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Elemental Analysis and Imaging with X-Rays

  • Chapter
Scanning Electron Microscopy

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 45))

Abstract

The deceleration of fast electrons in the Coulomb field of a nucleus can result in the emission of a background x-ray quantum. The de-excitation of an inner-shell ionization results either in the emission of a characteristic x-ray quantum or in the emission of an Auger electron, both of which can be used for elemental analysis.

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    Professor Dr. Ludwig Reimer

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Reimer, L. (1998). Elemental Analysis and Imaging with X-Rays. In: Scanning Electron Microscopy. Springer Series in Optical Sciences, vol 45. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-38967-5_10

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