Abstract
Fresnel zone plates which are used as imaging lenses for soft x-rays are required to have high resolution, high efficiency, and low distortions. In terms of practical realisation, this means smallest possible widths of the outer zones, high aspect ratios of the absorber rings, and a positional accuracy of the structures to a fraction of the outer zone width. Additionally, the absorptance of the membranes carrying the zone plate has to be minimized.
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© 1988 Springer-Verlag Berlin Heidelberg
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Bögli, V. et al. (1988). Microzone Plate Fabrication by 100 keV Electron Beam Lithography. In: Sayre, D., Kirz, J., Howells, M., Rarback, H. (eds) X-Ray Microscopy II. Springer Series in Optical Sciences, vol 56. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-39246-0_15
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DOI: https://doi.org/10.1007/978-3-540-39246-0_15
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