)

    CAS  Google Scholar 

  • R. Dobrozemsky: J. Vac. Sci. Technol. 9, 220 (1972)

    CAS  Google Scholar 

  • T. Schwarz-Selinger, R. Preuss, V. Dose, W. Linden: J. Mass Spectrom. 36, 866 (2001)

    CAS  Google Scholar 

  • H. D. Kang, R. Preuss, T. Schwarz-Selinger, V. Dose: J. Mass Spectrom. 37, 748 (2002)

    CAS  Google Scholar 

  • von Toussaint, U., V. Dose, A. Golan: J. Vac. Sci. Technol. A 56, 401 (2004)

    Google Scholar 

  • T. Zecho, B. D. Brandner, J. Biener, J. Küppers: J. Phys. Chem. B 105, 6194 (2001)

    CAS  Google Scholar 

  • T. Zecho, B. D. Brandner, J. Biener, J. Küppers: J. Phys. Chem. B 106, 610 (2002)

    CAS  Google Scholar 

  • V. Philipps, E. Vietzke, M. Erdweg, A. Flaskamp: J. Nucl. Mater. 145–147, 292 (1987)

    Google Scholar 

  • E. Vietzke, K. Flaskamp, V. Philipps: J. Nucl. Mater. 111–112, 763 (1982)

    Google Scholar 

  • E. Vietzke, V. Philipps, K. Flaskamp, C. Wild: in P. Koidl, P. Oelhafen (Eds.): Amorphous hydrogenated carbon films (Les Éditions de Physique, Les Ulis 1987)

    Google Scholar 

  • E. Vietzke, V. Philipps, K. Flaskamp: J. Nucl. Mater. 162–164, 898 (1989)

    Google Scholar 

  • J. Roth: J. Nucl. Mater. 266–269, 51 (1999)

    Google Scholar 

  • M. Balden, J. Roth: J. Nucl. Mater. 280, 39 (2000)

    CAS  Google Scholar 

  • T. Schwarz-Selinger: to be published

    Google Scholar 

  • W. Walcher: Z. Physik 122, 62 (1944)

    CAS  Google Scholar 

  • J. Benedikt, S. Agarwal, D. J. Eijkman, W. Vandamme, M. Creatore, M. C. M. van de Sanden: J. Vac. Sci. Technol. A 23, 1400 (2005)

    CAS  Google Scholar 

  • E. Vietzke, K. Flaskamp, V. Philipps: J. Nucl. Mater. 128–129, 545 (1984)

    Google Scholar 

  • R. M. A. Azzam, N. M. Bashara: Ellipsometry and Polarized Light (Elsevier, Amsterdam 1977)

    Google Scholar 

  • R. W. Collins: Materials Science Forum 52/53, 341 (1989)

    Google Scholar 

  • A. von Keudell, W. Jacob, W. Fukarek: Appl. Phys. Lett. 66, 1322 (1995)

    Google Scholar 

  • A. von Keudell, W. Jacob: J. Appl. Phys. 79, 1092 (1996)

    Google Scholar 

  • A. von Keudell, W. Jacob: J. Appl. Phys. 81, 1531 (1997)

    Google Scholar 

  • A. Kallenbach, A. Thoma, A. Bard, K. H. Behringer, K. Schmidtmann, M. Weinlich, {ASDEX Upgrade Team}: Nucl. Fusion 38, 1097 (1998)

    CAS  Google Scholar 

  • A. Kallenbach, A. Bard, A. Carlson, R. Dux, {the ASDEX Upgrade Team}: Phys. Scripta T81, 43 (1999)

    CAS  Google Scholar 

  • M. F. Stamp, S. K. Erents, W. Fundamenski, G. F. Matthews, R. D. Monk: Phys. Scripta T91, 13 (2001)

    CAS  Google Scholar 

  • M. F. Stamp, S. K. Erents, W. Fundamenski, G. F. Matthews, R. D. Monk: J. Nucl. Mater. 290–293, 321 (2001)

    Google Scholar 

  • D. G. Whyte, W. P. West, C. P. C. Wong, R. Bastasz, J. N. Brooks, W. R. Wampler, N. H. Brooks, J. W. Davis, R. P. Doerner, A. A. Haasz, R. C. Isler, G. L. Jackson, R. G. Macaulay-Newcombe, M. R. Wade: Nucl. Fusion 41, 1243 (2001)

    CAS  Google Scholar 

  • S. Brezinsek, P. T. Greenland, P. Mertens, A. Pospieszczyk, D. Reiter, U. Samm, B. Schweer, G. Sergienko: J. Nucl. Mater. 313–316, 967 (2003)

    Google Scholar 

  • S. Brezinsek, P. Mertens, A. Pospieszczyk, G. Sergienko, U. Samm: Phys. Scr. T103, 51 (2003)

    CAS  Google Scholar 

  • S. Brezinsek, A. Huber, S. Jachmich, A. Pospieszczyk, B. Schweer, G. Sergienko: Fusion Sci. Technol. 47, 209 (2005)

    CAS  Google Scholar 

  • S. Brezinsek, A. Pospieszczyk, M. F. Stamp, A. Meigs, A. Kirschner, A. Huber, P. Mertens: J. Nucl. Mater. 337–339, 1058 (2005)

    Google Scholar 

  • S. Brezinsek, G. Sergienko, A. Pospieszczyk, P. Mertens, U. Samm, P. T. Greenland: Plasma Phys. Contr. Fusion 47, 615 (2005)

    CAS  Google Scholar 

  • M. F. Stamp, P. Andrew, S. Brezinsek, A. Huber: J. Nucl. Mater. 337–339, 1038 (2005)

    Google Scholar 

  • R. Pugno, K. Krieger, A. Kirschner, A. Kallenbach, D. Coster, R. Dux, U. Fantz, J. Likonen, H. W. Müller, J. Neuhauser, V. Rohde, E. Vainonen-Ahlgren, {ASDEX Upgrade Team}: J. Nucl. Mater. 337–339, 985 (2005)

    Google Scholar 

  • U. Fantz, S. Meir, {ASDEX Upgrade Team}: J. Nucl. Mater. 337–339, 1087 (2005)

    Google Scholar 

  • D. Whyte, G. Tynan, R. Doerner, J. Brooks: Nucl. Fusion 41, 47 (2001)

    CAS  Google Scholar 

  • H. Grote, W. Bohmeyer, P. Kornejew, H. D. Reiner, G. Fussmann, R. Schlögl, G. Weinberg, C. H. Wu: J. Nucl. Mater. 266–269, 1059 (1999)

    Google Scholar 

  • U. Fantz, H. Paulin: Phys. Scr. T91, 25 (2001)

    CAS  Google Scholar 

  • U. Fantz: Contrib. Plasma Phys. 44, 508 (2004)

    CAS  Google Scholar 

  • U. Fantz: Nuclear Fusion Research – Understanding Plasma–Surface Interaction, Springer Ser. Chem. Phys. (Springer, Berlin, Heidelberg 2005) p. 99

    Google Scholar 

  • P. Starke, U. Fantz, M. Balden: J. Nucl. Mater. 337–339, 1005 (2005)

    Google Scholar 

  • K. Behringer, H. P. Summers, B. Denne, M. Forrest, M. Stamp: Plasma Phys. Contr. Fusion 31, 2059 (1989)

    CAS  Google Scholar 

  • A. Pospieszczyk, Y. Ra, Y. Hirooka, R. W. Conn, D. M. Goebel, B. LaBombard, R. E. Nygren: {Spectroscopic Studies of Carbon Containing Molecules and their Break-up in Pisces-A}, Technical report, {UCLA Report PPG-1251} (1989)

    Google Scholar 

  • S. Brezinsek, A. Pospieszczyk, A. Kirschner, G. Sergienko, A. Huber, V. Philipps, P. Mertens, U. Samm, M. F. Stamp, A. Meigs, P. T. Greenland, {JET-EFDA contributors}: Phys. Scr. T111, 42 (2004)

    CAS  Google Scholar 

  • V. Philipps, M. Stamp, A. Pospieszczyk, A. Huber, A. Kirschner, E. Vietzke: J. Nucl. Mater. 313–316, 354 (2003)

    Google Scholar 

  • J. Perrin, Y. Takeda, N. Hirano, Y. Takeuchi, A. Matsuda: Surf. Sci. 210, 114 (1989)

    CAS  Google Scholar 

  • A. Matsuda, K. Nomoto, Y. Takeuchi, A. Suzuki, Y. Yuuki, J. Perrin: Surf. Sci. 227, 50 (1990)

    CAS  Google Scholar 

  • D. A. Doughty, J. R. Doyle, G. H. Lin, A. Gallagher: J. Appl. Phys. 67, 6220 (1990)

    CAS  Google Scholar 

  • A. Nuruddin, J. R. Doyle, J. R. Abelson: J. Appl. Phys. 76, 3123 (1994)

    CAS  Google Scholar 

  • C. Hopf, K. Letourneur, W. Jacob, T. Schwarz-Selinger, A. von Keudell: Appl. Phys. Lett. 74, 3800 (1999)

    CAS  Google Scholar 

  • C. Hopf, T. Schwarz-Selinger, W. Jacob, A. von Keudell: J. Appl. Phys. 87, 2719 (2000)

    CAS  Google Scholar 

  • W. Jacob, C. Hopf, A. von Keudell, T. Schwarz-Selinger: in C. H. W. and (Ed.): Hydrogen Recycling at Plasma Facing Materials (Kluwer, Dordrecht 2000) p. 331

    Google Scholar 

  • E. Vietzke, K. Flaskamp, M. Hennes, V. Philipps: Nucl. Instrum. Meth. B 2, 617 (1984)

    Google Scholar 

  • A. A. Haasz, J. W. Davis: Nucl. Instrum. Meth. B 83, 117 (1993)

    CAS  Google Scholar 

  • J. W. Davis, A. A. Haasz, C. H. Wu: J. Nucl. Mater. 196–198, 581 (1992)

    Google Scholar 

  • S. Chiu, A. A. Haasz, P. Franzen: J. Nucl. Mater. 218, 319 (1995)

    CAS  Google Scholar 

  • A. Haasz, S. Chiu, P. Franzen: J. Nucl. Mater. 220–222, 815 (1995)

    Google Scholar 

  • S. Chiu, A. A. Haasz: J. Nucl. Mater. 196–198, 972 (1992)

    Google Scholar 

  • S. Chiu, A. A. Haasz: J. Nucl. Mater. 208, 282 (1994)

    CAS  Google Scholar 

  • S. Chiu, A. A. Haasz: J. Nucl. Mater. 210, 34 (1994)

    CAS  Google Scholar 

  • A. A. Haasz, A. Y. K. Chen, J. W. Davis, E. Vietzke: J. Nucl. Mater. 248, 19 (1997)

    CAS  Google Scholar 

  • A. Y. K. Chen, J. W. Davis, A. A. Haasz: J. Nucl. Mater. 266–269, 399 (1999)

    Google Scholar 

  • A. Y. K. Chen, J. W. Davis, A. A. Haasz: J. Nucl. Mater. 290–293, 61 (2002)

    Google Scholar 

  • A. Y. K. Chen, J. W. Davis, A. A. Haasz: J. Nucl. Mater. 312, 16 (2003)

    CAS  Google Scholar 

  • A. Y. K. Chen, A. A. Haasz, J. W. Davis: J. Appl. Phys. 94, 1617 (2003)

    CAS  Google Scholar 

  • R. G. Macaulay-Newcombe, A. A. Haasz, C. H. Wu, J. W. Davis: J. Nucl. Mater. 327, 114 (2004)

    CAS  Google Scholar 

  • A. von Keudell, T. Schwarz-Selinger, W. Jacob: J. Appl. Phys. 89, 2979 (2001)

    Google Scholar 

  • A. von Keudell: Thin Solid Films 402, 1 (2002)

    Google Scholar 

  • A. von Keudell, W. Jacob: Prog. Surf. Sci. 76, 21 (2004)

    Google Scholar 

  • M. Meier, A. von Keudell: J. Appl. Phys. 90, 3585 (2001)

    CAS  Google Scholar 

  • M. Meier, A. von Keudell: J. Chem. Phys. 116, 5125 (2002)

    CAS  Google Scholar 

  • C. Hopf, A. von Keudell, W. Jacob: J. Appl. Phys. 93, 3352 (2003)

    CAS  Google Scholar 

  • C. Hopf, A. von Keudell, W. Jacob: J. Appl. Phys. 94, 2373 (2003)

    CAS  Google Scholar 

  • C. Hopf, W. Jacob, A. von Keudell: J. Appl. Phys. 97, 094904–1 (2005)

    Google Scholar 

  • W. Jacob, C. Hopf, A. von Keudell, M. Meier, T. Schwarz-Selinger: Rev. Sci. Instrum. 74, 5123 (2003)

    CAS  Google Scholar 

  • T. Schwarz-Selinger, A. von Keudell, W. Jacob: J. Vac. Sci. Technol. A 18, 995 (2000)

    CAS  Google Scholar 

  • T. Schwarz-Selinger, V. Dose, W. Jacob, A. von Keudell: J. Vac. Sci. Technol. A 19, 101 (2001)

    CAS  Google Scholar 

  • C. S. Pitcher, O. Auciello, A. A. Haasz, P. C. Stangeby: J. Nucl. Mater. 128–129, 597 (1984)

    Google Scholar 

  • A. A. Haasz, O. Auciello, P. C. Stangeby: J. Vac. Sci. Technol. A 4, 1179 (1986)

    CAS  Google Scholar 

  • E. Vietzke, K. Flaskamp, V. Philipps, G. Esser, P. Wienhold, J. Winter: J. Nucl. Mater. 145–147, 443 (1987)

    Google Scholar 

  • A. Schenk, J. Biener, B. Winter, C. Lutterloh, U. Schubert, J. Küppers: Appl. Phys. Lett. 61, 2414 (1992)

    CAS  Google Scholar 

  • J. Biener, U. Schubert, A. Schenk, B. Winter, C. Lutterloh, J. Küppers: Advan. Mater. 5, 639 (1993)

    CAS  Google Scholar 

  • J. Biener, U. Schubert, A. Schenk, B. Winter, C. Lutterloh, J. Küppers: J. Chem. Phys. 99, 3125 (1993)

    CAS  Google Scholar 

  • J. Biener, A. Schenk, B. Winter, J. Küppers: J. Electr. Spectr. Rel. Phen. 64/65, 331 (1993)

    Google Scholar 

  • J. Biener, A. Schenk, B. Winter, U. Schubert, C. Lutterloh, J. Küppers: Phys. Rev. B 49, 17307 (1994)

    CAS  Google Scholar 

  • J. Biener, A. Schenk, B. Winter, C. Lutterloh, U. Schubert, J. Küppers: Surf. Sci. 307–309, 228 (1994)

    Google Scholar 

  • A. Horn, A. Schenk, J. Biener, B. Winter, C. Lutterloh, M. Wittmann, J. Küppers: Chem. Phys. Lett. 231, 193 (1994)

    CAS  Google Scholar 

  • A. Schenk, B. Winter, J. Biener, C. Lutterloh, U. Schubert, J. Küppers: J. Appl. Phys. 77, 2462 (1995)

    CAS  Google Scholar 

  • J. Küppers: Surf. Sci. Rep. 22, 249 (1995)

    Google Scholar 

  • M. Wittmann, J. Küppers: J. Nucl. Mater. 227, 186 (1996)

    CAS  Google Scholar 

  • J. Roth, C. García-Rosales: Nucl. Fusion 36, 1647 (1996) see also corrigendum by J. Roth, C. García-Rosales: Nucl. Fusion 37, 897 (1997).

    CAS  Google Scholar 

  • V. Philipps, K. Flaskamp, E. Vietzke: J. Nucl. Mater. 122–123, 1440 (1984)

    Google Scholar 

  • J. W. Davis, A. A. Haasz, P. C. Stangeby: J. Nucl. Mater. 155–157, 234 (1988)

    Google Scholar 

  • E. Vietzke, V. Philipps, K. Flaskamp, P. Koidl, C. Wild: Surf. Coat. Technol. 47, 156 (1991)

    CAS  Google Scholar 

  • O. Auciello, A. A. Haasz, P. C. Stangeby: Radiat. Eff. 89, 63 (1985)

    CAS  Google Scholar 

  • J. Roth, E. Vietzke, A. A. Haasz: in Atomic and Plasma-Material Interaction Data for Fusion, Suppl. Nucl. Fusion 1 (1991) p. 63

    Google Scholar 

  • C. M. Braganza, S. K. Erents, G. M. McCracken: J. Nucl. Mater. 75, 209 (1978)

    Google Scholar 

  • R. Yamada, K. Nakamura, K. Sone, M. Saidoh: J. Nucl. Mater. 95, 278 (1980)

    CAS  Google Scholar 

  • E. Vietzke, V. Philipps: Nucl. Instrum. Meth. B 23, 449 (1987)

    Google Scholar 

  • J. W. Davis, A. A. Haasz: J. Nucl. Mater. 149, 349 (1987)

    CAS  Google Scholar 

  • A. A. Haasz, J. W. Davis: J. Nucl. Mater. 175, 84 (1990)

    CAS  Google Scholar 

  • J. W. Davis, A. A. Haasz, P. C. Stangeby: J. Nucl. Mater. 145–147, 417 (1987)

    Google Scholar 

  • R. Yamada, K. Sone: J. Nucl. Mater. 116, 200 (1983)

    CAS  Google Scholar 

  • R. Yamada: J. Nucl. Mater. 145–147, 359 (1987)

    Google Scholar 

  • J. Roth, J. Bohdansky: Nucl. Instrum. Meth. B 23, 549 (1987)

    Google Scholar 

  • A. A. Haasz, B. V. Mech, J. D. Davis: J. Nucl. Mater. 231, 170 (1996)

    CAS  Google Scholar 

  • B. V. Mech, A. A. Haasz, J. W. Davis: J. Nucl. Mater. 241–243, 1147 (1997)

    Google Scholar 

  • B. V. Mech, A. A. Haasz, J. W. Davis: J. Nucl. Mater. 255, 153 (1998)

    CAS  Google Scholar 

  • L. I. Vergara, F. W. Meyer, H. F. Krause: J. Nucl. Mater. 347, 118 (2005)

    CAS  Google Scholar 

  • F. W. Meyer, H. F. Krause, L. I. Vergara: J. Nucl. Mater. 337–339, 922 (2005)

    Google Scholar 

  • F. W. Meyer, L. I. Vergara, H. F. Krause: Phys. Scr. T124, 44 (2006)

    CAS  Google Scholar 

  • L. I. Vergara, F. W. Meyer, H. F. Krause, P. Träskelin, K. Nordlund, E. Salonen: J. Nucl. Mater. 357, 9 (2006)

    CAS  Google Scholar 

  • M. Küstner, W. Eckstein, V. Dose, J. Roth: Nucl. Instrum. Meth. B 145, 320 (1998)

    Google Scholar 

  • M. Balden, de Juan Pardo, E., I. Quintana, B. Cieciwa, J. Roth: J. Nucl. Mater. 337–339, 980 (2005)

    Google Scholar 

  • E. Vietzke, V. Philipps: Fusion Technol. 15, 108 (1989)

    CAS  Google Scholar 

  • B. M. U. Scherzer, R. Behrisch, W. Eckstein, U. Littmark, J. Roth, M. K. Sinha: J. Nucl. Mater. 63, 100 (1976)

    CAS  Google Scholar 

  • G. Staudenmaier, J. Roth, R. Behrisch, J. Bohdansky, W. Eckstein, P. Staib, S. Matteson, S. K. Erents: J. Nucl. Mater. 84, 149 (1979)

    CAS  Google Scholar 

  • J. Roth, B. M. U. Scherzer, R. S. Blewer, D. K. Brice, S. T. Picraux, W. R. Wampler: J. Nucl. Mater. 93–94, 601 (1980)

    Google Scholar 

  • W. R. Wampler, D. K. Brice, C. W. Magee: J. Nucl. Mater. 102, 304 (1981)

    CAS  Google Scholar 

  • B. M. U. Scherzer, R. A. Langley, W. Möller, J. Roth, R. Schulz: Nucl. Instrum. Meth. 194, 497 (1982)

    CAS  Google Scholar 

  • M. Braun, B. Emmoth: J. Nucl. Mater. 128–129, 657 (1984)

    Google Scholar 

  • W. Möller, B. M. U. Scherzer: Appl. Phys. Lett. 50, 1870 (1987)

    Google Scholar 

  • B. M. U. Scherzer, M. Wielunski, W. Möller, A. Turos, J. Roth: Nucl. Instrum. Meth. B 33, 714 (1988)

    Google Scholar 

  • W. Möller, B. M. U. Scherzer: J. Appl. Phys. 64, 4860 (1988)

    Google Scholar 

  • W. Möller: J. Nucl. Mater. 162–164, 138 (1989)

    Google Scholar 

  • B. L. Doyle, P. S. Peercy: Appl. Phys. Lett. 34, 811 (1979)

    CAS  Google Scholar 

  • J. Roth, J. Bohdansky: Appl. Phys. Lett. 51, 964 (1987)

    CAS  Google Scholar 

  • J. Roth, R. A. Zuhr, S. P. Withrow, W. P. Eatherly: J. Appl. Phys. 63, 2603 (1988)

    CAS  Google Scholar 

  • K. Niwase, M. Sugimoto, T. Tanabe, F. E. Fujita: J. Nucl. Mater. 155–157, 303 (1988)

    Google Scholar 

  • R. Siegele, J. Roth, B. M. U. Scherzer, S. J. Pennycook: J. Appl. Phys. 73, 2225 (1993)

    CAS  Google Scholar 

  • T. Schwarz-Selinger, A. von Keudell, W. Jacob: J. Appl. Phys. 86, 3988 (1999)

    CAS  Google Scholar 

  • J. Winter, H. G. Esser, P. Wienhold, V. Philipps, E. Vietzke, K. H. Besocke, W. Möller, B. Emmoth: Nucl. Instrum. Meth. B 23, 538 (1987)

    Google Scholar 

  • B. Lersmacher, H. Lydtin, W. F. Knippenberg, A. W. Moore: Carbon 5, 205 (1967)

    CAS  Google Scholar 

  • J. Roth: in R. K. Janev, H. W. Drawin (Eds.): Atomic and Plasma-Material Interaction Processes in Controlled Thermonuclear Fusion (Elsevier, Amsterdam 1993) p. 381

    Google Scholar 

  • C. S. Pitcher, G. M. McCracken, D. H. J. Goodall, A. A. Haasz, G. F. Matthews, P. C. Stangeby: Nucl. Fusion 26, 1641 (1986)

    CAS  Google Scholar 

  • P. Kornejew, W. Bohmeyer, H. D. Reiner: Phys. Scr. T81, 40 (1990)

    Google Scholar 

  • R. Ruggiéri, E. Gauthier, J. Hogan, J. M. Layet, T. Loarer: J. Nucl. Mater. 266–269, 660 (1999)

    Google Scholar 

  • A. Cambe, E. Gauthier, J. Hogan, J. M. Layet: J. Nucl. Mater. 313–316, 364 (2003)

    Google Scholar 

  • A. Pospiesczyk, V. Philipps, A. Huber, A. Kirschner, B. Schweer, E. Vietzke: Phys. Scr. T81, 48 (1999)

    Google Scholar 

  • A. Kallenbach, A. Bard, D. Coster, R. Dux, C. Fuchs, J. Gafert, A. Herrmann, R. Schneider, {ASDEX Upgrade Team}: J. Nucl. Mater. 266–269, 343 (1999)

    Google Scholar 

  • T. Nakano, H. Kubo, S. Higashijima, N. Asakura, H. Takenaga, T. Sugie, K. Itami: Nucl. Fusion 42, 689 (2002)

    CAS  Google Scholar 

  • J. Roth, R. Preuss, W. Bohmeyer, S. Brezinsek, A. Cambe, E. Casarotto, R. Doerner, E. Gauthier, G. Federici, S. Higashijima, J. Hogan, A. Kallenbach, A. Kirschner, H. Kubo, J. Layet, T. Nakano, V. Philipps, A. Pospieszczyk, R. Pugno, R. Ruggieri, B. Schweer, G. Sergienko, M. Stamp: Nucl. Fusion 44, L21 (2004)

    CAS  Google Scholar 

  • V. Dose: Rep. Prog. Phys. 66, 1421 (2003)

    Google Scholar 

  • V. Dose, R. Preuss, J. Roth: J. Nucl. Mater. 288, 153 (2001)

    CAS  Google Scholar 

  • R. Yamada: J. Vac. Sci. Technol. A 5, 305 (1987)

    CAS  Google Scholar 

  • R. Yamada: J. Nucl. Mater. 174, 118 (1990)

    CAS  Google Scholar 

  • A. A. Haasz, O. Auciello, P. C. Stangeby, I. S. Youle: J. Nucl. Mater. 128–129, 593 (1984)

    Google Scholar 

  • A. A. Haasz, J. W. Davis, O. Auciello, P. Stangeby, E. Vietzke, K. Flaskamp, V. Philipps: J. Nucl. Mater. 145–147, 412 (1987)

    Google Scholar 

  • C. Hopf, A. von Keudell, W. Jacob: Nucl. Fusion 42, L27 (2002)

    CAS  Google Scholar 

  • W. Jacob, C. Hopf, M. Meier, T. Schwarz-Selinger: in Nuclear Fusion Research – Understanding Plasma–Surface Interaction, 1 ed., Springer Ser. Chem. Phys. (Springer, Berlin, Heidelberg 2005) p. 249

    Google Scholar 

  • W. Jacob, C. Hopf, M. Schlüter: Phys. Scr. T124, 32 (2006)

    CAS  Google Scholar 

  • W. Eckstein: Computer Simulation of Ion Solid Interactions, Springer Ser. Mater. Sci. (Springer, Berlin, Heidelberg 1991) russ. translation: (MIR, Moscow 1995)

    Google Scholar 

  • J. Roth, J. Bohdansky, J. B. Roberto: J. Nucl. Mater. 128–129, 534 (1984)

    Google Scholar 

  • J. Roth, C. García-Rosales, R. Behrisch, W. Eckstein: J. Nucl. Mater. 191, 45 (1992)

    Google Scholar 

  • R. Schwörer, H. Plank, J. Roth: J. Nucl. Mater. 241–243, 1156 (1997)

    Google Scholar 

  • V. K. Alimov, R. Schwörer, B. M. U. Scherzer, J. Roth: J. Nucl. Mater. 187, 191 (1992)

    CAS  Google Scholar 

  • R. Schwörer, J. Roth: J. Appl. Phys. 77, 3812 (1995)

    Google Scholar 

  • C. García-Rosales, J. Roth: J. Nucl. Mater. 196–198, 573 (1992)

    Google Scholar 

  • C. García-Rosales, J. Roth, R. Behrisch: J. Nucl. Mater. 212–215, 1211 (1994)

    Google Scholar 

  • M. Balden, C. García-Rosales, R. Behrisch, J. Roth, P. Paz, J. Etxeberria: J. Nucl. Mater. 290–293, 52 (2001)

    Google Scholar 

  • Y. Yao, Z. Hargitai, M. Albert, R. G. Albridge, A. V. Barnes, J. M. Gilligan, B. P. Ferguson, G. Lüpke, V. D. Gordon, N. H. Tolk, J. C. Tully, G. Betz, W. Husinsky: Phys. Rev. Lett. 81, 550 (1998)

    CAS  Google Scholar 

  • R. K. Gould: J. Chem. Phys. 63, 1825 (1975)

    CAS  Google Scholar 

  • M. Balden, J. Roth, E. D. Pardo, A. Wiltner: J. Nucl. Mater. 313–316, 348 (2003)

    Google Scholar 

  • T. Zecho, A. Güttler, X. Sha, B. Jackson, J. Küppers: J. Chem. Phys. 117, 8486 (2002)

    CAS  Google Scholar 

  • B. V. Mech, A. A. Haasz, J. W. Davis: J. Appl. Phys. 84, 1655 (1998)

    CAS  Google Scholar 

  • J. Bohdansky, J. Roth, H. Bay: J. Appl. Phys. 51, 2861 (1980)

    CAS  Google Scholar 

  • J. Roth: Phys. Scr. T124, 37 (2005)

    Google Scholar 

  • C. Hopf, W. Jacob: J. Nucl. Mater. 342, 141 (2005)

    CAS  Google Scholar 

  • E. Ghio, L. Mattera, C. Salvo, F. Tommasini, U. Valbusa: J. Chem. Phys. 73, 556 (1980)

    CAS  Google Scholar 

  • J. Pillath, J. Winter, F. Waelbroek: in P. Koidl, P. Oelhafen (Eds.): Amorphous hydrogenated carbon films (Les Éditions de Physique, Les Ulis 1987) p. 449

    Google Scholar 

  • E. Salonen, K. Nordlund, J. Tarus, T. Ahlgren, J. Keinonen, C. Wu: Phys. Rev. B 60, R14 005-1-4 (1999)

    Google Scholar 

  • E. Salonen, K. Nordlund, J. Keinonen, N. Runeberg, C. Wu: J. Appl. Phys. 92, 2216 (2002)

    CAS  Google Scholar 

  • E. Salonen, K. Nordlund, J. Keinonen, C. Wu: Contrib. Plasma Phys. 42, 458 (2002)

    CAS  Google Scholar 

  • E. Salonen, K. Nordlund, J. Keinonen, C. Wu: J. Nucl. Mater. 313–316, 404 (2003)

    Google Scholar 

  • P. Träskelin, K. Nordlund, J. Keinonen: Nucl. Instrum. Meth. B 228, 319 (2005)

    Google Scholar 

  • K. Nordlund: Phys. Scr. T124, 53 (2006)

    CAS  Google Scholar 

  • S. J. Stuart, P. S. Krstić, T. A. Embry, C. O. Reinhold: Nucl. Instrum. Meth. B 255, 202 (2007)

    CAS  Google Scholar 

  • P. S. Krstić, C. O. Reinhold, S. J. Stuart: Europhys. Lett. 77, 33002 (2007)

    Google Scholar 

  • P. S. Krstić, S. J. Stuart, C. O. Reinhold: AIP Proc. 876, 201 (2006)

    Google Scholar 

  • C. O. Reinhold, P. S. Krstić, S. J. Stuart: Nucl. Instrum. Meth. B 258, 274 (2007)

    CAS  Google Scholar 

  • R. G. Macaulay-Newcombe, A. A. Haasz, J. W. Davis: J. Nucl. Mater. 337–339, 857 (2005)

    Google Scholar 

  • A. A. Haasz, J. W. Davis: Fus. Sci. Technol. 50, 58 (2006)

    CAS  Google Scholar 

  • P. Franzen: Report IPP 9/92 (MPG, Garching 1993)

    Google Scholar 

  • K. Maruyama, W. Jacob, J. Roth: J. Nucl. Mater. 264, 56 (1999)

    CAS  Google Scholar 

  • W. M. Wang, J. Roth, W. Eckstein, R. Schwörer, H. Plank, M. Du: Nucl. Instrum. Meth. B 129, 210 (1997)

    CAS  Google Scholar 

  • M. Balden, K. U. Klages, W. Jacob, J. Roth: J. Nucl. Mater. 341, 31 (2005)

    CAS  Google Scholar 

  • C. Li, T. C. Brown: Carbon 39, 725 (2001)

    CAS  Google Scholar 

  • J. O. Müller, D. S. Su, R. E. Jentoft, J. Kröhnert, F. C. Jentoft, R. Schlögl: Catalysis Today 102–103, 259 (2005)

    Google Scholar 

  • H. Marsh, K. Kuo: in H. Marsh (Ed.): Introduction to Carbon Science (Butterworths, London 1989) p. 107

    Google Scholar 

  • B. R. Stanmore, J. F. Brilhac, P. Gilot: Carbon 39, 2247 (2001)

    CAS  Google Scholar 

  • J. W. Davis, C. G. Hamilton, A. A. Haasz: J. Nucl. Mater. 288, 148 (2001)

    CAS  Google Scholar 

  • D. E. Rosner, H. D. Allendorf: Kinetics of the Attack of Refractory Materials by Dissociated Gases (Plenum, New York 1970) see also references therein

    Google Scholar 

  • E. Vietzke, T. Tanabe, V. Philipps, M. Erdweg, K. Flaskamp: J. Nucl. Mater. 145–147, 425 (1987)

    Google Scholar 

  • A. Refke, V. Philipps, E. Vietzke: J. Nucl. Mater. 250, 13 (1997)

    CAS  Google Scholar 

  • E. Vietzke, A. A. Haasz: in W. O. Hofer, J. Roth (Eds.): Physical Processes of the Interaction of Fusion Plasmas with Solids (Academic, New York 1996) p. 135

    Google Scholar 

  • E. Hechtl, J. Bohdansky: J. Nucl. Mater. 141–143, 139 (1986)

    Google Scholar 

  • E. Hechtl, J. Bohdansky: J. Nucl. Mater. 154, 201 (1988)

    CAS  Google Scholar 

  • C. Hopf, M. Schlüter, W. Jacob: J. Appl. Phys. (2007) to be published

    Google Scholar 

  • C. Hopf, M. Schlüter, W. Jacob: Appl. Phys. Lett. 90, 224106 (2007)

    Google Scholar 

  • B. Landkammer, von Keudell, A., W. Jacob: J. Nucl. Mater. 264, 48 (1999)

    CAS  Google Scholar 

  • G. Adamopoulos, C. Godet, B. Drévillon, Y. Sato, D. N. Batchelder, A. Grosman, C. Ortega: Diamond Relat. Mater. 12, 983 (2003)

    CAS  Google Scholar 

  • A. M. Baranov, V. V. Sleptsov, A. A. Nefedov, A. E. Varfolomeev, L. Calliari: Diamond Relat. Mater. 13, 1356 (2004)

    CAS  Google Scholar 

  • K. K. Hirakuri, K. Kuwashima, K. Tatsuta, K. Sato: Diamond Relat. Mater. 14, 1067 (2005)

    CAS  Google Scholar 

  • W. L. Hsu: J. Vac. Sci. Technol A 7, 1047 (1989)

    CAS  Google Scholar 

  • D. Mueller, W. Blanchard, J. Collins, J. Hosea, J. Kamperschroer, P. H. LaMarche, A. Nagy, D. K. Owens, C. H. Skinner: J. Nucl. Mater. 241–243, 897 (1997)

    Google Scholar 

  • W. Jacob, B. Landkammer, C. Wu: J. Nucl. Mater. 266–269, 552 (1999)

    Google Scholar 

  • J. S. Hu, J. G. Li, X. M. Wang, {the HT-7 team}: Plasma Phys. Control. Fusion 47, 1271 (2005)

    CAS  Google Scholar 

  • J. S. Hu, J. G. Li, X. M. Wang: J. Nucl. Mater. 350, 9 (2006)

    CAS  Google Scholar 

  • C. Hopf, V. Rohde, W. Jacob, A. Herrmann, R. Neu, J. Roth, {the ASDEX Upgrade Team}: J. Nucl. Mater. 363–365, 882 (2007)

    Google Scholar 

  • S. Fujimura, K. Shinagawa, M. T. Suzuki, M. Nakamura: J. Vac. Sci. Technol. B 9, 357 (1991)

    CAS  Google Scholar 

  • T. E. F. M. Standaert, P. J. Matsuo, X. Li, G. S. Oehrlein, T. M. Lu, R. Gutmann, C. T. Rosenmayer, J. W. Bartz, J. G. Langan, W. R. Entley: J. Vac. Sci. Technol. A 19, 435 (2001)

    CAS  Google Scholar 

  • W. Jacob, C. Hopf, M. Schlüter: Appl. Phys. Lett. 86, 204103 (2005)

    Google Scholar 

  • S. Grigull, W. Jacob, D. Henke, C. Spaeth, L. Sümmchen, W. Sigle: J. Appl. Phys. 83, 5185 (1998)

    CAS  Google Scholar 

  • S. Grigull, R. Behrisch, S. Parascandola: J. Nucl. Mater. 275, 158 (1999)

    CAS  Google Scholar 

  • P. Hammer, W. Gissler: Diamond Relat. Mater. 5, 1152 (1996)

    CAS  Google Scholar 

  • M. Schlüter, C. Hopf, T. Schwarz-Selinger, W. Jacob: J. Appl. Phys. (2007) to be published

    Google Scholar 

  • K. J. Clay, S. P. Speakman, G. A. J. Amaratunga, S. R. P. Silva: J. Appl. Phys. 79, 7227 (1996)

    CAS  Google Scholar 

  • C. Spaeth, U. Kreissig, F. Richter: Thin Solid Films 355–356, 64 (1999)

    Google Scholar 

  • S. E. Rodil, N. A. Morrison, J. Robertson, W. I. Milne: Phys. Stat. Solidi (A) 174, 25 (1999)

    CAS  Google Scholar 

  • J. Hong, G. Turban: Diamond Relat. Mater. 8, 572 (1999)

    CAS  Google Scholar 

  • J. Hong, A. Granier, A. Goullet, G. Turban: Diamond Relat. Mater. 9, 573 (2000)

    CAS  Google Scholar 

  • N. Hellgren, M. P. Johansson, B. Hjörvarsson, E. Broitman, M. Östblom, B. Liedberg, L. Hultman, J. E. Sundgren: J. Vac. Sci. Technol. A 18, 2349 (2000)

    CAS  Google Scholar 

  • N. Hellgren, M. P. Johansson, E. Broitman, P. Sandström, L. Hultman, J. E. Sundgren: Thin Solid Films 382, 146 (2001)

    CAS  Google Scholar 

  • N. A. Morrison, S. E. Rodil, J. Robertson, W. I. Milne: J. Appl. Phys. 89, 5754 (2001)

    CAS  Google Scholar 

  • T. Schwarz-Selinger, C. Hopf, C. Sun, W. Jacob: J. Nucl. Mater. 363–365, 174 (2007)

    Google Scholar 

  • J. W. Butterbaugh, D. C. Gray, H. H. Sawin: J. Vac. Sci. Technol. B 9, 1461 (1991)

    CAS  Google Scholar 

  • G. S. Oehrlein, D. Zhang, D. Vender, M. Haverlag: J. Vac. Sci. Technol. A 12, 323 (1994)

    CAS  Google Scholar 

  • G. S. Oehrlein, D. Zhang, D. Vender, O. Joubert: J. Vac. Sci. Technol. A 12, 333 (1994)

    CAS  Google Scholar 

  • T. E. F. M. Standaert, M. Schaepkens, P. G. M. Sebel, N. R. Rueger, G. S. Oehrlein: J. Vac. Sci. Technol. A 16, 239 (1998)

    CAS  Google Scholar 

  • T. Standaert, C. Hedlund, E. A. Joseph, G. S. Oehrlein, T. J. Dalton: J. Vac. Sci. Technol. A 22, 53 (2004)

    CAS  Google Scholar 

  • D. Humbird, D. B. Graves, X. F. Hua, G. S. Oehrlein: Appl. Phys. Lett. 84, 1073 (2004)

    CAS  Google Scholar 

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Jacob, W., Roth, J. (2007). Chemical Sputtering. In: Sputtering by Particle Bombardment. Topics in Applied Physics, vol 110. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-44502-9_6

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