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Development of MOEMS Devices and Their Reliability Issues

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Applied Scanning Probe Methods VII

Part of the book series: NanoScience and Technology ((NANO))

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29.4 Summary

It is believed that MOEMS along with the development of MEMS are expected to have a major impact on our lives, much like the way that the integrated circuit has affected information technology. Some typical MOEMS devices were introduced in this chapter. Their structure and mechanisms were briefly discussed. Some of the failure mechanisms of the MOEMS were also discussed. It is believed that MOEMS failure mechanisms studies and the development of novel stiction, friction, wear, and residual stress reduction techniques will become critical for commercialization of MOEMS.

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Author information

Authors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM) W 390 Scott Laboratory, Ohio State University, 201 W. 19th Avenue, Columbus, Ohio, 43210-1142, USA

    Bharat Bhushan

  2. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM), The Ohio State University, 650 Ackerman Road, Suite 255, Columbus, Ohio, 43202, USA

    Huiwen Liu

Authors
  1. Bharat Bhushan
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  2. Huiwen Liu
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Editor information

Editors and Affiliations

  1. Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM) W390 Scott Laboratory, The Ohio State University, 201W. 19th Avenue, Columbus, Ohio, 43210-1142, USA

    Bharat Bhushan

  2. Center for Nanotechnology (CeNTech) and Institute of Physics, University of Münster, Gievenbecker Weg 11, 48149, Münster, Germany

    Harald Fuchs

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Bhushan, B., Liu, H. (2007). Development of MOEMS Devices and Their Reliability Issues. In: Bhushan, B., Fuchs, H. (eds) Applied Scanning Probe Methods VII. NanoScience and Technology. Springer, Berlin, Heidelberg . https://doi.org/10.1007/978-3-540-37321-6_9

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