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Scattering Measurements of Soft X-Ray Mirrors

  • Conference paper
X-Ray Microscopy II

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 56))

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Abstract

Soft x-ray mirrors have been used as focussing elements in x-ray microscopes and other x-ray optics. Mirror surfaces must be figured very accurately and must be as smooth as possible to suppress unwanted x-ray scattering by surface irregularities. Since the production of supersmooth films for the soft x-ray multilayer mirror is our main concern, the most straight forward way to examine this quality is to measure the x-ray scattering in the same wavelength band which the mirror has been designed for.

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References

  1. P.A.J de Korte and R.Laine: Appl. Opt. 18, 236 (1979)

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  2. E.L.Church, H.A.Jenkison and J.M.Zavada: Opt. Eng. 16, 360 (1977)

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  3. E.Spiller, A.Segmüller and R.P.Haelbich: Annals New york Academy of Sciences 188 (The New York Academy of Sciences, 1980)

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Author information

Authors and Affiliations

  1. Seiko Instruments Inc., Matsudo Chiba 271, Japan

    K. Nakajima

  2. Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki 305, Japan

    S. Aoki

Authors
  1. K. Nakajima
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  2. S. Aoki
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Editor information

Editors and Affiliations

  1. IBM T.J. Watson Research Center, 10598, Yorktown Heights, NY, USA

    David Sayre Ph. D.

  2. Department of Physics, State University of New York, 11794, Stony Brook, NY, USA

    Janos Kirz Ph. D.

  3. Center for X-Ray Optics, Lawrence Berkeley Laboratory, University of California at Berkeley, 1 Cyclotron Rd., 94720, Berkeley, CA, USA

    Malcolm Howells Ph. D.

  4. National Synchrotron Light Source, Brookhaven National Laboratory, 11973, Upton, NY, USA

    Harvey Rarback Ph. D.

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© 1988 Springer-Verlag Berlin Heidelberg

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Nakajima, K., Aoki, S. (1988). Scattering Measurements of Soft X-Ray Mirrors. In: Sayre, D., Kirz, J., Howells, M., Rarback, H. (eds) X-Ray Microscopy II. Springer Series in Optical Sciences, vol 56. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-39246-0_30

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  • DOI: https://doi.org/10.1007/978-3-540-39246-0_30

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-14490-9

  • Online ISBN: 978-3-540-39246-0

  • eBook Packages: Springer Book Archive

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